GB8816423D0 - Excimer laser beam monogenizer system - Google Patents

Excimer laser beam monogenizer system

Info

Publication number
GB8816423D0
GB8816423D0 GB888816423A GB8816423A GB8816423D0 GB 8816423 D0 GB8816423 D0 GB 8816423D0 GB 888816423 A GB888816423 A GB 888816423A GB 8816423 A GB8816423 A GB 8816423A GB 8816423 D0 GB8816423 D0 GB 8816423D0
Authority
GB
United Kingdom
Prior art keywords
monogenizer
laser beam
excimer laser
excimer
monogenizer system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB888816423A
Other versions
GB2220502A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Exitech Ltd
Original Assignee
Exitech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Exitech Ltd filed Critical Exitech Ltd
Priority to GB8816423A priority Critical patent/GB2220502A/en
Publication of GB8816423D0 publication Critical patent/GB8816423D0/en
Publication of GB2220502A publication Critical patent/GB2220502A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0732—Shaping the laser spot into a rectangular shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0972—Prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/001—Axicons, waxicons, reflaxicons

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lasers (AREA)
GB8816423A 1988-07-09 1988-07-09 Excimer laser beam homogenizer system Withdrawn GB2220502A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8816423A GB2220502A (en) 1988-07-09 1988-07-09 Excimer laser beam homogenizer system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8816423A GB2220502A (en) 1988-07-09 1988-07-09 Excimer laser beam homogenizer system

Publications (2)

Publication Number Publication Date
GB8816423D0 true GB8816423D0 (en) 1988-08-17
GB2220502A GB2220502A (en) 1990-01-10

Family

ID=10640223

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8816423A Withdrawn GB2220502A (en) 1988-07-09 1988-07-09 Excimer laser beam homogenizer system

Country Status (1)

Country Link
GB (1) GB2220502A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04104901A (en) * 1990-08-18 1992-04-07 Sumitomo Electric Ind Ltd Production of oxide superconducting thin film
WO1995018984A1 (en) * 1994-01-07 1995-07-13 Coherent, Inc. Apparatus for creating a square or rectangular laser beam with a uniform intensity profile
US5898725A (en) * 1997-01-21 1999-04-27 Cymer, Inc. Excimer laser with greater spectral bandwidth and beam stability
US6771683B2 (en) * 2000-10-26 2004-08-03 Coherent, Inc. Intra-cavity beam homogenizer resonator
FR2849509B1 (en) * 2002-12-31 2005-04-08 Jobin Yvon Sas SURFACE LIGHTING SYSTEM AND MICROSCOPE COMPRISING SUCH A SYSTEM
ES2313806B1 (en) * 2004-12-30 2009-12-17 Universidad De Granada LASER CALIBRATION PROCEDURE CONSIDERING PULSE SOLUTION.
JP2006187783A (en) * 2005-01-05 2006-07-20 Disco Abrasive Syst Ltd Laser beam machine
JP6172448B2 (en) * 2013-05-30 2017-08-02 株式会社リコー Optical element, projection optical system, object detection device
JP2016075564A (en) * 2014-10-06 2016-05-12 株式会社リコー Projection optical system and object detection device
CN104934846B (en) * 2015-06-16 2018-06-01 中国科学院光电研究院 A kind of excimer laser
GB2541412B (en) * 2015-08-18 2018-08-01 M Solv Ltd Method and Apparatus for Forming a Conductive Track
CN107290861A (en) * 2017-08-01 2017-10-24 沈阳雷卓激光医疗器械有限公司 Laser beam homogenization device and method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3414836A (en) * 1963-11-18 1968-12-03 Trw Inc Q-switched laser
GB1549613A (en) * 1975-12-23 1979-08-08 Plessey Co Ltd Optical system for producing an area of light of even dispersion of illumination
US4318594A (en) * 1977-02-15 1982-03-09 Canon Kabushiki Kaisha Beam shaping optical system
US4544898A (en) * 1983-05-09 1985-10-01 Grumman Aerospace Corporation Signal device employing photorefractive area modulation
CA1275208C (en) * 1985-01-25 1990-10-16 Roger W. Lange Silica coating

Also Published As

Publication number Publication date
GB2220502A (en) 1990-01-10

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)