NL9002750A - Sensor van het diode type. - Google Patents

Sensor van het diode type. Download PDF

Info

Publication number
NL9002750A
NL9002750A NL9002750A NL9002750A NL9002750A NL 9002750 A NL9002750 A NL 9002750A NL 9002750 A NL9002750 A NL 9002750A NL 9002750 A NL9002750 A NL 9002750A NL 9002750 A NL9002750 A NL 9002750A
Authority
NL
Netherlands
Prior art keywords
sensor
layer
type
substrate
semiconductor
Prior art date
Application number
NL9002750A
Other languages
English (en)
Dutch (nl)
Original Assignee
Imec Inter Uni Micro Electr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec Inter Uni Micro Electr filed Critical Imec Inter Uni Micro Electr
Priority to NL9002750A priority Critical patent/NL9002750A/nl
Priority to DE69126413T priority patent/DE69126413T2/de
Priority to AT91203280T priority patent/ATE154130T1/de
Priority to EP91203280A priority patent/EP0492700B1/de
Publication of NL9002750A publication Critical patent/NL9002750A/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Push-Button Switches (AREA)
  • Light Receiving Elements (AREA)
NL9002750A 1990-12-13 1990-12-13 Sensor van het diode type. NL9002750A (nl)

Priority Applications (4)

Application Number Priority Date Filing Date Title
NL9002750A NL9002750A (nl) 1990-12-13 1990-12-13 Sensor van het diode type.
DE69126413T DE69126413T2 (de) 1990-12-13 1991-12-11 Sensor vom Diodentyp
AT91203280T ATE154130T1 (de) 1990-12-13 1991-12-11 Sensor vom diodentyp
EP91203280A EP0492700B1 (de) 1990-12-13 1991-12-11 Sensor vom Diodentyp

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9002750 1990-12-13
NL9002750A NL9002750A (nl) 1990-12-13 1990-12-13 Sensor van het diode type.

Publications (1)

Publication Number Publication Date
NL9002750A true NL9002750A (nl) 1992-07-01

Family

ID=19858139

Family Applications (1)

Application Number Title Priority Date Filing Date
NL9002750A NL9002750A (nl) 1990-12-13 1990-12-13 Sensor van het diode type.

Country Status (4)

Country Link
EP (1) EP0492700B1 (de)
AT (1) ATE154130T1 (de)
DE (1) DE69126413T2 (de)
NL (1) NL9002750A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993014396A1 (en) * 1992-01-10 1993-07-22 Mikuni Corporation Gas sensor and its manufacture
SE514042C2 (sv) * 1998-05-08 2000-12-18 Nordic Sensor Technologies Ab Sensoranordning
SE523918C2 (sv) 1999-01-25 2004-06-01 Appliedsensor Sweden Ab Förfarande för framställning av integrerade sensorgrupper på ett gemensamt substrat samt en mask för användning vid förfarandet
CN104713915B (zh) * 2015-03-18 2017-12-08 华中科技大学 一种基于叠层结构的高性能气敏传感器及其制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975362A (en) * 1957-05-06 1961-03-14 Mine Safety Appliances Co Semiconductor diodes for gas detection
JPS5119592A (en) * 1974-08-09 1976-02-16 Nissan Motor Gasunodo kenshutsuki
NL7411044A (nl) * 1974-08-19 1976-02-23 Philips Nv Meetcel voor het bepalen van zuurstofconcen- traties in een gasmengsel.
SE387444B (sv) * 1974-09-09 1976-09-06 C M Svensson Detektor for pavisande av vete
US4103227A (en) * 1977-03-25 1978-07-25 University Of Pennsylvania Ion-controlled diode
DE3519410A1 (de) * 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Betriebsverfahren und sensor fuer gasanalyse
JPH02296141A (ja) * 1989-05-10 1990-12-06 Terumo Corp 機能性素子及びそれを備えたｆｅｔセンサ

Also Published As

Publication number Publication date
EP0492700B1 (de) 1997-06-04
DE69126413D1 (de) 1997-07-10
ATE154130T1 (de) 1997-06-15
EP0492700A1 (de) 1992-07-01
DE69126413T2 (de) 1997-09-18

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