DE69413925D1 - Positiv arbeitende Resistzusammensetzung - Google Patents
Positiv arbeitende ResistzusammensetzungInfo
- Publication number
- DE69413925D1 DE69413925D1 DE69413925T DE69413925T DE69413925D1 DE 69413925 D1 DE69413925 D1 DE 69413925D1 DE 69413925 T DE69413925 T DE 69413925T DE 69413925 T DE69413925 T DE 69413925T DE 69413925 D1 DE69413925 D1 DE 69413925D1
- Authority
- DE
- Germany
- Prior art keywords
- resist composition
- positive resist
- positive
- composition
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Phenolic Resins Or Amino Resins (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27822593A JP3319092B2 (ja) | 1993-11-08 | 1993-11-08 | ポジ型レジスト組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69413925D1 true DE69413925D1 (de) | 1998-11-19 |
DE69413925T2 DE69413925T2 (de) | 1999-04-29 |
Family
ID=17594364
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69413925T Expired - Fee Related DE69413925T2 (de) | 1993-11-08 | 1994-11-07 | Positiv arbeitende Resistzusammensetzung |
Country Status (7)
Country | Link |
---|---|
US (1) | US5792586A (de) |
EP (1) | EP0652484B1 (de) |
JP (1) | JP3319092B2 (de) |
KR (1) | KR100334145B1 (de) |
CA (1) | CA2135250A1 (de) |
DE (1) | DE69413925T2 (de) |
TW (1) | TW350040B (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW442710B (en) * | 1995-12-07 | 2001-06-23 | Clariant Finance Bvi Ltd | Isolation of novolak resin without high temperature distillation and photoresist composition therefrom |
US5853954A (en) * | 1996-12-18 | 1998-12-29 | Clariant Finance (Bvi) Limited | Fractionated novolak resin and photoresist composition therefrom |
KR102482878B1 (ko) | 2017-09-26 | 2022-12-29 | 삼성전자 주식회사 | 집적회로 소자의 제조 방법 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4123279A (en) * | 1974-03-25 | 1978-10-31 | Fuji Photo Film Co., Ltd. | Light-sensitive o-quinonediazide containing planographic printing plate |
JPH0656487B2 (ja) * | 1986-05-02 | 1994-07-27 | 東京応化工業株式会社 | ポジ型ホトレジスト用組成物 |
US4797345A (en) * | 1987-07-01 | 1989-01-10 | Olin Hunt Specialty Products, Inc. | Light-sensitive 1,2-naphthoquinone-2-diazide-4-sulfonic acid monoesters of cycloalkyl substituted phenol and their use in light-sensitive mixtures |
NO891063L (no) * | 1988-03-31 | 1989-10-02 | Thiokol Morton Inc | Novolakharpikser av blandede aldehyder og positive fotoresistmaterialer fremstilt fra slike harpikser. |
US5238771A (en) * | 1988-05-31 | 1993-08-24 | Konica Corporation | Lithographic printing plate utilizing aluminum substrate with photosensitive layer containing o-naphthoquinonediazide sulfonic acid ester, alkali soluble resin and select additive |
JPH03274054A (ja) * | 1990-03-23 | 1991-12-05 | Konica Corp | 感光性組成物 |
JP3182823B2 (ja) * | 1991-12-27 | 2001-07-03 | 住友化学工業株式会社 | ポジ型レジスト組成物 |
JPH05188590A (ja) * | 1992-01-16 | 1993-07-30 | Sumitomo Chem Co Ltd | ポジ型レジスト組成物 |
JPH05222146A (ja) * | 1992-02-14 | 1993-08-31 | Daikin Ind Ltd | 硬質ポリウレタンフォームの製造法 |
-
1993
- 1993-11-08 JP JP27822593A patent/JP3319092B2/ja not_active Expired - Fee Related
-
1994
- 1994-11-02 TW TW083110067A patent/TW350040B/zh not_active IP Right Cessation
- 1994-11-03 US US08/335,406 patent/US5792586A/en not_active Expired - Lifetime
- 1994-11-07 EP EP94117524A patent/EP0652484B1/de not_active Expired - Lifetime
- 1994-11-07 CA CA002135250A patent/CA2135250A1/en not_active Abandoned
- 1994-11-07 DE DE69413925T patent/DE69413925T2/de not_active Expired - Fee Related
- 1994-11-08 KR KR1019940029202A patent/KR100334145B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0652484B1 (de) | 1998-10-14 |
DE69413925T2 (de) | 1999-04-29 |
EP0652484A2 (de) | 1995-05-10 |
US5792586A (en) | 1998-08-11 |
JPH07128849A (ja) | 1995-05-19 |
CA2135250A1 (en) | 1995-05-09 |
KR100334145B1 (ko) | 2002-11-29 |
TW350040B (en) | 1999-01-11 |
JP3319092B2 (ja) | 2002-08-26 |
EP0652484A3 (de) | 1996-01-17 |
KR950014985A (ko) | 1995-06-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |