DE69208180D1 - Transmissions-Elektronenmikroskop - Google Patents

Transmissions-Elektronenmikroskop

Info

Publication number
DE69208180D1
DE69208180D1 DE69208180T DE69208180T DE69208180D1 DE 69208180 D1 DE69208180 D1 DE 69208180D1 DE 69208180 T DE69208180 T DE 69208180T DE 69208180 T DE69208180 T DE 69208180T DE 69208180 D1 DE69208180 D1 DE 69208180D1
Authority
DE
Germany
Prior art keywords
electron microscope
transmission electron
transmission
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69208180T
Other languages
English (en)
Other versions
DE69208180T2 (de
Inventor
Sadao Terakado
Hiroyuki Kobayashi
Morioki Kubozoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Science Systems Ltd
Original Assignee
Hitachi Ltd
Hitachi Science Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Science Systems Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69208180D1 publication Critical patent/DE69208180D1/de
Publication of DE69208180T2 publication Critical patent/DE69208180T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
DE69208180T 1991-08-30 1992-08-20 Transmissions-Elektronenmikroskop Expired - Fee Related DE69208180T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21959291A JP3153277B2 (ja) 1991-08-30 1991-08-30 透過形電子顕微鏡

Publications (2)

Publication Number Publication Date
DE69208180D1 true DE69208180D1 (de) 1996-03-21
DE69208180T2 DE69208180T2 (de) 1996-09-12

Family

ID=16737952

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69208180T Expired - Fee Related DE69208180T2 (de) 1991-08-30 1992-08-20 Transmissions-Elektronenmikroskop

Country Status (4)

Country Link
US (1) US5350918A (de)
EP (1) EP0529519B1 (de)
JP (1) JP3153277B2 (de)
DE (1) DE69208180T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH690384A5 (de) * 1995-03-24 2000-08-15 Zeiss Carl Fa Computerunterstütztes Video-Mikroskop.
JP2003007244A (ja) * 2001-06-25 2003-01-10 Jeol Ltd 荷電粒子線装置における像の表示方法および荷電粒子線装置、並びに分析装置における像の表示方法及び分析装置
US20070236489A1 (en) * 2006-01-30 2007-10-11 Jung Edward K Positional display elements

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR937296A (fr) * 1947-06-21 1948-08-12 Csf Perfectionnements aux dispositifs de mise au point, pour microscope électronique
DE2204654C3 (de) * 1972-01-28 1974-10-10 Siemens Ag, 1000 Berlin Und 8000 Muenchen Korpuskularstrahlgerät mit einem Leuchtschirm und einer Fernsehkamera
NL7609574A (nl) * 1975-09-03 1977-03-07 Siemens Ag Werkwijze voor de beeldweergave van de uit- gangsinformaties van een toestel dat een objekt aftast.
JPS5477060A (en) * 1977-12-01 1979-06-20 Hitachi Ltd Electron microscope
JPS5651251U (de) * 1979-09-28 1981-05-07
JPS5814460A (ja) * 1981-07-17 1983-01-27 Internatl Precision Inc 電子顕微鏡の焦点合わせ方法及びこの方法を応用した像撮影方法及び装置
JPS61243648A (ja) * 1985-04-19 1986-10-29 Hitachi Ltd 透過形電子顕微鏡の分析点制御装置
US5013915A (en) * 1988-05-20 1991-05-07 Hitachi, Ltd. Transmission type electron microscope
JPH03163739A (ja) * 1989-11-21 1991-07-15 Jeol Ltd 非点状態、フォーカス状態モニタ方式

Also Published As

Publication number Publication date
DE69208180T2 (de) 1996-09-12
JPH0562632A (ja) 1993-03-12
EP0529519B1 (de) 1996-02-07
US5350918A (en) 1994-09-27
EP0529519A1 (de) 1993-03-03
JP3153277B2 (ja) 2001-04-03

Similar Documents

Publication Publication Date Title
DE69327355D1 (de) Rasterelektronenmikroskop
DE69332995D1 (de) Raster-Elektronenmikroskop
DE69332785D1 (de) Rasterelektronenmikroskop
DE69432399D1 (de) Rasterelektronenmikroskop
DE59303355D1 (de) Mikroskop
DE69224506D1 (de) Elektronenstrahlgerät
DE69311401D1 (de) Emissionsmikroskop
DE69121972T2 (de) Röntgenstrahlenmikroskop
DE69131593D1 (de) Rasterelektronenmikroskop
FR2690531B1 (fr) Microscope operatoire.
DE69621540D1 (de) Elektronenmikroskop
DE69213157D1 (de) Elektronenstrahlvorrichtung
EP0488214A3 (en) Electron microscope
DE68919004T2 (de) Elektronenmikroskop.
DE69634461D1 (de) Elektronenmikroskop
DE69208180T2 (de) Transmissions-Elektronenmikroskop
DE4208622B4 (de) Licht-Schnitt-Mikroskop
FI952472A (fi) Voimansiirtolaite
DE69123668T2 (de) Rasterelektronenmikroskop
DE9310659U1 (de) Elektronenmikroskop
KR960024321U (ko) 투과전자현미경의 조사계
CA68462S (en) Microscope
DE9321413U1 (de) Mikroskop
KR950021195U (ko) 샾 마이크로스코프
SE9103024D0 (sv) Transmission

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee