DE69215717D1 - Herstellung eines magnetischen Mediums - Google Patents
Herstellung eines magnetischen MediumsInfo
- Publication number
- DE69215717D1 DE69215717D1 DE69215717T DE69215717T DE69215717D1 DE 69215717 D1 DE69215717 D1 DE 69215717D1 DE 69215717 T DE69215717 T DE 69215717T DE 69215717 T DE69215717 T DE 69215717T DE 69215717 D1 DE69215717 D1 DE 69215717D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- magnetic medium
- magnetic
- medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
- H01F10/28—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers characterised by the composition of the substrate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/0027—Thick magnetic films
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/16—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates the magnetic material being applied in the form of particles, e.g. by serigraphy, to form thick magnetic films or precursors therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
- H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
- H02K15/02—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
- H02K15/03—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies having permanent magnets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K99/00—Subject matter not provided for in other groups of this subclass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/90—Magnetic feature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/143—Electron beam
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/2457—Parallel ribs and/or grooves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/2457—Parallel ribs and/or grooves
- Y10T428/24579—Parallel ribs and/or grooves with particulate matter
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03034935A JP3135130B2 (ja) | 1991-03-01 | 1991-03-01 | 磁気媒体およびその製造方法 |
JP9935491A JPH04329612A (ja) | 1991-05-01 | 1991-05-01 | 磁気パターンの製造方法 |
JP3099355A JP3005311B2 (ja) | 1991-05-01 | 1991-05-01 | 磁気パターンの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69215717D1 true DE69215717D1 (de) | 1997-01-23 |
DE69215717T2 DE69215717T2 (de) | 1997-07-10 |
Family
ID=27288580
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69215717T Expired - Fee Related DE69215717T2 (de) | 1991-03-01 | 1992-02-28 | Herstellung eines magnetischen Mediums |
DE69215385T Expired - Fee Related DE69215385T2 (de) | 1991-03-01 | 1992-02-28 | Magnetischer Träger und Herstellungsverfahren |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69215385T Expired - Fee Related DE69215385T2 (de) | 1991-03-01 | 1992-02-28 | Magnetischer Träger und Herstellungsverfahren |
Country Status (3)
Country | Link |
---|---|
US (5) | US5350618A (de) |
EP (2) | EP0634758B1 (de) |
DE (2) | DE69215717T2 (de) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5289721A (en) * | 1990-09-10 | 1994-03-01 | Nippondenso Co., Ltd. | Semiconductor pressure sensor |
JP3043394B2 (ja) * | 1990-11-05 | 2000-05-22 | 帝人製機株式会社 | 磁気スケールの製造方法 |
US5350618A (en) * | 1991-03-01 | 1994-09-27 | Teijin Seiki Co., Ltd. | Magnetic medium comprising a substrate having pits and grooves of specific shapes and depths |
US5768075A (en) * | 1991-12-17 | 1998-06-16 | Baradun R&D Ltd. | Disk medium w/magnetically filled features aligned in rows and columns |
US5400105A (en) * | 1992-10-30 | 1995-03-21 | Konica Corporation | Automatic processing machine for silver halide photographic light-sensitive materials |
US5993937A (en) * | 1993-11-30 | 1999-11-30 | Matsushita Electric Industrial Co., Ltd. | Magneto-optic recording medium and method of fabricating the same |
US5757763A (en) * | 1994-07-12 | 1998-05-26 | Massachusetts Institute Of Technology | Optical information storage via amplitude modulation |
US6146740A (en) * | 1994-11-28 | 2000-11-14 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium and method of fabricating the same |
US5820769A (en) * | 1995-05-24 | 1998-10-13 | Regents Of The University Of Minnesota | Method for making magnetic storage having discrete elements with quantized magnetic moments |
US6388314B1 (en) * | 1995-08-17 | 2002-05-14 | Micron Technology, Inc. | Single deposition layer metal dynamic random access memory |
US5858474A (en) * | 1996-02-20 | 1999-01-12 | Seagate Technology, Inc. | Method of forming a magnetic media |
DE19628722A1 (de) * | 1996-07-17 | 1998-01-22 | Esselte Meto Int Gmbh | Vorrichtung zum Deaktivieren eines Sicherungselementes für die elektronische Artikelsicherung |
US5999360A (en) * | 1996-10-15 | 1999-12-07 | Seagate Technology, Inc. | Disc drive servo system employing thermal signals |
US5991104A (en) | 1996-11-27 | 1999-11-23 | Seagate Technology, Inc. | Using servowriter medium for quickly written servo-patterns on magnetic media |
US5989442A (en) * | 1997-01-10 | 1999-11-23 | Industrial Technology Research Institute | Wet etching |
JPH10275369A (ja) * | 1997-01-31 | 1998-10-13 | Canon Inc | 情報記録媒体の製造方法および該方法による情報記録媒体 |
US5916423A (en) * | 1997-05-06 | 1999-06-29 | International Business Machines Corporation | P1 notched write head with minimum overmilled p1 and p2 |
US5903491A (en) | 1997-06-09 | 1999-05-11 | Micron Technology, Inc. | Single deposition layer metal dynamic random access memory |
US6086961A (en) * | 1998-03-09 | 2000-07-11 | Seagate Technology, Inc. | Quickly written servo-patterns for magnetic media including removing |
US6387530B1 (en) | 1999-08-27 | 2002-05-14 | Seagate Technology Llc | Patterned magnetic media via thermally induced phase transition |
JP2001307324A (ja) * | 2000-02-15 | 2001-11-02 | Fuji Photo Film Co Ltd | 磁気転写用マスター担体および磁気記録媒体 |
US6582572B2 (en) | 2000-06-01 | 2003-06-24 | Seagate Technology Llc | Target fabrication method for cylindrical cathodes |
TW569195B (en) | 2001-01-24 | 2004-01-01 | Matsushita Electric Ind Co Ltd | Micro-particle arranged body, its manufacturing method, and device using the same |
KR100429843B1 (ko) * | 2001-09-22 | 2004-05-03 | 삼성전자주식회사 | 전자 방출 및 상변화물질을 이용한 고밀도정보기록/재생방법 및 이를 응용한 정보저장장치 및 이에사용되는 미디어 |
JP2003242714A (ja) * | 2001-10-24 | 2003-08-29 | Fuji Electric Co Ltd | 情報記録媒体、その媒体の製造方法、情報処理装置、並びに、著作権管理システム |
KR100909414B1 (ko) * | 2002-12-18 | 2009-07-24 | 엘지디스플레이 주식회사 | 액정 표시 소자의 제조 방법 |
JP4042107B2 (ja) * | 2003-02-14 | 2008-02-06 | 富士電機ホールディングス株式会社 | 磁気転写用マスタディスクの製造方法 |
JP2004246994A (ja) * | 2003-02-14 | 2004-09-02 | Fuji Electric Holdings Co Ltd | マスタディスクの製造方法 |
US7229746B2 (en) * | 2003-04-02 | 2007-06-12 | Delphi Technologies, Inc. | Printed high strength permanent magnet targets for magnetic sensors |
US7369369B1 (en) | 2003-04-03 | 2008-05-06 | Meyer Dallas W | Bidirectional micropositioning recording head for a magnetic storage device |
US7538983B1 (en) | 2003-07-29 | 2009-05-26 | Meyer Dallas W | Micropositioner recording head for a magnetic storage device |
KR101363127B1 (ko) * | 2006-05-22 | 2014-02-13 | 오디오 픽셀즈 리미티드 | 원하는 지향성 패턴을 가지는 다이렉트 디지털 스피커 장치 및 그 제어 방법 |
US8457338B2 (en) | 2006-05-22 | 2013-06-04 | Audio Pixels Ltd. | Apparatus and methods for generating pressure waves |
MY151910A (en) * | 2006-05-22 | 2014-07-31 | Audio Pixels Holdings Ltd | Volume and tone control in direct digital speakers |
