FR2969372B1 - Dispositif d’ionisation a la resonance cyclotron electronique - Google Patents

Dispositif d’ionisation a la resonance cyclotron electronique

Info

Publication number
FR2969372B1
FR2969372B1 FR1060984A FR1060984A FR2969372B1 FR 2969372 B1 FR2969372 B1 FR 2969372B1 FR 1060984 A FR1060984 A FR 1060984A FR 1060984 A FR1060984 A FR 1060984A FR 2969372 B1 FR2969372 B1 FR 2969372B1
Authority
FR
France
Prior art keywords
cyclotron resonance
ionization device
electronic cyclotron
resonance ionization
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1060984A
Other languages
English (en)
Other versions
FR2969372A1 (fr
Inventor
Jean Yves Pacquet
Laurent Maunoury
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1060984A priority Critical patent/FR2969372B1/fr
Priority to US13/996,466 priority patent/US9265139B2/en
Priority to EP11826198.1A priority patent/EP2656368A1/fr
Priority to PCT/EP2011/073434 priority patent/WO2012084968A1/fr
Publication of FR2969372A1 publication Critical patent/FR2969372A1/fr
Application granted granted Critical
Publication of FR2969372B1 publication Critical patent/FR2969372B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H13/00—Magnetic resonance accelerators; Cyclotrons
    • H05H13/005—Cyclotrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/08—Arrangements for injecting particles into orbits
    • H05H2007/081—Sources
    • H05H2007/082—Ion sources, e.g. ECR, duoplasmatron, PIG, laser sources

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
FR1060984A 2010-12-21 2010-12-21 Dispositif d’ionisation a la resonance cyclotron electronique Expired - Fee Related FR2969372B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1060984A FR2969372B1 (fr) 2010-12-21 2010-12-21 Dispositif d’ionisation a la resonance cyclotron electronique
US13/996,466 US9265139B2 (en) 2010-12-21 2011-12-20 Electron cyclotron resonance ionisation device
EP11826198.1A EP2656368A1 (fr) 2010-12-21 2011-12-20 Dispositif d'ionisation à la résonance cyclotron électronique
PCT/EP2011/073434 WO2012084968A1 (fr) 2010-12-21 2011-12-20 Dispositif d'ionisation à la résonance cyclotron électronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1060984A FR2969372B1 (fr) 2010-12-21 2010-12-21 Dispositif d’ionisation a la resonance cyclotron electronique

Publications (2)

Publication Number Publication Date
FR2969372A1 FR2969372A1 (fr) 2012-06-22
FR2969372B1 true FR2969372B1 (fr) 2015-04-17

Family

ID=44343243

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1060984A Expired - Fee Related FR2969372B1 (fr) 2010-12-21 2010-12-21 Dispositif d’ionisation a la resonance cyclotron electronique

Country Status (4)

Country Link
US (1) US9265139B2 (fr)
EP (1) EP2656368A1 (fr)
FR (1) FR2969372B1 (fr)
WO (1) WO2012084968A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE1019411A4 (fr) * 2010-07-09 2012-07-03 Ion Beam Applic Sa Moyen de modification du profil de champ magnetique dans un cyclotron.
CN110574500B (zh) * 2018-09-12 2020-09-29 春日电机株式会社 静电消除装置以及等离子体发生装置
JP6579635B1 (ja) 2018-09-12 2019-09-25 春日電機株式会社 除電装置及びプラズマ発生装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4641060A (en) * 1985-02-11 1987-02-03 Applied Microwave Plasma Concepts, Inc. Method and apparatus using electron cyclotron heated plasma for vacuum pumping
FR2680275B1 (fr) * 1991-08-05 1997-07-18 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique de type guide d'ondes.
US5292370A (en) * 1992-08-14 1994-03-08 Martin Marietta Energy Systems, Inc. Coupled microwave ECR and radio-frequency plasma source for plasma processing
FR2757310B1 (fr) * 1996-12-18 2006-06-02 Commissariat Energie Atomique Systeme magnetique, en particulier pour les sources ecr, permettant la creation de surfaces fermees d'equimodule b de forme et de dimensions quelconques
US6873113B2 (en) * 2000-04-13 2005-03-29 Tokyo Electron Limited Stand alone plasma vacuum pump
FR2933532B1 (fr) * 2008-07-02 2010-09-03 Commissariat Energie Atomique Dispositif generateur d'ions a resonance cyclotronique electronique
KR100927995B1 (ko) * 2008-11-20 2009-11-24 한국기초과학지원연구원 전자 맴돌이 공명 이온원 장치 및 그의 제조방법
KR101044698B1 (ko) * 2009-12-01 2011-06-28 한국기초과학지원연구원 전자 맴돌이 공명 이온원 장치를 이용한 엑스선 발생 장치 및 방법
FR2969371B1 (fr) * 2010-12-15 2013-01-04 Commissariat Energie Atomique Dispositif generateur d?ions a resonance cyclotronique electronique
US8994258B1 (en) * 2013-09-25 2015-03-31 Kaufman & Robinson, Inc. End-hall ion source with enhanced radiation cooling

Also Published As

Publication number Publication date
EP2656368A1 (fr) 2013-10-30
WO2012084968A1 (fr) 2012-06-28
US9265139B2 (en) 2016-02-16
US20140001983A1 (en) 2014-01-02
FR2969372A1 (fr) 2012-06-22

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