HK1004931A1 - Pre-ionizer for a laser - Google Patents

Pre-ionizer for a laser

Info

Publication number
HK1004931A1
HK1004931A1 HK98104061A HK98104061A HK1004931A1 HK 1004931 A1 HK1004931 A1 HK 1004931A1 HK 98104061 A HK98104061 A HK 98104061A HK 98104061 A HK98104061 A HK 98104061A HK 1004931 A1 HK1004931 A1 HK 1004931A1
Authority
HK
Hong Kong
Prior art keywords
ionizer
laser
Prior art date
Application number
HK98104061A
Other languages
English (en)
Inventor
Donald G Larson
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of HK1004931A1 publication Critical patent/HK1004931A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
HK98104061A 1992-10-09 1998-05-12 Pre-ionizer for a laser HK1004931A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/958,922 US5337330A (en) 1992-10-09 1992-10-09 Pre-ionizer for a laser
PCT/US1993/009491 WO1994009536A1 (en) 1992-10-09 1993-10-05 Pre-ionizer for a laser

Publications (1)

Publication Number Publication Date
HK1004931A1 true HK1004931A1 (en) 1998-12-11

Family

ID=25501447

Family Applications (1)

Application Number Title Priority Date Filing Date
HK98104061A HK1004931A1 (en) 1992-10-09 1998-05-12 Pre-ionizer for a laser

Country Status (8)

Country Link
US (1) US5337330A (de)
EP (1) EP0664057B1 (de)
JP (1) JP2980985B2 (de)
CA (1) CA2146641C (de)
DE (1) DE69318417T2 (de)
HK (1) HK1004931A1 (de)
SG (1) SG48818A1 (de)
WO (1) WO1994009536A1 (de)

Families Citing this family (51)

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US5719896A (en) * 1996-03-29 1998-02-17 Cymer Inc. Low cost corona pre-ionizer for a laser
US5771258A (en) * 1997-02-11 1998-06-23 Cymer, Inc. Aerodynamic chamber design for high pulse repetition rate excimer lasers
US5986547A (en) * 1997-03-03 1999-11-16 Korver; Kelvin Apparatus and method for improving the safety of railroad systems
US5991324A (en) * 1998-03-11 1999-11-23 Cymer, Inc. Reliable. modular, production quality narrow-band KRF excimer laser
US6128323A (en) * 1997-04-23 2000-10-03 Cymer, Inc. Reliable modular production quality narrow-band high REP rate excimer laser
US5818865A (en) * 1997-05-16 1998-10-06 Cymer, Inc. Compact excimer laser insulator with integral pre-ionizer
US6330261B1 (en) 1997-07-18 2001-12-11 Cymer, Inc. Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
CA2322005C (en) * 1998-03-04 2003-03-18 Cymer, Inc. Reliable, modular, production quality narrow-band krf excimer laser
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
US6456643B1 (en) * 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6424666B1 (en) 1999-06-23 2002-07-23 Lambda Physik Ag Line-narrowing module for high power laser
US6381256B1 (en) 1999-02-10 2002-04-30 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6188709B1 (en) 1998-09-18 2001-02-13 Cymer, Inc. Aerodynamic electrode support bar
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6463086B1 (en) 1999-02-10 2002-10-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6546037B2 (en) 1999-02-10 2003-04-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6757315B1 (en) * 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6965624B2 (en) * 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6421365B1 (en) 1999-11-18 2002-07-16 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US6700915B2 (en) 1999-03-12 2004-03-02 Lambda Physik Ag Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections
US6714577B1 (en) 1999-03-17 2004-03-30 Lambda Physik Ag Energy stabilized gas discharge laser
DE29907349U1 (de) 1999-04-26 2000-07-06 Lambda Physik Gmbh Laser zur Erzeugung schmalbandiger Strahlung
US6546036B1 (en) 1999-06-08 2003-04-08 Lambda Physik Ag Roof configuration for laser discharge electrodes
US6700908B1 (en) 1999-06-21 2004-03-02 Tui Laser Ag Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
DE19934013C1 (de) * 1999-06-21 2000-08-10 Tui Laser Ag Vorrichtung zur Vermeidung von Gleitentladungen bei der Vorionisierung in einem Gaslaser mit Coronaentladung
JP3428632B2 (ja) * 1999-08-04 2003-07-22 ウシオ電機株式会社 ガスレーザ装置用コロナ予備電離電極
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
US6553050B1 (en) 1999-11-18 2003-04-22 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6603788B1 (en) 1999-11-23 2003-08-05 Lambda Physik Ag Resonator for single line selection
JP3399517B2 (ja) 1999-12-08 2003-04-21 ウシオ電機株式会社 紫外線を放出するガスレーザ装置
WO2001055684A2 (en) 2000-01-25 2001-08-02 Lambda Physik Ag Energy monitor for molecular fluorine laser
US7075963B2 (en) 2000-01-27 2006-07-11 Lambda Physik Ag Tunable laser with stabilized grating
US6735232B2 (en) 2000-01-27 2004-05-11 Lambda Physik Ag Laser with versatile output energy
US6570901B2 (en) 2000-02-24 2003-05-27 Lambda Physik Ag Excimer or molecular fluorine laser having lengthened electrodes
WO2001084678A2 (en) 2000-04-18 2001-11-08 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6862307B2 (en) * 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser
US6577663B2 (en) 2000-06-19 2003-06-10 Lambda Physik Ag Narrow bandwidth oscillator-amplifier system
RU2206186C2 (ru) 2000-07-04 2003-06-10 Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований Способ получения коротковолнового излучения из газоразрядной плазмы и устройство для его реализации
US6603789B1 (en) 2000-07-05 2003-08-05 Lambda Physik Ag Narrow band excimer or molecular fluorine laser with improved beam parameters
US6721345B2 (en) 2000-07-14 2004-04-13 Lambda Physik Ag Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
US6807205B1 (en) 2000-07-14 2004-10-19 Lambda Physik Ag Precise monitor etalon calibration technique
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US6801561B2 (en) 2000-09-25 2004-10-05 Lambda Physik Ag Laser system and method for spectral narrowing through wavefront correction
US6747741B1 (en) 2000-10-12 2004-06-08 Lambda Physik Ag Multiple-pass interferometric device
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
US6998620B2 (en) * 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
JP2006273670A (ja) * 2005-03-29 2006-10-12 Ngk Insulators Ltd アルミナ管
US7542502B2 (en) * 2005-09-27 2009-06-02 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
JP6208483B2 (ja) * 2013-07-10 2017-10-04 ギガフォトン株式会社 予備電離放電装置及びレーザ装置

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US3679999A (en) * 1970-06-12 1972-07-25 Gen Electric Laser cooling method and apparatus
US4127834A (en) * 1977-08-29 1978-11-28 Motorola, Inc. Temperature compensating apparatus for microwave oscillators and the like
US4180763A (en) * 1978-01-25 1979-12-25 General Electric Company High intensity discharge lamp geometries
IT1197768B (it) * 1983-12-29 1988-12-06 Selenia Ind Elettroniche Preionizzatore ad effetto corona per laser a gas
US4750943A (en) * 1986-02-28 1988-06-14 Tpv Energy Systems, Inc. Thermophotovoltaic system
JP2794792B2 (ja) * 1989-06-07 1998-09-10 三菱電機株式会社 横方向放電励起パルスレーザー発振装置
US4953174A (en) * 1989-10-23 1990-08-28 Hughes Aircraft Company Preionization electrode for pulsed gas laser
WO1992014285A1 (fr) * 1991-02-08 1992-08-20 Mitsubishi Denki Kabushiki Kaisha Dispositif oscillant pour laser pulse du type a pompage par decharge transversal
DE69109479T2 (de) * 1991-02-08 1996-02-15 Mitsubishi Electric Corp Mit transversaler entladung gepumpter pulslaser.
DE4108472C2 (de) * 1991-03-15 1995-10-05 Lambda Physik Forschung Vorrichtung zum Vorionisieren von Gas in einem gepulsten Gaslaser
DE4113241C2 (de) * 1991-04-23 1994-08-11 Lambda Physik Forschung Gepulster Gasentladungslaser

Also Published As

Publication number Publication date
WO1994009536A1 (en) 1994-04-28
JP2980985B2 (ja) 1999-11-22
CA2146641C (en) 2003-04-29
DE69318417T2 (de) 1998-11-26
DE69318417D1 (de) 1998-06-10
US5337330A (en) 1994-08-09
EP0664057A1 (de) 1995-07-26
SG48818A1 (en) 1998-05-18
EP0664057B1 (de) 1998-05-06
CA2146641A1 (en) 1994-04-28
JPH08502145A (ja) 1996-03-05

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Legal Events

Date Code Title Description
PF Patent in force
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20101005