DE69306049D1 - Vorrichtung zum Schleifen von Spiegeloberfläche - Google Patents

Vorrichtung zum Schleifen von Spiegeloberfläche

Info

Publication number
DE69306049D1
DE69306049D1 DE69306049T DE69306049T DE69306049D1 DE 69306049 D1 DE69306049 D1 DE 69306049D1 DE 69306049 T DE69306049 T DE 69306049T DE 69306049 T DE69306049 T DE 69306049T DE 69306049 D1 DE69306049 D1 DE 69306049D1
Authority
DE
Germany
Prior art keywords
mirror surface
grinding mirror
grinding
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69306049T
Other languages
English (en)
Other versions
DE69306049T2 (de
Inventor
Hitoshi Ohmori
Takeo Nakagawa
Katsuhiko Karikomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP04159882A external-priority patent/JP3128164B2/ja
Priority claimed from JP4414393A external-priority patent/JPH06254754A/ja
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Application granted granted Critical
Publication of DE69306049D1 publication Critical patent/DE69306049D1/de
Publication of DE69306049T2 publication Critical patent/DE69306049T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/001—Devices or means for dressing or conditioning abrasive surfaces involving the use of electric current

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
DE69306049T 1992-06-19 1993-06-18 Vorrichtung zum Schleifen von Spiegeloberfläche Expired - Lifetime DE69306049T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP04159882A JP3128164B2 (ja) 1992-06-19 1992-06-19 メカノケミカル作用を生じる電解ドレッシング用砥石
JP4414393A JPH06254754A (ja) 1993-03-04 1993-03-04 鏡面研削装置及び方法

Publications (2)

Publication Number Publication Date
DE69306049D1 true DE69306049D1 (de) 1997-01-02
DE69306049T2 DE69306049T2 (de) 1997-03-13

Family

ID=26383997

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69306049T Expired - Lifetime DE69306049T2 (de) 1992-06-19 1993-06-18 Vorrichtung zum Schleifen von Spiegeloberfläche

Country Status (4)

Country Link
US (2) US5639363A (de)
EP (1) EP0576937B1 (de)
DE (1) DE69306049T2 (de)
TW (1) TW242597B (de)

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JP3287981B2 (ja) * 1995-08-15 2002-06-04 理化学研究所 形状制御方法とこの方法によるｎｃ加工装置
JPH09232593A (ja) * 1996-02-22 1997-09-05 S I I R D Center:Kk 半導体装置
JPH10337645A (ja) * 1997-04-08 1998-12-22 Olympus Optical Co Ltd 研削方法およびその研削方法により加工されたガラスレンズ
JP3244454B2 (ja) * 1997-06-05 2002-01-07 理化学研究所 切削研削両用工具
WO1999026758A1 (en) * 1997-11-25 1999-06-03 John Hopkins University Electrochemical-control of abrasive polishing and machining rates
JP3214694B2 (ja) * 1997-12-02 2001-10-02 理化学研究所 動圧発生電極
JP2000015557A (ja) * 1998-04-27 2000-01-18 Ebara Corp 研磨装置
JP3366256B2 (ja) * 1998-07-02 2003-01-14 アルプス電気株式会社 薄膜磁気ヘッド及びその製造方法
JP2000061839A (ja) * 1998-08-19 2000-02-29 Rikagaku Kenkyusho マイクロ放電ツルーイング装置とこれを用いた微細加工方法
JP2000117544A (ja) * 1998-10-14 2000-04-25 Nisshin Unyu Kogyo Kk 長尺金属物外周面の鏡面加工方法
JP4230035B2 (ja) * 1998-12-25 2009-02-25 昭和電工株式会社 炭化珪素単結晶およびその製造方法
JP3349975B2 (ja) * 1999-01-13 2002-11-25 アルプス電気株式会社 薄膜磁気ヘッド及びその製造方法
JP2000296413A (ja) * 1999-04-14 2000-10-24 Inst Of Physical & Chemical Res 卓上ｅｌｉｄ加工装置
JP3422731B2 (ja) * 1999-07-23 2003-06-30 理化学研究所 Ｅｌｉｄセンタレス研削装置
JP2001062633A (ja) 1999-08-26 2001-03-13 Minebea Co Ltd 曲面加工方法および装置
WO2001036138A1 (en) * 1999-11-16 2001-05-25 Unique Technology International Pte Ltd Combined electrolytic polishing and abrasive super-finishing process
JP3499490B2 (ja) * 2000-02-16 2004-02-23 Ｔｄｋ株式会社 薄膜磁気ヘッドの製造方法
JP4558881B2 (ja) * 2000-03-03 2010-10-06 独立行政法人理化学研究所 マイクロｖ溝加工装置及び方法
JP3485170B2 (ja) 2000-03-09 2004-01-13 理化学研究所 リムーバブル電極
ITTO20010447A1 (it) * 2001-05-11 2002-11-11 Promotec Srl Taglio di lastre metalliche.
US6382807B1 (en) 2001-07-02 2002-05-07 Lucent Technologies Inc. Mirror and a method of making the same
JP3874340B2 (ja) * 2001-10-05 2007-01-31 秋田県 研磨装置
JP4523252B2 (ja) * 2003-09-08 2010-08-11 株式会社ディスコ 半導体ウエーハの加工方法および加工装置
US8268112B2 (en) * 2007-03-27 2012-09-18 Konica Minolta Opto, Inc. Bonding method of resin member
US20100126877A1 (en) * 2008-11-24 2010-05-27 General Electric Company Electrochemical grinding electrode, and apparatus and method using the same
JP5664470B2 (ja) * 2010-06-28 2015-02-04 信越化学工業株式会社 ナノインプリント用合成石英ガラス基板の製造方法
CN102873593A (zh) * 2012-09-06 2013-01-16 河南理工大学 一种金属基砂轮的超声修锐系统
JP6016301B2 (ja) 2013-02-13 2016-10-26 昭和電工株式会社 単結晶ＳｉＣ基板の表面加工方法、その製造方法及び単結晶ＳｉＣ基板の表面加工用研削プレート
US9850589B2 (en) * 2014-05-12 2017-12-26 United Technologies Corporation System and methods for electrochemical grinding with a screen
CN104722864B (zh) * 2015-04-07 2018-10-26 海安欣凯富机械科技有限公司 基于双峰脉冲电流电化学复合机械的平面形金属表面的光整加工方法
JP6489973B2 (ja) * 2015-07-30 2019-03-27 株式会社ディスコ 研削装置
CN106591921B (zh) * 2016-12-07 2018-09-21 湖南科技大学 一种用于铜基钎焊砂轮的elid磨削电解液
CN107350970B (zh) * 2017-05-12 2021-09-10 河南理工大学 一种elid砂轮氧化膜摩擦磨损在线测量、elid磨削、抛光一体机
CN109909897B (zh) * 2019-04-17 2021-01-26 江苏赛扬精工科技有限责任公司 活塞环梯磨专用高自锐性超硬砂轮及其应用
CN111941293B (zh) * 2020-08-20 2021-12-17 河南联合精密材料股份有限公司 磨边轮用金属结合剂，平板玻璃加工用磨边轮及其制备方法

