DE69227437D1 - Verfahren zur Herstellung von anorganischen Membranen durch chemische Infiltration von metallorganischen Verbindungen aus der Dampfphase - Google Patents

Verfahren zur Herstellung von anorganischen Membranen durch chemische Infiltration von metallorganischen Verbindungen aus der Dampfphase

Info

Publication number
DE69227437D1
DE69227437D1 DE69227437T DE69227437T DE69227437D1 DE 69227437 D1 DE69227437 D1 DE 69227437D1 DE 69227437 T DE69227437 T DE 69227437T DE 69227437 T DE69227437 T DE 69227437T DE 69227437 D1 DE69227437 D1 DE 69227437D1
Authority
DE
Germany
Prior art keywords
production
vapor phase
organometallic compounds
inorganic membranes
chemical infiltration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69227437T
Other languages
English (en)
Inventor
Michael Francis Carolan
Paul Nigel Dyer
Stephen Mark Fine
Iii Alexander Makitka
Robin Edward Richards
Leslie Errol Schaffer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/816,195 external-priority patent/US5360635A/en
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of DE69227437D1 publication Critical patent/DE69227437D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/1214—Chemically bonded layers, e.g. cross-linking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0041—Inorganic membrane manufacture by agglomeration of particles in the dry state
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0041—Inorganic membrane manufacture by agglomeration of particles in the dry state
    • B01D67/00411—Inorganic membrane manufacture by agglomeration of particles in the dry state by sintering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0046—Inorganic membrane manufacture by slurry techniques, e.g. die or slip-casting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B01D71/0223—Group 8, 9 or 10 metals
    • B01D71/02232—Nickel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/024—Oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/08—Specific temperatures applied
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/08—Specific temperatures applied
    • B01D2323/081—Heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/10—Specific pressure applied

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Structural Engineering (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Chemical Vapour Deposition (AREA)
DE69227437T 1992-01-02 1992-12-30 Verfahren zur Herstellung von anorganischen Membranen durch chemische Infiltration von metallorganischen Verbindungen aus der Dampfphase Expired - Lifetime DE69227437D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/816,195 US5360635A (en) 1992-01-02 1992-01-02 Method for manufacturing inorganic membranes by organometallic chemical vapor deposition
US07/973,490 US5332597A (en) 1992-01-02 1992-11-09 Method for manufacturing inorganic membranes by organometallic chemical vapor infiltration

Publications (1)

Publication Number Publication Date
DE69227437D1 true DE69227437D1 (de) 1998-12-03

Family

ID=27124042

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69227437T Expired - Lifetime DE69227437D1 (de) 1992-01-02 1992-12-30 Verfahren zur Herstellung von anorganischen Membranen durch chemische Infiltration von metallorganischen Verbindungen aus der Dampfphase

Country Status (5)

Country Link
EP (1) EP0550070B1 (de)
JP (1) JP2502250B2 (de)
CA (1) CA2086388A1 (de)
DE (1) DE69227437D1 (de)
NO (1) NO925025L (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5240473A (en) * 1992-09-01 1993-08-31 Air Products And Chemicals, Inc. Process for restoring permeance of an oxygen-permeable ion transport membrane utilized to recover oxygen from an oxygen-containing gaseous mixture
US5269822A (en) * 1992-09-01 1993-12-14 Air Products And Chemicals, Inc. Process for recovering oxygen from gaseous mixtures containing water or carbon dioxide which process employs barium-containing ion transport membranes
US5261932A (en) * 1992-09-01 1993-11-16 Air Products And Chemicals, Inc. Process for recovering oxygen from gaseous mixtures containing water or carbon dioxide which process employs ion transport membranes
US5240480A (en) * 1992-09-15 1993-08-31 Air Products And Chemicals, Inc. Composite mixed conductor membranes for producing oxygen
WO1996000608A1 (fr) * 1993-03-31 1996-01-11 Ngk Insulators, Ltd. Separateur de gaz et son procede de production
JP3213430B2 (ja) * 1993-03-31 2001-10-02 日本碍子株式会社 ガス分離体及びその製造方法
JP3373057B2 (ja) * 1994-07-29 2003-02-04 エヌオーケー株式会社 水素分離膜の製造法
JP3783530B2 (ja) * 2000-06-22 2006-06-07 ヤマハ株式会社 光酸化触媒
DE102005003612B3 (de) * 2005-01-26 2006-06-14 Forschungszentrum Jülich GmbH Verfahren zur Herstellung einer dünnen, gasdichten und Protonen leitenden Keramikschicht sowie Verwendung derselben
JP2007050358A (ja) * 2005-08-18 2007-03-01 National Institute Of Advanced Industrial & Technology 多孔質基板上への酸化物薄膜及びその作製方法
JP6442366B2 (ja) * 2015-06-16 2018-12-19 日本特殊陶業株式会社 酸素透過膜
KR102586045B1 (ko) 2016-07-12 2023-10-10 삼성디스플레이 주식회사 디스플레이 장치 및 이의 제조 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1194271A (de) * 1957-04-05 1959-11-09
US4211803A (en) * 1977-08-15 1980-07-08 International Business Machines Corporation CVD Growth of magnetic oxide films having growth induced anisotropy
DE3851751T2 (de) * 1987-12-17 1995-02-02 Univ Colorado Foundation Chemischer dampf-niederschlag von gemischten oxidfilmen.
US4902307A (en) * 1988-11-18 1990-02-20 California Institute Of Technology Synthesis of SiO2 membrane on porous support and method of use of same
CA2017243C (en) * 1989-05-25 2003-09-30 Terry J. Mazanec Novel solid multi-component membranes, electrochemical reactor and use of membranes and reactor for oxidation reactions
US5080689A (en) * 1990-04-27 1992-01-14 Westinghouse Electric Co. Method of bonding an interconnection layer on an electrode of an electrochemical cell
US5106654A (en) * 1990-07-20 1992-04-21 Westinghouse Electric Corp. Method of forming a dense, high temperature electronically conductive composite layer on a porous ceramic substrate

Also Published As

Publication number Publication date
CA2086388A1 (en) 1993-07-03
NO925025D0 (no) 1992-12-28
EP0550070A1 (de) 1993-07-07
JP2502250B2 (ja) 1996-05-29
JPH06142471A (ja) 1994-05-24
NO925025L (no) 1993-07-05
EP0550070B1 (de) 1998-10-28

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Legal Events

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