DE69126413D1 - Sensor vom Diodentyp - Google Patents

Sensor vom Diodentyp

Info

Publication number
DE69126413D1
DE69126413D1 DE69126413T DE69126413T DE69126413D1 DE 69126413 D1 DE69126413 D1 DE 69126413D1 DE 69126413 T DE69126413 T DE 69126413T DE 69126413 T DE69126413 T DE 69126413T DE 69126413 D1 DE69126413 D1 DE 69126413D1
Authority
DE
Germany
Prior art keywords
type sensor
diode type
layer
substrate
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69126413T
Other languages
English (en)
Other versions
DE69126413T2 (de
Inventor
Jean Joseph Marie Roggen
Geloven Peter Maria Van
Rita Vanhoof
Guido Huyberechts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Interuniversitair Microelektronica Centrum vzw IMEC
Original Assignee
Interuniversitair Microelektronica Centrum vzw IMEC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Interuniversitair Microelektronica Centrum vzw IMEC filed Critical Interuniversitair Microelektronica Centrum vzw IMEC
Publication of DE69126413D1 publication Critical patent/DE69126413D1/de
Application granted granted Critical
Publication of DE69126413T2 publication Critical patent/DE69126413T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
DE69126413T 1990-12-13 1991-12-11 Sensor vom Diodentyp Expired - Fee Related DE69126413T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL9002750A NL9002750A (nl) 1990-12-13 1990-12-13 Sensor van het diode type.

Publications (2)

Publication Number Publication Date
DE69126413D1 true DE69126413D1 (de) 1997-07-10
DE69126413T2 DE69126413T2 (de) 1997-09-18

Family

ID=19858139

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69126413T Expired - Fee Related DE69126413T2 (de) 1990-12-13 1991-12-11 Sensor vom Diodentyp

Country Status (4)

Country Link
EP (1) EP0492700B1 (de)
AT (1) ATE154130T1 (de)
DE (1) DE69126413T2 (de)
NL (1) NL9002750A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3081244B2 (ja) * 1992-01-10 2000-08-28 株式会社ミクニ ガスセンサおよびその製造方法
SE514042C2 (sv) * 1998-05-08 2000-12-18 Nordic Sensor Technologies Ab Sensoranordning
SE523918C2 (sv) 1999-01-25 2004-06-01 Appliedsensor Sweden Ab Förfarande för framställning av integrerade sensorgrupper på ett gemensamt substrat samt en mask för användning vid förfarandet
CN104713915B (zh) * 2015-03-18 2017-12-08 华中科技大学 一种基于叠层结构的高性能气敏传感器及其制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975362A (en) * 1957-05-06 1961-03-14 Mine Safety Appliances Co Semiconductor diodes for gas detection
JPS5119592A (en) * 1974-08-09 1976-02-16 Nissan Motor Gasunodo kenshutsuki
NL7411044A (nl) * 1974-08-19 1976-02-23 Philips Nv Meetcel voor het bepalen van zuurstofconcen- traties in een gasmengsel.
SE387444B (sv) * 1974-09-09 1976-09-06 C M Svensson Detektor for pavisande av vete
US4103227A (en) * 1977-03-25 1978-07-25 University Of Pennsylvania Ion-controlled diode
DE3519410A1 (de) * 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Betriebsverfahren und sensor fuer gasanalyse
JPH02296141A (ja) * 1989-05-10 1990-12-06 Terumo Corp 機能性素子及びそれを備えたｆｅｔセンサ

Also Published As

Publication number Publication date
DE69126413T2 (de) 1997-09-18
EP0492700B1 (de) 1997-06-04
EP0492700A1 (de) 1992-07-01
NL9002750A (nl) 1992-07-01
ATE154130T1 (de) 1997-06-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee