DE69123802T2 - Verfahren zum Auftragen einer Dünnschicht auf ein Substrat durch Sputtern - Google Patents

Verfahren zum Auftragen einer Dünnschicht auf ein Substrat durch Sputtern

Info

Publication number
DE69123802T2
DE69123802T2 DE69123802T DE69123802T DE69123802T2 DE 69123802 T2 DE69123802 T2 DE 69123802T2 DE 69123802 T DE69123802 T DE 69123802T DE 69123802 T DE69123802 T DE 69123802T DE 69123802 T2 DE69123802 T2 DE 69123802T2
Authority
DE
Germany
Prior art keywords
sputtering
applying
substrate
thin layer
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69123802T
Other languages
English (en)
Other versions
DE69123802D1 (de
Inventor
Minoru Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Semiconductor Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of DE69123802D1 publication Critical patent/DE69123802D1/de
Application granted granted Critical
Publication of DE69123802T2 publication Critical patent/DE69123802T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
DE69123802T 1990-09-20 1991-09-19 Verfahren zum Auftragen einer Dünnschicht auf ein Substrat durch Sputtern Expired - Lifetime DE69123802T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2252528A JPH0774436B2 (ja) 1990-09-20 1990-09-20 薄膜形成方法

Publications (2)

Publication Number Publication Date
DE69123802D1 DE69123802D1 (de) 1997-02-06
DE69123802T2 true DE69123802T2 (de) 1997-07-10

Family

ID=17238625

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69123802T Expired - Lifetime DE69123802T2 (de) 1990-09-20 1991-09-19 Verfahren zum Auftragen einer Dünnschicht auf ein Substrat durch Sputtern

Country Status (5)

Country Link
US (1) US5244556A (de)
EP (1) EP0476652B1 (de)
JP (1) JPH0774436B2 (de)
KR (1) KR950010196B1 (de)
DE (1) DE69123802T2 (de)

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FR2680799B1 (fr) * 1991-09-03 1993-10-29 Elf Aquitaine Ste Nale Element de cible pour pulverisation cathodique, procede de preparation dudit element et cibles, notamment de grande surface, realisees a partir de cet element.
FR2685011B1 (fr) * 1991-12-13 1994-02-04 Elf Aquitaine Ste Nale Procede de preparation d'un element de cible pour pulverisation cathodique et cibles, notamment de grande surface, realisees a partir de cet element.
DE4232007A1 (de) * 1992-09-24 1994-03-31 Leybold Ag Zerstäubungskathode zum Einsatz in Vakuum-Beschichtungsanlagen
US5693203A (en) * 1992-09-29 1997-12-02 Japan Energy Corporation Sputtering target assembly having solid-phase bonded interface
US5487822A (en) * 1993-11-24 1996-01-30 Applied Materials, Inc. Integrated sputtering target assembly
US5433835B1 (en) * 1993-11-24 1997-05-20 Applied Materials Inc Sputtering device and target with cover to hold cooling fluid
US5477692A (en) * 1994-05-31 1995-12-26 Southeastern Universities Research Metal sponge for cryosorption pumping applications
JP3852967B2 (ja) * 1995-07-14 2006-12-06 株式会社アルバック 低圧スパッタリング装置
US5857611A (en) * 1995-08-16 1999-01-12 Sony Corporation Sputter target/backing plate assembly and method of making same
US5738770A (en) * 1996-06-21 1998-04-14 Sony Corporation Mechanically joined sputtering target and adapter therefor
US6068742A (en) * 1996-07-22 2000-05-30 Balzers Aktiengesellschaft Target arrangement with a circular plate, magnetron for mounting the target arrangement, and process for coating a series of circular disc-shaped workpieces by means of said magnetron source
US5985115A (en) * 1997-04-11 1999-11-16 Novellus Systems, Inc. Internally cooled target assembly for magnetron sputtering
WO1999034028A1 (en) * 1997-12-24 1999-07-08 Kabushiki Kaisha Toshiba SPUTTERING TARGET, Al INTERCONNECTION FILM, AND ELECTRONIC COMPONENT
US6340415B1 (en) 1998-01-05 2002-01-22 Applied Materials, Inc. Method and apparatus for enhancing a sputtering target's lifetime
US6579431B1 (en) 1998-01-14 2003-06-17 Tosoh Smd, Inc. Diffusion bonding of high purity metals and metal alloys to aluminum backing plates using nickel or nickel alloy interlayers
US6323055B1 (en) * 1998-05-27 2001-11-27 The Alta Group, Inc. Tantalum sputtering target and method of manufacture
US6071389A (en) * 1998-08-21 2000-06-06 Tosoh Smd, Inc. Diffusion bonded sputter target assembly and method of making
US6406997B1 (en) * 1999-06-09 2002-06-18 Klaus Schroder Chromium films and chromium film overlayers
US6551470B1 (en) * 1999-06-15 2003-04-22 Academy Precision Materials Clamp and target assembly
US6164519A (en) * 1999-07-08 2000-12-26 Praxair S.T. Technology, Inc. Method of bonding a sputtering target to a backing plate
US8696875B2 (en) * 1999-10-08 2014-04-15 Applied Materials, Inc. Self-ionized and inductively-coupled plasma for sputtering and resputtering
US10047430B2 (en) 1999-10-08 2018-08-14 Applied Materials, Inc. Self-ionized and inductively-coupled plasma for sputtering and resputtering
US6619537B1 (en) 2000-06-12 2003-09-16 Tosoh Smd, Inc. Diffusion bonding of copper sputtering targets to backing plates using nickel alloy interlayers
EP1312695B1 (de) * 2000-11-17 2009-07-29 Nippon Mining & Metals Co., Ltd. Sputtering-target, das wenig partikel produziert, belagträgerplatte mit dem target und verfahren zur herstellung des targets
US6887356B2 (en) * 2000-11-27 2005-05-03 Cabot Corporation Hollow cathode target and methods of making same
JP2004529269A (ja) * 2001-04-26 2004-09-24 ハネウェル・インターナショナル・インコーポレーテッド モリブデン及びアルミニウムを含むアセンブリ；ターゲット／バッキングプレートアセンブリを作製するときに中間層を用いる方法
US20060065517A1 (en) * 2002-06-14 2006-03-30 Tosoh Smd, Inc. Target and method of diffusion bonding target to backing plate
US7504006B2 (en) * 2002-08-01 2009-03-17 Applied Materials, Inc. Self-ionized and capacitively-coupled plasma for sputtering and resputtering
WO2004094688A1 (en) * 2003-04-02 2004-11-04 Honeywell International Inc. Pvd target/backing plate constructions; and methods of forming pvd target/backing plate constructions
JP4336206B2 (ja) * 2004-01-07 2009-09-30 Ｈｏｙａ株式会社 マスクブランクの製造方法、及びマスクブランク製造用スパッタリングターゲット
DE502004007133D1 (de) 2004-06-22 2008-06-26 Applied Materials Gmbh & Co Kg Zerstäubungskatode für Beschichtungsprozesse
KR101040076B1 (ko) * 2006-06-29 2011-06-09 Jx닛코 닛세끼 킨조쿠 가부시키가이샤 스퍼터링 타겟트/배킹 플레이트 접합체
JP5109376B2 (ja) 2007-01-22 2012-12-26 東京エレクトロン株式会社 加熱装置、加熱方法及び記憶媒体
WO2011055769A1 (en) * 2009-11-06 2011-05-12 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor element and semiconductor device, and deposition apparatus
JP5175976B2 (ja) 2009-11-20 2013-04-03 Ｊｘ日鉱日石金属株式会社 スパッタリングターゲット−バッキングプレート接合体及びその製造方法
US8349144B2 (en) * 2010-09-28 2013-01-08 Primestar Solar, Inc. Methods of sputtering using a non-bonded semiconducting target
SG189977A1 (en) 2010-10-27 2013-06-28 Jx Nippon Mining & Metals Corp Sputtering target backing plate assembly and method for producing same
CN103132014A (zh) * 2011-12-01 2013-06-05 深圳富泰宏精密工业有限公司 镀膜件及其制备方法
DE102012006717A1 (de) * 2012-04-04 2013-10-10 Oerlikon Trading Ag, Trübbach An eine indirekte Kühlvorrichtung angepasstes Target
US20150197848A1 (en) 2012-07-04 2015-07-16 Jx Nippon Mining & Metals Corporation Sputtering Target
KR20140101610A (ko) * 2013-02-12 2014-08-20 삼성디스플레이 주식회사 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
US10430555B1 (en) 2014-03-13 2019-10-01 Mckesson Corporation Systems and methods for determining and communicating information to a pharmacy indicating patient eligibility for an intervention service
US10642957B1 (en) 2014-10-21 2020-05-05 Mckesson Corporation Systems and methods for determining, collecting, and configuring patient intervention screening information from a pharmacy
US10650380B1 (en) 2017-03-31 2020-05-12 Mckesson Corporation System and method for evaluating requests

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2527184C3 (de) * 1975-06-18 1981-07-02 Philips Patentverwaltung Gmbh, 2000 Hamburg Vorrichtung zur Herstellung von Targets für Kathodenzerstäubung
US4324631A (en) * 1979-07-23 1982-04-13 Spin Physics, Inc. Magnetron sputtering of magnetic materials
JPS6345368A (ja) * 1986-08-13 1988-02-26 Toshiba Corp スパツタ装置
JPS63270459A (ja) * 1987-04-24 1988-11-08 Matsushita Electric Ind Co Ltd スパツタ用タ−ゲツトのボンデイング方法
JPH01132760A (ja) * 1987-11-19 1989-05-25 Matsushita Electric Ind Co Ltd スパッタ成膜方法及び成膜装置
DE3810175A1 (de) * 1988-03-25 1989-10-05 Elektronische Anlagen Gmbh Kathodenzerstaeubungsvorrichtung
JPH01249282A (ja) * 1988-03-29 1989-10-04 Showa Denko Kk クロムと銅の接合方法
JP2831356B2 (ja) * 1988-05-09 1998-12-02 三菱マテリアル株式会社 スパッタリング用ターゲットの製造方法
JPH01283368A (ja) * 1988-05-09 1989-11-14 Mitsubishi Metal Corp スローアウェイターゲットの製造方法
JP2612057B2 (ja) * 1988-12-20 1997-05-21 三菱電機株式会社 真空成膜装置の運転方法

Also Published As

Publication number Publication date
DE69123802D1 (de) 1997-02-06
JPH0774436B2 (ja) 1995-08-09
EP0476652B1 (de) 1996-12-27
JPH04131374A (ja) 1992-05-06
US5244556A (en) 1993-09-14
EP0476652A3 (en) 1992-04-15
KR920007087A (ko) 1992-04-28
KR950010196B1 (ko) 1995-09-11
EP0476652A2 (de) 1992-03-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FUJITSU MICROELECTRONICS LTD., TOKYO, JP

8327 Change in the person/name/address of the patent owner

Owner name: FUJITSU SEMICONDUCTOR LTD., YOKOHAMA, KANAGAWA, JP