DE69210501T2 - Elektroncyclotionresonanz-Ionenquelle vom Wellenleiter-Typ zur Erzeugung mehrfachgeladenen Ionen - Google Patents

Elektroncyclotionresonanz-Ionenquelle vom Wellenleiter-Typ zur Erzeugung mehrfachgeladenen Ionen

Info

Publication number
DE69210501T2
DE69210501T2 DE1992610501 DE69210501T DE69210501T2 DE 69210501 T2 DE69210501 T2 DE 69210501T2 DE 1992610501 DE1992610501 DE 1992610501 DE 69210501 T DE69210501 T DE 69210501T DE 69210501 T2 DE69210501 T2 DE 69210501T2
Authority
DE
Germany
Prior art keywords
ion source
charged ions
waveguide type
generating multi
resonance ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1992610501
Other languages
English (en)
Other versions
DE69210501D1 (de
Inventor
Pascal Sortais
Patrick Leherissier
Jean-Yves Pacquet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Commissariat a lEnergie Atomique CEA filed Critical Centre National de la Recherche Scientifique CNRS
Application granted granted Critical
Publication of DE69210501D1 publication Critical patent/DE69210501D1/de
Publication of DE69210501T2 publication Critical patent/DE69210501T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
DE1992610501 1991-08-05 1992-08-03 Elektroncyclotionresonanz-Ionenquelle vom Wellenleiter-Typ zur Erzeugung mehrfachgeladenen Ionen Expired - Lifetime DE69210501T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9109945A FR2680275B1 (fr) 1991-08-05 1991-08-05 Source d'ions a resonance cyclotronique electronique de type guide d'ondes.

Publications (2)

Publication Number Publication Date
DE69210501D1 DE69210501D1 (de) 1996-06-13
DE69210501T2 true DE69210501T2 (de) 1996-12-12

Family

ID=9415937

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992610501 Expired - Lifetime DE69210501T2 (de) 1991-08-05 1992-08-03 Elektroncyclotionresonanz-Ionenquelle vom Wellenleiter-Typ zur Erzeugung mehrfachgeladenen Ionen

Country Status (3)

Country Link
EP (1) EP0527082B1 (de)
DE (1) DE69210501T2 (de)
FR (1) FR2680275B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4340224C2 (de) * 1992-11-26 2003-10-16 Accentus Plc Didcot Einrichtung zum Erzeugen von Plasma mittels Mikrowellenstrahlung

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2718568B1 (fr) * 1994-04-06 1996-07-05 France Telecom Procédé d'implantation haute énergie à partir d'un implanteur de type faible ou moyen courant et dispositifs correspondants.
KR100927995B1 (ko) * 2008-11-20 2009-11-24 한국기초과학지원연구원 전자 맴돌이 공명 이온원 장치 및 그의 제조방법
FR2947378A1 (fr) 2009-06-29 2010-12-31 Quertech Ingenierie Systeme magnetique formant des surfaces iso modules fermees a partir de structures magnetiques de type "cusp" et sources d'ions de type rce mettant en oeuvre un tel systeme
FR2969372B1 (fr) 2010-12-21 2015-04-17 Commissariat Energie Atomique Dispositif d’ionisation a la resonance cyclotron electronique
FR3015109A1 (fr) * 2013-12-13 2015-06-19 Centre Nat Rech Scient Source d'ions a resonance cyclotronique electronique

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2595868B1 (fr) * 1986-03-13 1988-05-13 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4340224C2 (de) * 1992-11-26 2003-10-16 Accentus Plc Didcot Einrichtung zum Erzeugen von Plasma mittels Mikrowellenstrahlung

Also Published As

Publication number Publication date
EP0527082A1 (de) 1993-02-10
FR2680275A1 (fr) 1993-02-12
EP0527082B1 (de) 1996-05-08
DE69210501D1 (de) 1996-06-13
FR2680275B1 (fr) 1997-07-18

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