US7950587B2 (en) * | 2006-09-22 | 2011-05-31 | The Board of Regents of the Nevada System of Higher Education on behalf of the University of Reno, Nevada | Devices and methods for storing data |
US20080084634A1 (en) * | 2006-09-22 | 2008-04-10 | Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Nevada | Devices and methods for storing data |
JP4967688B2 (ja) * | 2007-01-29 | 2012-07-04 | ヤマハ株式会社 | スライド操作装置 |
KR101759042B1 (ko) | 2007-11-21 | 2017-07-17 | 오디오 픽셀즈 리미티드 | 디지털 스피커 장치의 작동 장치 및 작동 시스템 |
US8279559B1 (en) | 2009-01-02 | 2012-10-02 | Meyer Dallas W | Process for creating discrete track magnetic recording media including an apparatus having a stylus selectively applying stress to a surface of the recording media |
US8878526B2 (en) | 2009-01-27 | 2014-11-04 | Renishaw Plc | Magnetic encoder apparatus |
AU2011225673B2 (en) | 2010-03-11 | 2014-04-17 | Audio Pixels Ltd. | Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith |
CN103493511B (zh) | 2010-11-26 | 2016-10-26 | 音频像素有限公司 | 用于致动器阵列的个别寻址和噪声降低的装置和方法 |
DK2856769T3 (en) | 2012-05-25 | 2018-10-22 | Audio Pixels Ltd | SYSTEM, PROCEDURE AND COMPUTER PROGRAM PRODUCT TO CONTROL A GROUP OF ACTUATOR SYSTEMS FOR CREATING A PHYSICAL EFFECT |
DK2856770T3 (en) | 2012-05-25 | 2018-10-22 | Audio Pixels Ltd | SYSTEM, PROCEDURE AND COMPUTER PROGRAM PRODUCT TO CONTROL A SET OF ACTUATOR ELEMENTS |
DE102012219890A1 (de) * | 2012-10-31 | 2014-04-30 | Robert Bosch Gmbh | Geberelement sowie Verfahren zu dessen Herstellung |
US9577023B2 (en) * | 2013-06-04 | 2017-02-21 | Globalfoundries Inc. | Metal wires of a stacked inductor |
EP3284266B1 (de) | 2015-04-15 | 2021-02-17 | Audio Pixels Ltd. | Verfahren und systeme zur erkennung von zumindest der position eines objektes in einem raum |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2501126A (en) * | 1946-10-18 | 1950-03-21 | Indiana Steel Products Co | Magnetic record medium |
DE1074602B (de) * | 1958-05-05 | 1960-02-04 | ||
NL140630B (nl) * | 1964-11-09 | 1973-12-17 | Du Pont | Werkwijze voor het thermomagnetisch kopieren. |
JPS55125536A (en) * | 1979-03-16 | 1980-09-27 | Fuji Photo Film Co Ltd | Recording medium for vertical magnetic record |
FR2481501B1 (fr) * | 1980-04-25 | 1985-09-13 | Philips Nv | Porteur d'enregistrement comportant une structure d'information lisible par voie optique et dispositif pour la lecture d'un tel porteur d'enregistrement |
US4472240A (en) * | 1981-08-21 | 1984-09-18 | Tokyo Shibaura Denki Kabushiki Kaisha | Method for manufacturing semiconductor device |
US4517616A (en) * | 1982-04-12 | 1985-05-14 | Memorex Corporation | Thin film magnetic recording transducer having embedded pole piece design |
US4391849A (en) * | 1982-04-12 | 1983-07-05 | Memorex Corporation | Metal oxide patterns with planar surface |
US4480302A (en) * | 1982-09-29 | 1984-10-30 | Storage Technology Corporation | Optical recording media |
DE3379998D1 (en) * | 1983-03-31 | 1989-07-06 | Ibm | Read-only magnetic recording media and process of making the same |
JPS59188106A (ja) * | 1983-04-08 | 1984-10-25 | Ricoh Co Ltd | 光磁気記録媒体 |
US4544443A (en) * | 1983-05-13 | 1985-10-01 | Shap Kabushiki Kaisha | Method for manufacturing an optical memory element |
US4579812A (en) * | 1984-02-03 | 1986-04-01 | Advanced Micro Devices, Inc. | Process for forming slots of different types in self-aligned relationship using a latent image mask |
US4716560A (en) * | 1984-05-22 | 1987-12-29 | Victor Company Of Japan, Ltd. | Recording disc and method for fabricating same |
JPS61910A (ja) * | 1984-06-14 | 1986-01-06 | Nippon Telegr & Teleph Corp <Ntt> | 位置情報検出信号発生方法 |
JPS6154857A (ja) * | 1984-08-27 | 1986-03-19 | Nippon Radiator Co Ltd | モ−タの製造方法 |
JPS6187206A (ja) * | 1984-10-05 | 1986-05-02 | Alps Electric Co Ltd | 磁気記録装置の消去用磁気ヘツド |
JPS61100910A (ja) * | 1984-10-23 | 1986-05-19 | Hiroe Yamada | 永久磁石の製造方法 |
US5114552A (en) * | 1985-02-07 | 1992-05-19 | Ppg Industries, Inc. | Compositions comprising ionic resins and capped polyisocyanate mixtures containing a diphenyl-2,4'-diisocyanate and a diphenyl-4,4'-diisocyanate |
US4777074A (en) * | 1985-08-12 | 1988-10-11 | Sumitomo Special Metals Co., Ltd. | Grooved magnetic substrates and method for producing the same |
FR2610753A1 (fr) * | 1987-02-11 | 1988-08-12 | Commissariat Energie Atomique | Substrat pour memoire a disque magnetique et procede de fabrication |
JPS63217526A (ja) * | 1987-03-05 | 1988-09-09 | Hitachi Ltd | 磁気デイスク塗膜の製造方法 |
JP2598018B2 (ja) * | 1987-05-28 | 1997-04-09 | 株式会社東芝 | 薄膜磁気ヘッド |
GB8713353D0 (en) * | 1987-06-08 | 1987-07-15 | Scient Generics Ltd | Magnetic article surveillance systems |
US4935278A (en) * | 1988-04-28 | 1990-06-19 | International Business Machines Corporation | Thin film magnetic recording disk and fabrication process |
JPH0253237A (ja) * | 1988-08-16 | 1990-02-22 | Ricoh Co Ltd | 光学式情報記録媒体 |
US4853080A (en) * | 1988-12-14 | 1989-08-01 | Hewlett-Packard | Lift-off process for patterning shields in thin magnetic recording heads |
JP2706173B2 (ja) * | 1990-09-21 | 1998-01-28 | シャープ株式会社 | 磁気メモリ素子の製造方法 |
US5427675A (en) * | 1991-10-29 | 1995-06-27 | Teijin Seiki Co., Ltd. | Method of manufacturing article having magnetic patterns |
US5266446A (en) * | 1990-11-15 | 1993-11-30 | International Business Machines Corporation | Method of making a multilayer thin film structure |
DE69130389T2 (de) * | 1990-12-05 | 1999-04-29 | At & T Corp | Lithographische Verfahren |
US5244759A (en) * | 1991-02-27 | 1993-09-14 | At&T Bell Laboratories | Single-alignment-level lithographic technique for achieving self-aligned features |
US5350618A (en) * | 1991-03-01 | 1994-09-27 | Teijin Seiki Co., Ltd. | Magnetic medium comprising a substrate having pits and grooves of specific shapes and depths |
US5302477A (en) * | 1992-08-21 | 1994-04-12 | Intel Corporation | Inverted phase-shifted reticle |
-
1992
- 1992-02-26 US US07/842,057 patent/US5350618A/en not_active Expired - Fee Related
- 1992-02-28 EP EP94112094A patent/EP0634758B1/de not_active Expired - Lifetime
- 1992-02-28 DE DE69215717T patent/DE69215717T2/de not_active Expired - Fee Related
- 1992-02-28 DE DE69215385T patent/DE69215385T2/de not_active Expired - Fee Related
- 1992-02-28 EP EP92301703A patent/EP0501815B1/de not_active Expired - Lifetime
-
1993
- 1993-02-01 US US08/011,791 patent/US5336586A/en not_active Expired - Fee Related
- 1993-11-23 US US08/136,279 patent/US5580639A/en not_active Expired - Fee Related
-
1994
- 1994-01-11 US US08/179,707 patent/US5429911A/en not_active Expired - Fee Related
-
1995
- 1995-05-09 US US08/437,569 patent/US5527663A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5350618A (en) | 1994-09-27 |
US5527663A (en) | 1996-06-18 |
EP0501815A3 (en) | 1993-06-23 |
EP0501815A2 (de) | 1992-09-02 |
US5336586A (en) | 1994-08-09 |
DE69215717T2 (de) | 1997-07-10 |
DE69215385T2 (de) | 1997-06-26 |
US5429911A (en) | 1995-07-04 |
EP0501815B1 (de) | 1996-12-11 |
DE69215385D1 (de) | 1997-01-02 |
EP0634758A1 (de) | 1995-01-18 |
US5580639A (en) | 1996-12-03 |
EP0634758B1 (de) | 1996-11-20 |
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