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US3905162A (en) * 1974-07-23 1975-09-16 Silicon Material Inc Method of preparing high yield semiconductor wafer
DE2538855A1 (de) * 1975-09-01 1977-03-10 Wacker Chemitronic Verfahren zur herstellung von schleierfreien halbleiteroberflaechen, insbesondere schleierfreien oberflaechen von (111)-orientiertem galliumarsenid
SU722803A1 (ru) * 1977-06-23 1980-03-25 Предприятие П/Я Р-6721 Устройство дл нат жени обв зочной ленты
SU841889A1 (ru) * 1978-05-03 1981-06-30 Ордена Трудового Красного Знамениэкспериментальный Научно-Исследо-Вательский Институт Металлорежу-Щих Ctahkob Способ обработки токопровод щимАбРАзиВНыМ иНСТРуМЕНТОМ и уСТРОйСТВОК шлифОВАльНОМу СТАНКу дл ЕгООСущЕСТВлЕНи
SU712230A1 (ru) * 1978-08-28 1980-01-30 Предприятие П/Я А-7162 Электролит дл электрохимического травлени игольчатых контактов
SU732114A1 (ru) * 1978-10-18 1980-05-05 Предприятие П/Я М-5841 Электролит дл электрохимического маркировани
GB2106541B (en) * 1981-06-24 1984-11-21 Ohyo Jiki Lab Co Ltd Electrolytic and electric discharge machining of electrically non-conductive workpieces
JPS58114857A (ja) * 1981-12-26 1983-07-08 Inoue Japax Res Inc 表面研磨方法
JPS5958827A (ja) * 1982-09-28 1984-04-04 Toshiba Corp 半導体ウエ−ハ、半導体ウエ−ハの製造方法及び半導体ウエ−ハの製造装置
SU1161298A1 (ru) * 1983-12-20 1985-06-15 Предприятие П/Я Р-6793 Электролит дл электрохимического шлифовани
US4849599A (en) * 1984-06-14 1989-07-18 Akio Kuromatsu Machining method employing cutting or grinding by conductive grindstone
SU1278135A1 (ru) * 1985-03-29 1986-12-23 Предприятие П/Я М-5841 Электролит дл электрохимической обработки легкоплавких сплавов
JPH0621420B2 (ja) * 1985-08-20 1994-03-23 東燃株式会社 炭素繊維の表面処理法
JPH01251037A (ja) * 1988-03-31 1989-10-06 Toshiba Corp 画像形成装置
JPH072307B2 (ja) * 1988-09-13 1995-01-18 旭ダイヤモンド工業株式会社 メタルボンドダイヤモンド砥石
JPH02256419A (ja) * 1989-03-30 1990-10-17 Johnson Kk 電解加工液
SU1722803A1 (ru) * 1990-03-22 1992-03-30 Научно-Исследовательский Институт "Импульс" Масса дл изготовлени абразивного инструмента
US5157876A (en) * 1990-04-10 1992-10-27 Rockwell International Corporation Stress-free chemo-mechanical polishing agent for II-VI compound semiconductor single crystals and method of polishing
US5313742A (en) * 1991-01-11 1994-05-24 Norton Company Highly rigid composite shaped abrasive cutting wheel

Also Published As

Publication number Publication date
DE69306049T2 (de) 1997-03-13
US5639363A (en) 1997-06-17
EP0576937A2 (de) 1994-01-05
US6113464A (en) 2000-09-05
EP0576937B1 (de) 1996-11-20
EP0576937A3 (en) 1994-05-18
TW242597B (de) 1995-03-11

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