FR2681471B1 - Modulateur temporel de faisceau d'ions. - Google Patents

Modulateur temporel de faisceau d'ions.

Info

Publication number
FR2681471B1
FR2681471B1 FR9111278A FR9111278A FR2681471B1 FR 2681471 B1 FR2681471 B1 FR 2681471B1 FR 9111278 A FR9111278 A FR 9111278A FR 9111278 A FR9111278 A FR 9111278A FR 2681471 B1 FR2681471 B1 FR 2681471B1
Authority
FR
France
Prior art keywords
ion beam
time modulator
modulator
time
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9111278A
Other languages
English (en)
Other versions
FR2681471A1 (fr
Inventor
Roger Thomas
Nguyen Hoan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OPEA LABO OPTIQUE ELECTRO APPL
Centre National de la Recherche Scientifique CNRS
Original Assignee
OPEA LABO OPTIQUE ELECTRO APPL
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OPEA LABO OPTIQUE ELECTRO APPL, Centre National de la Recherche Scientifique CNRS filed Critical OPEA LABO OPTIQUE ELECTRO APPL
Priority to FR9111278A priority Critical patent/FR2681471B1/fr
Publication of FR2681471A1 publication Critical patent/FR2681471A1/fr
Application granted granted Critical
Publication of FR2681471B1 publication Critical patent/FR2681471B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/061—Ion deflecting means, e.g. ion gates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR9111278A 1991-09-12 1991-09-12 Modulateur temporel de faisceau d'ions. Expired - Fee Related FR2681471B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9111278A FR2681471B1 (fr) 1991-09-12 1991-09-12 Modulateur temporel de faisceau d'ions.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9111278A FR2681471B1 (fr) 1991-09-12 1991-09-12 Modulateur temporel de faisceau d'ions.

Publications (2)

Publication Number Publication Date
FR2681471A1 FR2681471A1 (fr) 1993-03-19
FR2681471B1 true FR2681471B1 (fr) 1997-08-01

Family

ID=9416890

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9111278A Expired - Fee Related FR2681471B1 (fr) 1991-09-12 1991-09-12 Modulateur temporel de faisceau d'ions.

Country Status (1)

Country Link
FR (1) FR2681471B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9617312D0 (en) * 1996-08-17 1996-09-25 Millbrook Instr Limited Charged particle velocity analyser
FR2810448B1 (fr) 2000-06-16 2003-09-19 Soitec Silicon On Insulator Procede de fabrication de substrats et substrats obtenus par ce procede
CA2562272C (fr) * 2004-04-05 2013-10-29 Micromass Uk Limited Spectrometre de masse

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60112237A (ja) * 1983-11-21 1985-06-18 Hitachi Ltd パルスビ−ム発生装置
EP0304525A1 (fr) * 1987-08-28 1989-03-01 FISONS plc Faisceaux d'ions pulsés et microfocalisés
JPH02230646A (ja) * 1989-03-03 1990-09-13 Nec Corp イオンビーム発生装置

Also Published As

Publication number Publication date
FR2681471A1 (fr) 1993-03-19

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Legal Events

Date Code Title Description
ST Notification of lapse