DE69206028D1 - Vorrichtung und Verfahren zur Beschichtung eines Substrates unter Verwendung der Vakuum-Bogen-Verdampfung. - Google Patents

Vorrichtung und Verfahren zur Beschichtung eines Substrates unter Verwendung der Vakuum-Bogen-Verdampfung.

Info

Publication number
DE69206028D1
DE69206028D1 DE69206028T DE69206028T DE69206028D1 DE 69206028 D1 DE69206028 D1 DE 69206028D1 DE 69206028 T DE69206028 T DE 69206028T DE 69206028 T DE69206028 T DE 69206028T DE 69206028 D1 DE69206028 D1 DE 69206028D1
Authority
DE
Germany
Prior art keywords
cathode
coating
substrate
vacuum arc
arc evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69206028T
Other languages
English (en)
Other versions
DE69206028T2 (de
Inventor
Richard P Welty
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vapor Technologies Inc
Original Assignee
Vapor Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vapor Technologies Inc filed Critical Vapor Technologies Inc
Publication of DE69206028D1 publication Critical patent/DE69206028D1/de
Application granted granted Critical
Publication of DE69206028T2 publication Critical patent/DE69206028T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE69206028T 1991-03-20 1992-03-13 Vorrichtung und Verfahren zur Beschichtung eines Substrates unter Verwendung der Vakuum-Bogen-Verdampfung. Expired - Lifetime DE69206028T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US67313591A 1991-03-20 1991-03-20
US07/809,727 US5269898A (en) 1991-03-20 1991-12-17 Apparatus and method for coating a substrate using vacuum arc evaporation

Publications (2)

Publication Number Publication Date
DE69206028D1 true DE69206028D1 (de) 1995-12-21
DE69206028T2 DE69206028T2 (de) 1996-07-18

Family

ID=27100882

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69206028T Expired - Lifetime DE69206028T2 (de) 1991-03-20 1992-03-13 Vorrichtung und Verfahren zur Beschichtung eines Substrates unter Verwendung der Vakuum-Bogen-Verdampfung.

Country Status (6)

Country Link
US (1) US5269898A (de)
EP (1) EP0508612B1 (de)
JP (1) JP3421811B2 (de)
AT (1) ATE130378T1 (de)
CA (1) CA2061809C (de)
DE (1) DE69206028T2 (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5451308A (en) * 1991-04-29 1995-09-19 Novatech Electric arc metal evaporator
US5393575A (en) * 1992-03-03 1995-02-28 Esterlis; Moisei Method for carrying out surface processes
EP0643151B9 (de) * 1993-03-15 2003-11-26 Kabushiki Kaisha Kobeseikosho Vorrichtung und system zum lichtbogenionenplattieren
US5744017A (en) * 1993-12-17 1998-04-28 Kabushiki Kaisha Kobe Seiko Sho Vacuum arc deposition apparatus
US5480527A (en) * 1994-04-25 1996-01-02 Vapor Technologies, Inc. Rectangular vacuum-arc plasma source
CH689558A5 (de) 1995-07-11 1999-06-15 Erich Bergmann Bedampfungsanlage und Verdampfereinheit.
US5738768A (en) * 1995-10-31 1998-04-14 Caterpillar Inc. Process for reducing particle defects in arc vapor deposition coatings
US5895559A (en) * 1996-04-08 1999-04-20 Christy; Ronald Cathodic arc cathode
US5972185A (en) * 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
US6036828A (en) * 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
DE69837294T2 (de) * 1997-08-30 2007-12-20 United Technologies Corp., Hartford Vorrichtung zur Bogenführung in einem kathodischen Bogen-Beschichtungsgerät
US6009829A (en) * 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
AU9410498A (en) * 1997-11-26 1999-06-17 Vapor Technologies, Inc. Apparatus for sputtering or arc evaporation
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
US6096391A (en) * 1998-10-16 2000-08-01 Wilson Greatbatch Ltd. Method for improving electrical conductivity of metals, metal alloys and metal oxides
US5997705A (en) * 1999-04-14 1999-12-07 Vapor Technologies, Inc. Rectangular filtered arc plasma source
JP4000764B2 (ja) * 2000-09-18 2007-10-31 日新電機株式会社 真空アーク蒸発装置
WO2002062113A1 (fr) * 2001-02-01 2002-08-08 Zakrytoe Aktsionernoe Obschestvo 'patinor Coatings Limited' Source d'impulsions du plasma de carbone
KR100672629B1 (ko) * 2001-03-06 2007-01-23 엘지.필립스 엘시디 주식회사 스퍼터링 장치
JP2005509752A (ja) * 2001-11-15 2005-04-14 アイオニック フュージョン コーポレイション イオンプラズマ蒸着装置
WO2003057939A2 (en) * 2002-01-14 2003-07-17 Varco Ltd. Cathode for vacuum arc evaporators
US6936145B2 (en) * 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus
DE10209423A1 (de) * 2002-03-05 2003-09-18 Schwerionenforsch Gmbh Beschichtung aus einer Gettermetall-Legierung sowie Anordnung und Verfahren zur Herstellung derselben
US8066854B2 (en) * 2002-12-18 2011-11-29 Metascape Llc Antimicrobial coating methods
JP2005029855A (ja) * 2003-07-08 2005-02-03 Fuji Electric Device Technology Co Ltd 真空アーク蒸着装置、真空アーク蒸着法、および磁気記録媒体
US8038858B1 (en) 2004-04-28 2011-10-18 Alameda Applied Sciences Corp Coaxial plasma arc vapor deposition apparatus and method
US7867366B1 (en) 2004-04-28 2011-01-11 Alameda Applied Sciences Corp. Coaxial plasma arc vapor deposition apparatus and method
US7498587B2 (en) * 2006-05-01 2009-03-03 Vapor Technologies, Inc. Bi-directional filtered arc plasma source
US7524385B2 (en) * 2006-10-03 2009-04-28 Elemetric, Llc Controlled phase transition of metals
US9175383B2 (en) 2008-01-16 2015-11-03 Applied Materials, Inc. Double-coating device with one process chamber
EP2081212B1 (de) * 2008-01-16 2016-03-23 Applied Materials, Inc. Doppelbeschichtungsvorrichtung mit einer Prozesskammer
CN101698934B (zh) * 2009-10-23 2011-06-15 武汉大学 一种中空阴极电弧离子镀涂层系统
US20120199070A1 (en) 2011-02-03 2012-08-09 Vapor Technologies, Inc. Filter for arc source
CN102321869A (zh) * 2011-09-16 2012-01-18 王敬达 离子真空镀膜方法与装置
CN102321870B (zh) * 2011-09-19 2013-07-31 王敬达 金属筒内壁的耐磨层离子真空镀膜方法
EP2602354A1 (de) * 2011-12-05 2013-06-12 Pivot a.s. Vakuumbogenablagerungsvorrichtung mit gefilterter Kathode und Verfahren
WO2014115733A1 (ja) * 2013-01-22 2014-07-31 日新電機株式会社 プラズマ装置、それを用いたカーボン薄膜の製造方法およびコーティング方法
ES2563862T3 (es) 2013-03-15 2016-03-16 Vapor Technologies, Inc. Depósito en fase de vapor de recubrimiento por inmersión en un plasma de arco a baja presión y tratamiento iónico
CN104131251A (zh) * 2013-05-02 2014-11-05 上海和辉光电有限公司 电磁蒸镀装置
CA2867451C (en) 2013-10-28 2021-06-29 Vapor Technologies, Inc. Low pressure arc plasma immersion coating vapor deposition and ion treatment
JP6414404B2 (ja) * 2014-07-18 2018-10-31 日新電機株式会社 陰極部材及びこれを用いたプラズマ装置
US11342168B2 (en) * 2017-02-14 2022-05-24 Oerlikon Surface Solutions Ag, Pfaffikon Cathodic arc evaporation with predetermined cathode material removal
US10900116B2 (en) * 2018-10-24 2021-01-26 Vapor Technologies, Inc. PVD system with remote arc discharge plasma assisted process
US10900117B2 (en) * 2018-10-24 2021-01-26 Vapor Technologies, Inc. Plasma corridor for high volume PE-CVD processing
US20210246542A1 (en) * 2018-11-19 2021-08-12 Kvarc Services Inc Coating apparatus and method for use thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen
US4673477A (en) * 1984-03-02 1987-06-16 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
US4724058A (en) * 1984-08-13 1988-02-09 Vac-Tec Systems, Inc. Method and apparatus for arc evaporating large area targets
NL8700620A (nl) * 1987-03-16 1988-10-17 Hauzer Holding Kathode boogverdampingsinrichting alsmede werkwijze voor het bedrijven daarvan.
US4859489A (en) * 1988-07-18 1989-08-22 Vapor Technologies Inc. Method of coating a metal gas-pressure bottle or tank
US5037533A (en) * 1990-02-15 1991-08-06 The Lubrizol Corporation Ore flotation process and use of phosphorus containing sulfo compounds
US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device

Also Published As

Publication number Publication date
JP3421811B2 (ja) 2003-06-30
EP0508612A2 (de) 1992-10-14
CA2061809A1 (en) 1992-09-21
ATE130378T1 (de) 1995-12-15
EP0508612B1 (de) 1995-11-15
JPH05106025A (ja) 1993-04-27
EP0508612A3 (en) 1993-02-17
CA2061809C (en) 2002-11-12
US5269898A (en) 1993-12-14
DE69206028T2 (de) 1996-07-18

Similar Documents

Publication Publication Date Title
DE69206028D1 (de) Vorrichtung und Verfahren zur Beschichtung eines Substrates unter Verwendung der Vakuum-Bogen-Verdampfung.
CN1147618C (zh) 利用阴极弧光放电的薄膜沉积装置
EP0454995B1 (de) Beschichtungsverfahren
EP0502385B1 (de) Verfahren zur Herstellung einer doppelseitigen Beschichtung von optischen Werkstücken
ATE244777T1 (de) Rechteckige vakuumlichtbogenplasmaquelle
DE3787705D1 (de) Vorrichtung und Verfahren zum Auftragen von Dünnschichtüberzügen im Vacuum.
DE3543316C2 (de)
ATE151119T1 (de) Magnetronzerstäubungsanlage und -verfahren
DK0502068T3 (da) Fremgangsmåde til overtrækning af substrater med siliciumbaserede forbindelser
ATE194856T1 (de) Vorrichtung zur magnetron-plasma-aufstäube- beschichtung und verfahren zum aufstäube- beschichten eines substrates
GB2039500A (en) Deposition of thin film organic coatings
GB9821903D0 (en) A method of applying a coating to a metallic article and an apparatus for applying a coating to a metallic article
ES2152215T3 (es) Aparato y procedimiento para producir laminas de material.
KR920005439B1 (ko) 박막 제조방법
US7465378B2 (en) Method for reactive sputtering deposition
EP0294572A1 (de) Verfahren und Vorrichtung zur Beschichtung eines Substrats
US5370779A (en) ECR plasma process
JPS63307270A (ja) スパッタリング装置
JPS5645778A (en) Electrostatic painting method and apparatus therefor
DE19610253A1 (de) Zerstäubungseinrichtung
JP2004160287A (ja) 成膜装置および成膜方法
JPS5591975A (en) Thin film forming method
DE60100019T2 (de) Vorrichtung und Verfahren zur Beschichtung von Prothesenteilen
MX9605104A (es) Fuente rectangular de plasma de arco al vacio.
JPS6196067A (ja) 高周波イオンプレ−テイング装置

Legal Events

Date Code Title Description
8364 No opposition during term of opposition