DE69111770D1 - Verfahren zur Abscheidung einer Zinkoxidschicht auf ein Substrat. - Google Patents

Verfahren zur Abscheidung einer Zinkoxidschicht auf ein Substrat.

Info

Publication number
DE69111770D1
DE69111770D1 DE69111770T DE69111770T DE69111770D1 DE 69111770 D1 DE69111770 D1 DE 69111770D1 DE 69111770 T DE69111770 T DE 69111770T DE 69111770 T DE69111770 T DE 69111770T DE 69111770 D1 DE69111770 D1 DE 69111770D1
Authority
DE
Germany
Prior art keywords
deposition
substrate
oxide layer
zinc oxide
zinc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69111770T
Other languages
English (en)
Other versions
DE69111770T2 (de
Inventor
Dennis R Platts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Werke GmbH
Original Assignee
Ford Werke GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Werke GmbH filed Critical Ford Werke GmbH
Publication of DE69111770D1 publication Critical patent/DE69111770D1/de
Application granted granted Critical
Publication of DE69111770T2 publication Critical patent/DE69111770T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1229—Composition of the substrate
    • C23C18/1245—Inorganic substrates other than metallic
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1258—Spray pyrolysis
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1291—Process of deposition of the inorganic material by heating of the substrate
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/216—ZnO
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/112—Deposition methods from solutions or suspensions by spraying
DE69111770T 1990-12-12 1991-11-14 Verfahren zur Abscheidung einer Zinkoxidschicht auf ein Substrat. Expired - Fee Related DE69111770T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/626,515 US5094882A (en) 1990-12-12 1990-12-12 Zinc oxide film growth rate accelerator

Publications (2)

Publication Number Publication Date
DE69111770D1 true DE69111770D1 (de) 1995-09-07
DE69111770T2 DE69111770T2 (de) 1995-12-07

Family

ID=24510698

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69111770T Expired - Fee Related DE69111770T2 (de) 1990-12-12 1991-11-14 Verfahren zur Abscheidung einer Zinkoxidschicht auf ein Substrat.

Country Status (4)

Country Link
US (1) US5094882A (de)
EP (1) EP0490492B1 (de)
CA (1) CA2052991A1 (de)
DE (1) DE69111770T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6174564B1 (en) 1991-12-13 2001-01-16 Symetrix Corporation Method of making metal polyoxyalkylated precursor solutions
DE4304679C2 (de) * 1992-02-17 1996-03-21 Mitsubishi Electric Corp Verfahren zur Herstellung einer dünnen dielektrischen Schicht eines Oxid-Systems unter Verwendung des CVD-Verfahrens
KR100346900B1 (ko) * 1994-08-16 2002-11-13 시메트릭스 코포레이션 옥탄용매내에분산되어있는금속폴리옥시알킬화전구물질용액,전구물질용액의제조방법및이전구물질용액을이용한집적회로용박막의제조방법
WO2011027425A1 (ja) * 2009-09-02 2011-03-10 東芝三菱電機産業システム株式会社 金属酸化膜の成膜方法、金属酸化膜および金属酸化膜の成膜装置
EP2688850B1 (de) * 2011-03-23 2018-02-21 Pilkington Group Limited Verfahren zur ablagerung von zinkoxidbeschichtungen mittels cvd
US9776914B2 (en) * 2012-03-16 2017-10-03 Pilkington Group Limited Chemical vapor deposition process for depositing zinc oxide coatings, method for forming a conductive glass article and the coated glass articles produced thereby
CN105506584B (zh) * 2014-01-24 2018-04-13 重庆文理学院 一种电子薄膜的制备方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679386A (en) * 1969-06-30 1972-07-25 Nippon Sheet Glass Co Ltd Process and apparatus for forming a metal oxide coating on flat glass
US3850665A (en) * 1971-07-08 1974-11-26 Glaverbel Process for forming a metal oxide coating on a substrate and resulting products
US4129434A (en) * 1971-07-08 1978-12-12 Glaverbell Process for forming a metal oxide coating
BE785763A (de) * 1971-07-08 1973-01-03 Glaverbel
DE2160723C3 (de) * 1971-12-07 1974-11-28 United Glass Ltd., Staines, Middlesex (Grossbritannien) Verfahren zur Herstellung von Glasbehältern hoher mechanischer Festigkeit und Abriebbeständigkeit
JPS4980119A (de) * 1972-12-06 1974-08-02
US4160061A (en) * 1975-03-29 1979-07-03 Central Glass Company, Limited Heat-reflecting glass plate and method of producing same
DE2630438A1 (de) * 1976-07-07 1978-04-13 Schlafhorst & Co W Verfahren und vorrichtung zur abgabe von textilspulen aus einem schwingfoerderer
US4204028A (en) * 1978-03-16 1980-05-20 Ppg Industries, Inc. Conductive metal oxide film for solar energy control
CA1146702A (en) * 1978-07-03 1983-05-24 Stanley M. Ohlberg Pyrolytic deposition of a cobalt/tin oxide spinel film
US4239816A (en) * 1978-12-01 1980-12-16 Ppg Industries, Inc. Organic additives for organometallic compositions
US4259371A (en) * 1979-07-25 1981-03-31 Ppg Industries, Inc. Method for improving the alkali durability of metal oxide films formed by pyrolysis
US4292347A (en) * 1979-12-03 1981-09-29 Ppg Industries, Inc. Pyrolytic coating reactant for defect and durability control
JPS56109842A (en) * 1980-01-29 1981-08-31 Nippon Sheet Glass Co Ltd Manufacture of glass coated with metal oxide
US4397671A (en) * 1981-11-30 1983-08-09 Ford Motor Company Method of placing a metal oxide film on a surface of a heated glass substrate
US4393098A (en) * 1982-07-29 1983-07-12 Ford Motor Company Process for developing a coating film on a heated glass sheet
JPH01249634A (ja) * 1988-03-30 1989-10-04 Nippon Sheet Glass Co Ltd 導電性ガラスおよびその製造方法

Also Published As

Publication number Publication date
CA2052991A1 (en) 1992-06-13
EP0490492B1 (de) 1995-08-02
EP0490492A3 (en) 1992-07-29
EP0490492A2 (de) 1992-06-17
DE69111770T2 (de) 1995-12-07
US5094882A (en) 1992-03-10

Similar Documents

Publication Publication Date Title
DE69123802D1 (de) Verfahren zum Auftragen einer Dünnschicht auf ein Substrat durch Sputtern
DE68928402T2 (de) Verfahren zur Entfernung einer Oxidschicht auf einem Substrat
DE69209896D1 (de) Verfahren zur Herstellung degradierter Beschichtung auf einem Substrat
DE69421467T2 (de) Verfahren zum Ablegen einer Dünnschicht auf Basis von einem Titannitrid auf einem transparenten Substrat
DE3766940D1 (de) Verfahren zur herstellung einer planaren polymerischen bedeckung auf einem substrat.
DE68909395T2 (de) Verfahren zur Ablagerung eines dünnen Oxydfilms.
DE69114595T2 (de) Verfahren zur Bestimmung der vollständigen Abtragung einer Dünnschicht auf einem nichtplanaren Substrat.
DE59202154D1 (de) Verfahren zur herstellung einer leuchtstoffschicht auf einem substrat.
DE69123807D1 (de) Verfahren zum Verbessern der Eigenschaften einer Dünnschicht auf einem Substrat
DE69111770D1 (de) Verfahren zur Abscheidung einer Zinkoxidschicht auf ein Substrat.
DE69114823T2 (de) Verfahren zur Abscheidung einer Zinkoxidschicht auf ein Substrat.
DE68912638T2 (de) Verfahren zur Herstellung einer Kristallschicht auf einem Substrat.
DE69510906T2 (de) Verfahren zur Herstellung einer unlöslichen Beschichtung auf einem Substrat
DE68921253D1 (de) Verfahren zur Abscheidung einer dünnen Supraleiterschicht.
DE3886863T2 (de) Verfahren zur Herstellung einer supraleitenden Oxydschicht auf einem Substrat.
DE68908325D1 (de) Verfahren zur herstellung einer indiumphosphid-epitaxialschicht auf einer substratoberflaeche.
DE69303853D1 (de) Verfahren zur Bildung einer Dünnschicht auf einem Substrat mittels reaktiven Gleichstrom-Sputtern
DE69114942T2 (de) In situ-Messung einer dünnen Schicht auf einem Substrat.
DE69304130T2 (de) Verfahren zur Abscheidung eines ohmischen Kontaktes auf einer ZnSe-Schicht
DE69019869D1 (de) Verfahren zur Plattierung einer metallischen Schicht zwischen funktionellen Bahnen auf einem Substrat.
DE69114615D1 (de) Verfahren zur Herstellung einer dünnen Schicht auf der Faserstirnfläche.
DE3886033D1 (de) Verfahren zur herstellung einer t-gate metallstruktur auf einem substrat.
DE69129722T2 (de) Verfahren für das selektive Wachstum einer Dünnschicht auf einem gemusterten Substrat
ATA81890A (de) Verfahren zur herstellung einer duennen nitridoder oxidschicht auf einer oberflaeche
DE59703686D1 (de) Verfahren zur beschichtung von substraten durch cvd mit einer siliziumhaltigen schutzschicht

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee