DE69303901T2 - Getter-pumpe mit hoher leistung - Google Patents
Getter-pumpe mit hoher leistungInfo
- Publication number
- DE69303901T2 DE69303901T2 DE69303901T DE69303901T DE69303901T2 DE 69303901 T2 DE69303901 T2 DE 69303901T2 DE 69303901 T DE69303901 T DE 69303901T DE 69303901 T DE69303901 T DE 69303901T DE 69303901 T2 DE69303901 T2 DE 69303901T2
- Authority
- DE
- Germany
- Prior art keywords
- pump
- blades
- vacuum
- getter
- pump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims abstract description 22
- 229910000986 non-evaporable getter Inorganic materials 0.000 claims abstract description 18
- 239000002245 particle Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000010936 titanium Substances 0.000 claims description 15
- 239000000956 alloy Substances 0.000 claims description 14
- 229910045601 alloy Inorganic materials 0.000 claims description 14
- 229910052726 zirconium Inorganic materials 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 10
- 238000005245 sintering Methods 0.000 claims description 8
- 229910000640 Fe alloy Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 150000002739 metals Chemical class 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052720 vanadium Inorganic materials 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052770 Uranium Inorganic materials 0.000 claims description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 3
- 238000010586 diagram Methods 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- 150000004678 hydrides Chemical class 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 239000010955 niobium Substances 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims description 2
- 229910052776 Thorium Inorganic materials 0.000 claims description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 description 20
- 238000005086 pumping Methods 0.000 description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 description 5
- 230000014759 maintenance of location Effects 0.000 description 5
- 239000008188 pellet Substances 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000004913 activation Effects 0.000 description 4
- 229910001093 Zr alloy Inorganic materials 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000004156 Azodicarbonamide Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910011212 Ti—Fe Inorganic materials 0.000 description 2
- 229910000756 V alloy Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- BVCZEBOGSOYJJT-UHFFFAOYSA-N ammonium carbamate Chemical compound [NH4+].NC([O-])=O BVCZEBOGSOYJJT-UHFFFAOYSA-N 0.000 description 2
- XOZUGNYVDXMRKW-AATRIKPKSA-N azodicarbonamide Chemical compound NC(=O)\N=N\C(N)=O XOZUGNYVDXMRKW-AATRIKPKSA-N 0.000 description 2
- 235000019399 azodicarbonamide Nutrition 0.000 description 2
- KXDHJXZQYSOELW-UHFFFAOYSA-N carbonic acid monoamide Natural products NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000001275 scanning Auger electron spectroscopy Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- -1 ammonium carbamate Chemical class 0.000 description 1
- 150000004657 carbamic acid derivatives Chemical class 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000007529 inorganic bases Chemical class 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000007530 organic bases Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- DNYWZCXLKNTFFI-UHFFFAOYSA-N uranium Chemical compound [U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U][U] DNYWZCXLKNTFFI-UHFFFAOYSA-N 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITMI921753A IT1255439B (it) | 1992-07-17 | 1992-07-17 | Pompa getter non evaporabile |
| PCT/IT1993/000040 WO1994002957A1 (en) | 1992-07-17 | 1993-04-23 | High capacity getter pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69303901D1 DE69303901D1 (de) | 1996-09-05 |
| DE69303901T2 true DE69303901T2 (de) | 1996-11-28 |
Family
ID=11363695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69303901T Expired - Lifetime DE69303901T2 (de) | 1992-07-17 | 1993-04-23 | Getter-pumpe mit hoher leistung |
Country Status (11)
| Country | Link |
|---|---|
| EP (1) | EP0650639B1 (ja) |
| JP (1) | JP2655012B2 (ja) |
| KR (1) | KR100203018B1 (ja) |
| CN (1) | CN1057147C (ja) |
| AT (1) | ATE141025T1 (ja) |
| CA (1) | CA2128416C (ja) |
| DE (1) | DE69303901T2 (ja) |
| ES (1) | ES2090998T3 (ja) |
| IT (1) | IT1255439B (ja) |
| RU (1) | RU2082251C1 (ja) |
| WO (1) | WO1994002957A1 (ja) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
| US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
| US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
| US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
| US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
| FR2750248B1 (fr) * | 1996-06-19 | 1998-08-28 | Org Europeene De Rech | Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter |
| IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
| IT1312248B1 (it) * | 1999-04-12 | 2002-04-09 | Getters Spa | Metodo per aumentare la produttivita' di processi di deposizione distrati sottili su un substrato e dispositivi getter per la |
| US20030191056A1 (en) | 2002-04-04 | 2003-10-09 | Kenneth Walker | Use of transthyretin peptide/protein fusions to increase the serum half-life of pharmacologically active peptides/proteins |
| KR100825080B1 (ko) * | 2008-02-26 | 2008-04-25 | 하양호 | 충전물의 비중이 일정한 게터 |
| ITMI20121732A1 (it) | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
| TWI660125B (zh) * | 2014-04-03 | 2019-05-21 | 義大利商沙斯格特斯公司 | 吸氣泵 |
| GB2592655B (en) * | 2020-03-05 | 2023-01-11 | Edwards Vacuum Llc | Pump module |
| EP4392673A1 (en) * | 2022-08-01 | 2024-07-03 | Saes Getters S.p.A. | Snap-on getter pump assembly and its use |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB682555A (en) * | 1950-07-05 | 1952-11-12 | Cinema Television Ltd | Improvements in or relating to methods and apparatus for mounting and firing getters |
| USB353291I5 (ja) * | 1967-04-07 | |||
| US4137012A (en) * | 1976-11-03 | 1979-01-30 | S.A.E.S. Getters S.P.A. | Modular getter pumps |
-
1992
- 1992-07-17 IT ITMI921753A patent/IT1255439B/it active IP Right Grant
-
1993
- 1993-04-23 WO PCT/IT1993/000040 patent/WO1994002957A1/en active IP Right Grant
- 1993-04-23 CA CA002128416A patent/CA2128416C/en not_active Expired - Fee Related
- 1993-04-23 ES ES93910317T patent/ES2090998T3/es not_active Expired - Lifetime
- 1993-04-23 JP JP6503948A patent/JP2655012B2/ja not_active Expired - Lifetime
- 1993-04-23 EP EP93910317A patent/EP0650639B1/en not_active Expired - Lifetime
- 1993-04-23 AT AT93910317T patent/ATE141025T1/de not_active IP Right Cessation
- 1993-04-23 RU RU9394045979A patent/RU2082251C1/ru active
- 1993-04-23 DE DE69303901T patent/DE69303901T2/de not_active Expired - Lifetime
- 1993-04-23 KR KR1019940702619A patent/KR100203018B1/ko not_active IP Right Cessation
- 1993-05-31 CN CN93106487A patent/CN1057147C/zh not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| RU94045979A (ru) | 1996-08-10 |
| KR950701131A (ko) | 1995-02-20 |
| EP0650639A1 (en) | 1995-05-03 |
| CA2128416C (en) | 2000-06-13 |
| CA2128416A1 (en) | 1994-02-03 |
| IT1255439B (it) | 1995-10-31 |
| ATE141025T1 (de) | 1996-08-15 |
| ITMI921753A1 (it) | 1994-01-17 |
| KR100203018B1 (ko) | 1999-07-01 |
| DE69303901D1 (de) | 1996-09-05 |
| CN1082668A (zh) | 1994-02-23 |
| WO1994002957A1 (en) | 1994-02-03 |
| EP0650639B1 (en) | 1996-07-31 |
| CN1057147C (zh) | 2000-10-04 |
| JP2655012B2 (ja) | 1997-09-17 |
| ES2090998T3 (es) | 1996-10-16 |
| ITMI921753A0 (it) | 1992-07-17 |
| RU2082251C1 (ru) | 1997-06-20 |
| JPH07509036A (ja) | 1995-10-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |