DE69226176T2 - Elektrisch aenderbare einzel-transistor-halbleiterfestwertspeicheranordnung - Google Patents
Elektrisch aenderbare einzel-transistor-halbleiterfestwertspeicheranordnungInfo
- Publication number
- DE69226176T2 DE69226176T2 DE69226176T DE69226176T DE69226176T2 DE 69226176 T2 DE69226176 T2 DE 69226176T2 DE 69226176 T DE69226176 T DE 69226176T DE 69226176 T DE69226176 T DE 69226176T DE 69226176 T2 DE69226176 T2 DE 69226176T2
- Authority
- DE
- Germany
- Prior art keywords
- insulating layer
- over
- single transistor
- fixed value
- value storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 230000005689 Fowler Nordheim tunneling Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
- G11C16/0425—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a merged floating gate and select transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7884—Programmable transistors with only two possible levels of programmation charging by hot carrier injection
- H01L29/7885—Hot carrier injection from the channel
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
- Amplifiers (AREA)
- Electronic Switches (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US68245991A | 1991-04-09 | 1991-04-09 | |
PCT/US1992/002194 WO1992018980A1 (en) | 1991-04-09 | 1992-03-13 | A single transistor non-volatile electrically alterable semiconductor memory device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69226176D1 DE69226176D1 (de) | 1998-08-13 |
DE69226176T2 true DE69226176T2 (de) | 1999-12-23 |
Family
ID=24739804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69226176T Expired - Lifetime DE69226176T2 (de) | 1991-04-09 | 1992-03-13 | Elektrisch aenderbare einzel-transistor-halbleiterfestwertspeicheranordnung |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0579779B1 (de) |
JP (1) | JP3854629B2 (de) |
AT (1) | ATE168215T1 (de) |
CA (1) | CA2107676C (de) |
DE (1) | DE69226176T2 (de) |
WO (1) | WO1992018980A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5369609A (en) * | 1992-03-13 | 1994-11-29 | Silicon Storage Technology, Inc. | Floating gate memory array with latches having improved immunity to write disturbance, and with storage latches |
US5479368A (en) * | 1993-09-30 | 1995-12-26 | Cirrus Logic, Inc. | Spacer flash cell device with vertically oriented floating gate |
JP3133667B2 (ja) * | 1995-02-23 | 2001-02-13 | 三洋電機株式会社 | スプリットゲート型トランジスタ、スプリットゲート型トランジスタの製造方法、不揮発性半導体メモリ |
TW334566B (en) * | 1996-02-26 | 1998-06-21 | Sanyo Electric Co | Non-volatile semiconductor memory device |
TW378321B (en) * | 1996-02-29 | 2000-01-01 | Sanyo Electric Co | Semiconductor memory device |
TW338158B (en) * | 1996-02-29 | 1998-08-11 | Sanyo Electric Co | Non volatile semiconductor memory device |
JP3081543B2 (ja) * | 1996-03-29 | 2000-08-28 | 三洋電機株式会社 | スプリットゲート型トランジスタ、スプリットゲート型トランジスタの製造方法、不揮発性半導体メモリ |
US5936883A (en) | 1996-03-29 | 1999-08-10 | Sanyo Electric Co., Ltd. | Split gate type transistor memory device |
JPH10134579A (ja) * | 1996-10-31 | 1998-05-22 | Sanyo Electric Co Ltd | 不揮発性半導体メモリ |
US6097059A (en) * | 1996-12-27 | 2000-08-01 | Sanyo Electric Co., Ltd. | Transistor, transistor array, method for manufacturing transistor array, and nonvolatile semiconductor memory |
JPH10302482A (ja) * | 1997-02-27 | 1998-11-13 | Sanyo Electric Co Ltd | 半導体メモリ |
JPH118324A (ja) | 1997-04-23 | 1999-01-12 | Sanyo Electric Co Ltd | トランジスタ、トランジスタアレイおよび不揮発性半導体メモリ |
US6317362B1 (en) | 1999-07-13 | 2001-11-13 | Sanyo Electric Co., Ltd. | Semiconductor memory device |
US6727545B2 (en) * | 2000-09-20 | 2004-04-27 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with low resistance source regions and high source coupling |
JP2003046002A (ja) * | 2001-07-26 | 2003-02-14 | Sony Corp | 不揮発性半導体メモリ装置およびその動作方法 |
KR100511032B1 (ko) * | 2003-02-28 | 2005-08-30 | 삼성전자주식회사 | 플로팅 게이트의 형성 방법 및 이를 이용한 불휘발성메모리 장치의 제조 방법 |
US8138524B2 (en) | 2006-11-01 | 2012-03-20 | Silicon Storage Technology, Inc. | Self-aligned method of forming a semiconductor memory array of floating memory cells with source side erase, and a memory array made thereby |
US20090039410A1 (en) * | 2007-08-06 | 2009-02-12 | Xian Liu | Split Gate Non-Volatile Flash Memory Cell Having A Floating Gate, Control Gate, Select Gate And An Erase Gate With An Overhang Over The Floating Gate, Array And Method Of Manufacturing |
JP7164271B2 (ja) * | 2017-10-10 | 2022-11-01 | ラピスセミコンダクタ株式会社 | 半導体装置の製造方法および半導体装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4729115A (en) * | 1984-09-27 | 1988-03-01 | International Business Machines Corporation | Non-volatile dynamic random access memory cell |
US4825271A (en) * | 1986-05-20 | 1989-04-25 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory |
US4794565A (en) * | 1986-09-15 | 1988-12-27 | The Regents Of The University Of California | Electrically programmable memory device employing source side injection |
GB2200795B (en) * | 1987-02-02 | 1990-10-03 | Intel Corp | Eprom cell with integral select transistor |
US4812885A (en) * | 1987-08-04 | 1989-03-14 | Texas Instruments Incorporated | Capacitive coupling |
US5045489A (en) * | 1989-06-30 | 1991-09-03 | Texas Instruments Incorporated | Method of making a high-speed 2-transistor cell for programmable/EEPROM devices with separate read and write transistors |
US5029130A (en) * | 1990-01-22 | 1991-07-02 | Silicon Storage Technology, Inc. | Single transistor non-valatile electrically alterable semiconductor memory device |
EP0464196B1 (de) * | 1990-01-22 | 2002-05-08 | Silicon Storage Technology, Inc. | Nichtflüchtige elektrisch veränderbare eintransistor-halbleiterspeicheranordnung mit rekristallisiertem schwebendem gate |
-
1992
- 1992-03-13 CA CA002107676A patent/CA2107676C/en not_active Expired - Fee Related
- 1992-03-13 JP JP51019792A patent/JP3854629B2/ja not_active Expired - Lifetime
- 1992-03-13 EP EP92917322A patent/EP0579779B1/de not_active Expired - Lifetime
- 1992-03-13 WO PCT/US1992/002194 patent/WO1992018980A1/en active IP Right Grant
- 1992-03-13 DE DE69226176T patent/DE69226176T2/de not_active Expired - Lifetime
- 1992-03-13 AT AT92917322T patent/ATE168215T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH06506798A (ja) | 1994-07-28 |
CA2107676A1 (en) | 1992-10-10 |
JP3854629B2 (ja) | 2006-12-06 |
EP0579779A1 (de) | 1994-01-26 |
ATE168215T1 (de) | 1998-07-15 |
CA2107676C (en) | 2000-10-31 |
DE69226176D1 (de) | 1998-08-13 |
EP0579779A4 (en) | 1994-07-27 |
WO1992018980A1 (en) | 1992-10-29 |
EP0579779B1 (de) | 1998-07-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8364 | No opposition during term of opposition |