DE69318417T2 - Preionisator für laser - Google Patents

Preionisator für laser

Info

Publication number
DE69318417T2
DE69318417T2 DE69318417T DE69318417T DE69318417T2 DE 69318417 T2 DE69318417 T2 DE 69318417T2 DE 69318417 T DE69318417 T DE 69318417T DE 69318417 T DE69318417 T DE 69318417T DE 69318417 T2 DE69318417 T2 DE 69318417T2
Authority
DE
Germany
Prior art keywords
preionizer
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69318417T
Other languages
English (en)
Other versions
DE69318417D1 (de
Inventor
Donald Larson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of DE69318417D1 publication Critical patent/DE69318417D1/de
Application granted granted Critical
Publication of DE69318417T2 publication Critical patent/DE69318417T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE69318417T 1992-10-09 1993-10-05 Preionisator für laser Expired - Lifetime DE69318417T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/958,922 US5337330A (en) 1992-10-09 1992-10-09 Pre-ionizer for a laser
PCT/US1993/009491 WO1994009536A1 (en) 1992-10-09 1993-10-05 Pre-ionizer for a laser

Publications (2)

Publication Number Publication Date
DE69318417D1 DE69318417D1 (de) 1998-06-10
DE69318417T2 true DE69318417T2 (de) 1998-11-26

Family

ID=25501447

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69318417T Expired - Lifetime DE69318417T2 (de) 1992-10-09 1993-10-05 Preionisator für laser

Country Status (8)

Country Link
US (1) US5337330A (de)
EP (1) EP0664057B1 (de)
JP (1) JP2980985B2 (de)
CA (1) CA2146641C (de)
DE (1) DE69318417T2 (de)
HK (1) HK1004931A1 (de)
SG (1) SG48818A1 (de)
WO (1) WO1994009536A1 (de)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5719896A (en) * 1996-03-29 1998-02-17 Cymer Inc. Low cost corona pre-ionizer for a laser
US5771258A (en) * 1997-02-11 1998-06-23 Cymer, Inc. Aerodynamic chamber design for high pulse repetition rate excimer lasers
US5986547A (en) * 1997-03-03 1999-11-16 Korver; Kelvin Apparatus and method for improving the safety of railroad systems
US5991324A (en) * 1998-03-11 1999-11-23 Cymer, Inc. Reliable. modular, production quality narrow-band KRF excimer laser
US6128323A (en) * 1997-04-23 2000-10-03 Cymer, Inc. Reliable modular production quality narrow-band high REP rate excimer laser
US5818865A (en) * 1997-05-16 1998-10-06 Cymer, Inc. Compact excimer laser insulator with integral pre-ionizer
US6330261B1 (en) 1997-07-18 2001-12-11 Cymer, Inc. Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
IL138064A (en) * 1998-03-04 2004-06-20 Cymer Inc Laser excimer KrF reliable narrow-band, modular create
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
US6424666B1 (en) 1999-06-23 2002-07-23 Lambda Physik Ag Line-narrowing module for high power laser
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6381256B1 (en) 1999-02-10 2002-04-30 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6188709B1 (en) 1998-09-18 2001-02-13 Cymer, Inc. Aerodynamic electrode support bar
US6463086B1 (en) 1999-02-10 2002-10-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6546037B2 (en) 1999-02-10 2003-04-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6421365B1 (en) 1999-11-18 2002-07-16 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6757315B1 (en) * 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6965624B2 (en) * 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6700915B2 (en) 1999-03-12 2004-03-02 Lambda Physik Ag Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US6714577B1 (en) 1999-03-17 2004-03-30 Lambda Physik Ag Energy stabilized gas discharge laser
DE29907349U1 (de) 1999-04-26 2000-07-06 Lambda Physik Gmbh Laser zur Erzeugung schmalbandiger Strahlung
US6546036B1 (en) 1999-06-08 2003-04-08 Lambda Physik Ag Roof configuration for laser discharge electrodes
DE19934013C1 (de) * 1999-06-21 2000-08-10 Tui Laser Ag Vorrichtung zur Vermeidung von Gleitentladungen bei der Vorionisierung in einem Gaslaser mit Coronaentladung
US6700908B1 (en) 1999-06-21 2004-03-02 Tui Laser Ag Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
JP3428632B2 (ja) * 1999-08-04 2003-07-22 ウシオ電機株式会社 ガスレーザ装置用コロナ予備電離電極
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
US6553050B1 (en) 1999-11-18 2003-04-22 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6603788B1 (en) 1999-11-23 2003-08-05 Lambda Physik Ag Resonator for single line selection
JP3399517B2 (ja) 1999-12-08 2003-04-21 ウシオ電機株式会社 紫外線を放出するガスレーザ装置
DE10190427T1 (de) 2000-01-25 2002-06-06 Lambda Physik Ag Energieüberwachungsvorrichtung für einen Fluormolekül-Laser
US7075963B2 (en) 2000-01-27 2006-07-11 Lambda Physik Ag Tunable laser with stabilized grating
US6735232B2 (en) 2000-01-27 2004-05-11 Lambda Physik Ag Laser with versatile output energy
US6570901B2 (en) 2000-02-24 2003-05-27 Lambda Physik Ag Excimer or molecular fluorine laser having lengthened electrodes
WO2001084678A2 (en) 2000-04-18 2001-11-08 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6862307B2 (en) * 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser
US6577663B2 (en) 2000-06-19 2003-06-10 Lambda Physik Ag Narrow bandwidth oscillator-amplifier system
RU2206186C2 (ru) 2000-07-04 2003-06-10 Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований Способ получения коротковолнового излучения из газоразрядной плазмы и устройство для его реализации
US6603789B1 (en) 2000-07-05 2003-08-05 Lambda Physik Ag Narrow band excimer or molecular fluorine laser with improved beam parameters
US6721345B2 (en) 2000-07-14 2004-04-13 Lambda Physik Ag Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
US6807205B1 (en) 2000-07-14 2004-10-19 Lambda Physik Ag Precise monitor etalon calibration technique
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US6801561B2 (en) 2000-09-25 2004-10-05 Lambda Physik Ag Laser system and method for spectral narrowing through wavefront correction
US6747741B1 (en) 2000-10-12 2004-06-08 Lambda Physik Ag Multiple-pass interferometric device
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
US6998620B2 (en) * 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
JP2006273670A (ja) * 2005-03-29 2006-10-12 Ngk Insulators Ltd アルミナ管
US7542502B2 (en) * 2005-09-27 2009-06-02 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
JP6208483B2 (ja) * 2013-07-10 2017-10-04 ギガフォトン株式会社 予備電離放電装置及びレーザ装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679999A (en) * 1970-06-12 1972-07-25 Gen Electric Laser cooling method and apparatus
US4127834A (en) * 1977-08-29 1978-11-28 Motorola, Inc. Temperature compensating apparatus for microwave oscillators and the like
US4180763A (en) * 1978-01-25 1979-12-25 General Electric Company High intensity discharge lamp geometries
IT1197768B (it) * 1983-12-29 1988-12-06 Selenia Ind Elettroniche Preionizzatore ad effetto corona per laser a gas
US4750943A (en) * 1986-02-28 1988-06-14 Tpv Energy Systems, Inc. Thermophotovoltaic system
JP2794792B2 (ja) * 1989-06-07 1998-09-10 三菱電機株式会社 横方向放電励起パルスレーザー発振装置
US4953174A (en) * 1989-10-23 1990-08-28 Hughes Aircraft Company Preionization electrode for pulsed gas laser
WO1992014285A1 (fr) * 1991-02-08 1992-08-20 Mitsubishi Denki Kabushiki Kaisha Dispositif oscillant pour laser pulse du type a pompage par decharge transversal
US5347531A (en) * 1991-02-08 1994-09-13 Mitsubishi Denki Kabushiki Kaisha Transverse discharging excitation pulse laser oscillator apparatus
DE4108472C2 (de) * 1991-03-15 1995-10-05 Lambda Physik Forschung Vorrichtung zum Vorionisieren von Gas in einem gepulsten Gaslaser
DE4113241C2 (de) * 1991-04-23 1994-08-11 Lambda Physik Forschung Gepulster Gasentladungslaser

Also Published As

Publication number Publication date
JP2980985B2 (ja) 1999-11-22
US5337330A (en) 1994-08-09
EP0664057B1 (de) 1998-05-06
WO1994009536A1 (en) 1994-04-28
EP0664057A1 (de) 1995-07-26
DE69318417D1 (de) 1998-06-10
HK1004931A1 (en) 1998-12-11
CA2146641A1 (en) 1994-04-28
CA2146641C (en) 2003-04-29
SG48818A1 (en) 1998-05-18
JPH08502145A (ja) 1996-03-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition