DE69131633D1 - Festkörperbildaufnahmevorrichtung und Verfahren zu deren Herstellung - Google Patents

Festkörperbildaufnahmevorrichtung und Verfahren zu deren Herstellung

Info

Publication number
DE69131633D1
DE69131633D1 DE69131633T DE69131633T DE69131633D1 DE 69131633 D1 DE69131633 D1 DE 69131633D1 DE 69131633 T DE69131633 T DE 69131633T DE 69131633 T DE69131633 T DE 69131633T DE 69131633 D1 DE69131633 D1 DE 69131633D1
Authority
DE
Germany
Prior art keywords
solid
production
imaging device
state imaging
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69131633T
Other languages
English (en)
Other versions
DE69131633T2 (de
Inventor
Takao Kuroda
Shigeru Okamoto
Sumio Terakawa
Katsuya Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Application granted granted Critical
Publication of DE69131633D1 publication Critical patent/DE69131633D1/de
Publication of DE69131633T2 publication Critical patent/DE69131633T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H01L27/14887—Blooming suppression
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H01L27/14831—Area CCD imagers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Solid State Image Pick-Up Elements (AREA)
DE69131633T 1990-06-25 1991-06-11 Festkörperbildaufnahmevorrichtung und Verfahren zu deren Herstellung Expired - Lifetime DE69131633T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16713490 1990-06-25

Publications (2)

Publication Number Publication Date
DE69131633D1 true DE69131633D1 (de) 1999-10-28
DE69131633T2 DE69131633T2 (de) 2000-02-10

Family

ID=15844061

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69133107T Expired - Lifetime DE69133107T2 (de) 1990-06-25 1991-06-11 Festkörperbildaufnahmevorrichtung und Verfahren zu deren Herstellung und Ansteuermethode dafür
DE69131633T Expired - Lifetime DE69131633T2 (de) 1990-06-25 1991-06-11 Festkörperbildaufnahmevorrichtung und Verfahren zu deren Herstellung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69133107T Expired - Lifetime DE69133107T2 (de) 1990-06-25 1991-06-11 Festkörperbildaufnahmevorrichtung und Verfahren zu deren Herstellung und Ansteuermethode dafür

Country Status (3)

Country Link
US (2) US5262661A (de)
EP (2) EP0463455B1 (de)
DE (2) DE69133107T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05335549A (ja) * 1992-06-01 1993-12-17 Matsushita Electric Ind Co Ltd 固体撮像装置およびその駆動方法
JP3271086B2 (ja) * 1992-09-29 2002-04-02 ソニー株式会社 固体撮像素子の駆動回路
JP2878137B2 (ja) * 1994-06-29 1999-04-05 シャープ株式会社 増幅型光電変換素子、それを用いた増幅型固体撮像装置、及び増幅型光電変換素子の製造方法
KR0123048Y1 (ko) * 1994-07-08 1998-10-01 구본준 씨씨디 영상소자
US5563404A (en) * 1995-03-22 1996-10-08 Eastman Kodak Company Full frame CCD image sensor with altered accumulation potential
US5612555A (en) * 1995-03-22 1997-03-18 Eastman Kodak Company Full frame solid-state image sensor with altered accumulation potential and method for forming same
JP3467918B2 (ja) * 1995-08-04 2003-11-17 ソニー株式会社 固体撮像素子の製造方法及び固体撮像素子
JP3141940B2 (ja) * 1998-05-08 2001-03-07 日本電気株式会社 カラーリニアイメージセンサ
US6707499B1 (en) * 1998-12-08 2004-03-16 Industrial Technology Research Institute Technique to increase dynamic range of a CCD image sensor
JP4433528B2 (ja) * 1998-12-08 2010-03-17 ソニー株式会社 固体撮像素子及びその製造方法
JP2006186261A (ja) * 2004-12-28 2006-07-13 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
JP2008160078A (ja) * 2006-12-01 2008-07-10 Matsushita Electric Ind Co Ltd 樹脂膜の評価方法および半導体装置の製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4560421A (en) * 1980-10-02 1985-12-24 Tokyo Shibaura Denki Kabushiki Kaisha Semiconductor device and method of manufacturing the same
US5118631A (en) * 1981-07-10 1992-06-02 Loral Fairchild Corporation Self-aligned antiblooming structure for charge-coupled devices and method of fabrication thereof
JPS5919480A (ja) * 1982-07-26 1984-01-31 Olympus Optical Co Ltd 固体撮像装置
JPS59108468A (ja) * 1982-12-14 1984-06-22 Olympus Optical Co Ltd 固体撮像装置
JP2610010B2 (ja) * 1984-02-29 1997-05-14 ソニー株式会社 縦形オーバーフローイメージセンサー
DE3586452T2 (de) * 1984-10-18 1993-03-18 Matsushita Electronics Corp Festkoerperbildsensor und verfahren zu seiner herstellung.
JPS6239055A (ja) * 1985-08-13 1987-02-20 Mitsubishi Electric Corp 固体撮像素子
JPH0715981B2 (ja) * 1985-12-03 1995-02-22 松下電子工業株式会社 固体撮像装置
US4814848A (en) * 1986-06-12 1989-03-21 Hitachi, Ltd. Solid-state imaging device
NL8602091A (nl) * 1986-08-18 1988-03-16 Philips Nv Beeldopneeminrichting uitgevoerd met een vaste-stof beeldopnemer en een elektronische sluiter.
JP2822393B2 (ja) * 1988-07-30 1998-11-11 ソニー株式会社 固体撮像装置及びその駆動方法
EP0360595A3 (de) * 1988-09-22 1990-05-09 Matsushita Electronics Corporation Festkörperbildsensor
JPH02119266A (ja) * 1988-10-28 1990-05-07 Nec Corp 縦形オーバフロードレイン構造の固体撮像装置
JPH04355964A (ja) * 1990-12-21 1992-12-09 Mitsubishi Electric Corp 固体撮像装置及びその製造方法

Also Published As

Publication number Publication date
DE69133107D1 (de) 2002-10-17
DE69131633T2 (de) 2000-02-10
EP0463455A2 (de) 1992-01-02
EP0915520A1 (de) 1999-05-12
US5262661A (en) 1993-11-16
US5324669A (en) 1994-06-28
DE69133107T2 (de) 2003-01-02
EP0463455B1 (de) 1999-09-22
EP0463455A3 (en) 1992-02-12
EP0915520B1 (de) 2002-09-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., KADOMA,

8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP