SG48818A1 - Pre-ionizer for a laser - Google Patents

Pre-ionizer for a laser

Info

Publication number
SG48818A1
SG48818A1 SG1996001985A SG1996001985A SG48818A1 SG 48818 A1 SG48818 A1 SG 48818A1 SG 1996001985 A SG1996001985 A SG 1996001985A SG 1996001985 A SG1996001985 A SG 1996001985A SG 48818 A1 SG48818 A1 SG 48818A1
Authority
SG
Singapore
Prior art keywords
ionizer
laser
Prior art date
Application number
SG1996001985A
Other languages
English (en)
Inventor
Donald G Larson
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of SG48818A1 publication Critical patent/SG48818A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
SG1996001985A 1992-10-09 1993-10-05 Pre-ionizer for a laser SG48818A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/958,922 US5337330A (en) 1992-10-09 1992-10-09 Pre-ionizer for a laser

Publications (1)

Publication Number Publication Date
SG48818A1 true SG48818A1 (en) 1998-05-18

Family

ID=25501447

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996001985A SG48818A1 (en) 1992-10-09 1993-10-05 Pre-ionizer for a laser

Country Status (8)

Country Link
US (1) US5337330A (de)
EP (1) EP0664057B1 (de)
JP (1) JP2980985B2 (de)
CA (1) CA2146641C (de)
DE (1) DE69318417T2 (de)
HK (1) HK1004931A1 (de)
SG (1) SG48818A1 (de)
WO (1) WO1994009536A1 (de)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5719896A (en) * 1996-03-29 1998-02-17 Cymer Inc. Low cost corona pre-ionizer for a laser
US5771258A (en) * 1997-02-11 1998-06-23 Cymer, Inc. Aerodynamic chamber design for high pulse repetition rate excimer lasers
US5986547A (en) * 1997-03-03 1999-11-16 Korver; Kelvin Apparatus and method for improving the safety of railroad systems
US6128323A (en) * 1997-04-23 2000-10-03 Cymer, Inc. Reliable modular production quality narrow-band high REP rate excimer laser
US5991324A (en) * 1998-03-11 1999-11-23 Cymer, Inc. Reliable. modular, production quality narrow-band KRF excimer laser
US5818865A (en) * 1997-05-16 1998-10-06 Cymer, Inc. Compact excimer laser insulator with integral pre-ionizer
US6330261B1 (en) 1997-07-18 2001-12-11 Cymer, Inc. Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
RU2197045C2 (ru) * 1998-03-04 2003-01-20 Саймер, Инк. УЗКОПОЛОСНЫЙ ЭКСИМЕРНЫЙ ЛАЗЕР НА ФТОРИДЕ КРИПТОНА (KrF) ДЛЯ ПРОМЫШЛЕННОГО ПРИМЕНЕНИЯ, ИМЕЮЩИЙ ВЫСОКУЮ НАДЕЖНОСТЬ И МОДУЛЬНУЮ КОНСТРУКЦИЮ
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
US6381256B1 (en) 1999-02-10 2002-04-30 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6456643B1 (en) * 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6424666B1 (en) 1999-06-23 2002-07-23 Lambda Physik Ag Line-narrowing module for high power laser
US6188709B1 (en) 1998-09-18 2001-02-13 Cymer, Inc. Aerodynamic electrode support bar
US6965624B2 (en) * 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6546037B2 (en) 1999-02-10 2003-04-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6421365B1 (en) 1999-11-18 2002-07-16 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6463086B1 (en) 1999-02-10 2002-10-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
US6757315B1 (en) * 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6700915B2 (en) 1999-03-12 2004-03-02 Lambda Physik Ag Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US6714577B1 (en) 1999-03-17 2004-03-30 Lambda Physik Ag Energy stabilized gas discharge laser
DE29907349U1 (de) 1999-04-26 2000-07-06 Lambda Physik Gmbh Laser zur Erzeugung schmalbandiger Strahlung
US6546036B1 (en) 1999-06-08 2003-04-08 Lambda Physik Ag Roof configuration for laser discharge electrodes
DE19934013C1 (de) * 1999-06-21 2000-08-10 Tui Laser Ag Vorrichtung zur Vermeidung von Gleitentladungen bei der Vorionisierung in einem Gaslaser mit Coronaentladung
US6700908B1 (en) 1999-06-21 2004-03-02 Tui Laser Ag Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
JP3428632B2 (ja) * 1999-08-04 2003-07-22 ウシオ電機株式会社 ガスレーザ装置用コロナ予備電離電極
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
US6553050B1 (en) 1999-11-18 2003-04-22 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
US6603788B1 (en) 1999-11-23 2003-08-05 Lambda Physik Ag Resonator for single line selection
JP3399517B2 (ja) * 1999-12-08 2003-04-21 ウシオ電機株式会社 紫外線を放出するガスレーザ装置
JP2003521683A (ja) 2000-01-25 2003-07-15 ラムダ フィジーク アーゲー ビーム・パラメータ監視ユニット、分子弗素（Ｆ２）或はＡｒＦレーザ・システム、分子弗素（Ｆ２）レーザ・システム、およびＡｒＦレーザ・システム
US6735232B2 (en) 2000-01-27 2004-05-11 Lambda Physik Ag Laser with versatile output energy
US7075963B2 (en) 2000-01-27 2006-07-11 Lambda Physik Ag Tunable laser with stabilized grating
US6570901B2 (en) 2000-02-24 2003-05-27 Lambda Physik Ag Excimer or molecular fluorine laser having lengthened electrodes
US6834066B2 (en) 2000-04-18 2004-12-21 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6862307B2 (en) * 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser
US6577663B2 (en) 2000-06-19 2003-06-10 Lambda Physik Ag Narrow bandwidth oscillator-amplifier system
RU2206186C2 (ru) 2000-07-04 2003-06-10 Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований Способ получения коротковолнового излучения из газоразрядной плазмы и устройство для его реализации
US6603789B1 (en) 2000-07-05 2003-08-05 Lambda Physik Ag Narrow band excimer or molecular fluorine laser with improved beam parameters
US6721345B2 (en) 2000-07-14 2004-04-13 Lambda Physik Ag Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
US6807205B1 (en) 2000-07-14 2004-10-19 Lambda Physik Ag Precise monitor etalon calibration technique
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US6801561B2 (en) 2000-09-25 2004-10-05 Lambda Physik Ag Laser system and method for spectral narrowing through wavefront correction
US6747741B1 (en) 2000-10-12 2004-06-08 Lambda Physik Ag Multiple-pass interferometric device
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
US6998620B2 (en) * 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
JP2006273670A (ja) 2005-03-29 2006-10-12 Ngk Insulators Ltd アルミナ管
US7542502B2 (en) 2005-09-27 2009-06-02 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
JP6208483B2 (ja) 2013-07-10 2017-10-04 ギガフォトン株式会社 予備電離放電装置及びレーザ装置

Family Cites Families (11)

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Publication number Priority date Publication date Assignee Title
US3679999A (en) * 1970-06-12 1972-07-25 Gen Electric Laser cooling method and apparatus
US4127834A (en) * 1977-08-29 1978-11-28 Motorola, Inc. Temperature compensating apparatus for microwave oscillators and the like
US4180763A (en) * 1978-01-25 1979-12-25 General Electric Company High intensity discharge lamp geometries
IT1197768B (it) * 1983-12-29 1988-12-06 Selenia Ind Elettroniche Preionizzatore ad effetto corona per laser a gas
US4750943A (en) * 1986-02-28 1988-06-14 Tpv Energy Systems, Inc. Thermophotovoltaic system
JP2794792B2 (ja) * 1989-06-07 1998-09-10 三菱電機株式会社 横方向放電励起パルスレーザー発振装置
US4953174A (en) * 1989-10-23 1990-08-28 Hughes Aircraft Company Preionization electrode for pulsed gas laser
DE69109479T2 (de) * 1991-02-08 1996-02-15 Mitsubishi Electric Corp Mit transversaler entladung gepumpter pulslaser.
WO1992014285A1 (fr) * 1991-02-08 1992-08-20 Mitsubishi Denki Kabushiki Kaisha Dispositif oscillant pour laser pulse du type a pompage par decharge transversal
DE4108472C2 (de) * 1991-03-15 1995-10-05 Lambda Physik Forschung Vorrichtung zum Vorionisieren von Gas in einem gepulsten Gaslaser
DE4113241C2 (de) * 1991-04-23 1994-08-11 Lambda Physik Forschung Gepulster Gasentladungslaser

Also Published As

Publication number Publication date
CA2146641C (en) 2003-04-29
EP0664057B1 (de) 1998-05-06
DE69318417D1 (de) 1998-06-10
US5337330A (en) 1994-08-09
DE69318417T2 (de) 1998-11-26
HK1004931A1 (en) 1998-12-11
JP2980985B2 (ja) 1999-11-22
JPH08502145A (ja) 1996-03-05
WO1994009536A1 (en) 1994-04-28
EP0664057A1 (de) 1995-07-26
CA2146641A1 (en) 1994-04-28

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