DE69210501D1 - Elektroncyclotionresonanz-Ionenquelle vom Wellenleiter-Typ zur Erzeugung mehrfachgeladenen Ionen - Google Patents
Elektroncyclotionresonanz-Ionenquelle vom Wellenleiter-Typ zur Erzeugung mehrfachgeladenen IonenInfo
- Publication number
- DE69210501D1 DE69210501D1 DE69210501T DE69210501T DE69210501D1 DE 69210501 D1 DE69210501 D1 DE 69210501D1 DE 69210501 T DE69210501 T DE 69210501T DE 69210501 T DE69210501 T DE 69210501T DE 69210501 D1 DE69210501 D1 DE 69210501D1
- Authority
- DE
- Germany
- Prior art keywords
- ion source
- charged ions
- waveguide type
- generating multi
- resonance ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
- H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9109945A FR2680275B1 (fr) | 1991-08-05 | 1991-08-05 | Source d'ions a resonance cyclotronique electronique de type guide d'ondes. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69210501D1 true DE69210501D1 (de) | 1996-06-13 |
DE69210501T2 DE69210501T2 (de) | 1996-12-12 |
Family
ID=9415937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1992610501 Expired - Lifetime DE69210501T2 (de) | 1991-08-05 | 1992-08-03 | Elektroncyclotionresonanz-Ionenquelle vom Wellenleiter-Typ zur Erzeugung mehrfachgeladenen Ionen |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0527082B1 (de) |
DE (1) | DE69210501T2 (de) |
FR (1) | FR2680275B1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9224745D0 (en) * | 1992-11-26 | 1993-01-13 | Atomic Energy Authority Uk | Microwave plasma generator |
FR2718568B1 (fr) * | 1994-04-06 | 1996-07-05 | France Telecom | Procédé d'implantation haute énergie à partir d'un implanteur de type faible ou moyen courant et dispositifs correspondants. |
KR100927995B1 (ko) * | 2008-11-20 | 2009-11-24 | 한국기초과학지원연구원 | 전자 맴돌이 공명 이온원 장치 및 그의 제조방법 |
FR2947378A1 (fr) | 2009-06-29 | 2010-12-31 | Quertech Ingenierie | Systeme magnetique formant des surfaces iso modules fermees a partir de structures magnetiques de type "cusp" et sources d'ions de type rce mettant en oeuvre un tel systeme |
FR2969372B1 (fr) | 2010-12-21 | 2015-04-17 | Commissariat Energie Atomique | Dispositif d’ionisation a la resonance cyclotron electronique |
FR3015109A1 (fr) * | 2013-12-13 | 2015-06-19 | Centre Nat Rech Scient | Source d'ions a resonance cyclotronique electronique |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2595868B1 (fr) * | 1986-03-13 | 1988-05-13 | Commissariat Energie Atomique | Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques |
-
1991
- 1991-08-05 FR FR9109945A patent/FR2680275B1/fr not_active Expired - Fee Related
-
1992
- 1992-08-03 DE DE1992610501 patent/DE69210501T2/de not_active Expired - Lifetime
- 1992-08-03 EP EP19920402219 patent/EP0527082B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0527082A1 (de) | 1993-02-10 |
DE69210501T2 (de) | 1996-12-12 |
FR2680275A1 (fr) | 1993-02-12 |
EP0527082B1 (de) | 1996-05-08 |
FR2680275B1 (fr) | 1997-07-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
R071 | Expiry of right |
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