ATE154130T1 - Sensor vom diodentyp - Google Patents

Sensor vom diodentyp

Info

Publication number
ATE154130T1
ATE154130T1 AT91203280T AT91203280T ATE154130T1 AT E154130 T1 ATE154130 T1 AT E154130T1 AT 91203280 T AT91203280 T AT 91203280T AT 91203280 T AT91203280 T AT 91203280T AT E154130 T1 ATE154130 T1 AT E154130T1
Authority
AT
Austria
Prior art keywords
type sensor
diode type
layer
substrate
conductivity type
Prior art date
Application number
AT91203280T
Other languages
English (en)
Inventor
Jean Joseph Marie Roggen
Geloven Peter Maria Van
Rita Vanhoof
Guido Huyberechts
Original Assignee
Imec Inter Uni Micro Electr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec Inter Uni Micro Electr filed Critical Imec Inter Uni Micro Electr
Application granted granted Critical
Publication of ATE154130T1 publication Critical patent/ATE154130T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
AT91203280T 1990-12-13 1991-12-11 Sensor vom diodentyp ATE154130T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL9002750A NL9002750A (nl) 1990-12-13 1990-12-13 Sensor van het diode type.

Publications (1)

Publication Number Publication Date
ATE154130T1 true ATE154130T1 (de) 1997-06-15

Family

ID=19858139

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91203280T ATE154130T1 (de) 1990-12-13 1991-12-11 Sensor vom diodentyp

Country Status (4)

Country Link
EP (1) EP0492700B1 (de)
AT (1) ATE154130T1 (de)
DE (1) DE69126413T2 (de)
NL (1) NL9002750A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3081244B2 (ja) * 1992-01-10 2000-08-28 株式会社ミクニ ガスセンサおよびその製造方法
SE514042C2 (sv) * 1998-05-08 2000-12-18 Nordic Sensor Technologies Ab Sensoranordning
SE523918C2 (sv) 1999-01-25 2004-06-01 Appliedsensor Sweden Ab Förfarande för framställning av integrerade sensorgrupper på ett gemensamt substrat samt en mask för användning vid förfarandet
CN104713915B (zh) * 2015-03-18 2017-12-08 华中科技大学 一种基于叠层结构的高性能气敏传感器及其制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975362A (en) * 1957-05-06 1961-03-14 Mine Safety Appliances Co Semiconductor diodes for gas detection
JPS5119592A (en) * 1974-08-09 1976-02-16 Nissan Motor Gasunodo kenshutsuki
NL7411044A (nl) * 1974-08-19 1976-02-23 Philips Nv Meetcel voor het bepalen van zuurstofconcen- traties in een gasmengsel.
SE387444B (sv) * 1974-09-09 1976-09-06 C M Svensson Detektor for pavisande av vete
US4103227A (en) * 1977-03-25 1978-07-25 University Of Pennsylvania Ion-controlled diode
DE3519410A1 (de) * 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Betriebsverfahren und sensor fuer gasanalyse
JPH02296141A (ja) * 1989-05-10 1990-12-06 Terumo Corp 機能性素子及びそれを備えたｆｅｔセンサ

Also Published As

Publication number Publication date
DE69126413D1 (de) 1997-07-10
DE69126413T2 (de) 1997-09-18
EP0492700B1 (de) 1997-06-04
EP0492700A1 (de) 1992-07-01
NL9002750A (nl) 1992-07-01

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties