DE69117321D1 - Saw-Anordnung mit mehreren Elektroden und zugehöriges Herstellungsverfahren - Google Patents

Saw-Anordnung mit mehreren Elektroden und zugehöriges Herstellungsverfahren

Info

Publication number
DE69117321D1
DE69117321D1 DE69117321T DE69117321T DE69117321D1 DE 69117321 D1 DE69117321 D1 DE 69117321D1 DE 69117321 T DE69117321 T DE 69117321T DE 69117321 T DE69117321 T DE 69117321T DE 69117321 D1 DE69117321 D1 DE 69117321D1
Authority
DE
Germany
Prior art keywords
manufacturing process
multiple electrodes
associated manufacturing
saw arrangement
saw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69117321T
Other languages
English (en)
Other versions
DE69117321T2 (de
Inventor
Tsutomu Miyashita
Yoshio Satoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE69117321D1 publication Critical patent/DE69117321D1/de
Publication of DE69117321T2 publication Critical patent/DE69117321T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02921—Measures for preventing electric discharge due to pyroelectricity
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1455—Transducers of particular shape or position constituted of N parallel or series transducers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE69117321T 1990-04-11 1991-04-10 Saw-Anordnung mit mehreren Elektroden und zugehöriges Herstellungsverfahren Expired - Fee Related DE69117321T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2095532A JPH03293808A (ja) 1990-04-11 1990-04-11 弾性表面波素子の製造方法

Publications (2)

Publication Number Publication Date
DE69117321D1 true DE69117321D1 (de) 1996-04-04
DE69117321T2 DE69117321T2 (de) 1996-07-18

Family

ID=14140170

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69117321T Expired - Fee Related DE69117321T2 (de) 1990-04-11 1991-04-10 Saw-Anordnung mit mehreren Elektroden und zugehöriges Herstellungsverfahren

Country Status (6)

Country Link
US (2) US5243249A (de)
EP (1) EP0452105B1 (de)
JP (1) JPH03293808A (de)
KR (1) KR950005177B1 (de)
CA (1) CA2040046C (de)
DE (1) DE69117321T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05299960A (ja) * 1992-04-21 1993-11-12 Sanyo Electric Co Ltd 弾性表面波素子の製造方法
US5448014A (en) * 1993-01-27 1995-09-05 Trw Inc. Mass simultaneous sealing and electrical connection of electronic devices
US5701645A (en) * 1994-04-06 1997-12-30 Motorola, Inc. Acoustic wave device manufacturing method
JP3237387B2 (ja) * 1994-04-12 2001-12-10 株式会社村田製作所 弾性表面波共振子フィルタ
US5536989A (en) * 1995-03-28 1996-07-16 The United States Of America As Represented By The Secretary Of The Army Circuit arrangement for saw substrates
JPH10215143A (ja) * 1997-01-31 1998-08-11 Nec Corp 弾性表面波装置
JP4203152B2 (ja) * 1998-09-11 2008-12-24 株式会社日立メディアエレクトロニクス 弾性表面波装置
DE60037251T2 (de) * 1999-07-02 2008-10-09 Matsushita Electric Industrial Co., Ltd., Kadoma Anordnung zur Herstellung von Löthöckern auf Halbleitersubstraten unter Generierung elektrischer Ladung, Methode und Anordnung zum Entfernen dieser Ladungen, und elektrische Ladung generierendes Halbleitersubstrat
JP3398631B2 (ja) * 1999-11-04 2003-04-21 沖電気工業株式会社 弾性表面波フィルタ用圧電体ウエハおよび弾性表面波フィルタの製造方法
JP3435639B2 (ja) * 2000-04-13 2003-08-11 株式会社村田製作所 弾性表面波装置の製造方法及び弾性表面波装置
WO2002060054A1 (fr) * 2001-01-25 2002-08-01 Kabushiki Kaisha Toshiba Procede de fabrication d'un dispositif a onde acoustique de surface et instrument de controle
CN1242554C (zh) 2002-07-31 2006-02-15 松下电器产业株式会社 声表面波元件的制造方法
US7389570B2 (en) * 2004-06-28 2008-06-24 Kyocera Corporation Surface acoustic wave device manufacturing method, surface acoustic wave device, and communications equipment
JP2006060565A (ja) * 2004-08-20 2006-03-02 Alps Electric Co Ltd Ｓａｗフィルタ、及びその製造方法
US7439648B2 (en) 2004-08-27 2008-10-21 Kyocera Corporation Surface acoustic wave device and manufacturing method therefor, and communications equipment
JP2006157823A (ja) * 2004-12-01 2006-06-15 Murata Mfg Co Ltd トランスバーサル型弾性表面波フィルタ素子
JP2006287881A (ja) * 2005-04-05 2006-10-19 Alps Electric Co Ltd 表面弾性波ディバイスの製造方法
US20070164633A1 (en) * 2006-01-13 2007-07-19 Honeywell International Inc. Quartz SAW sensor based on direct quartz bonding
JP2008135999A (ja) * 2006-11-28 2008-06-12 Fujitsu Media Device Kk 弾性波デバイスおよびその製造方法
KR101232242B1 (ko) * 2008-11-04 2013-02-12 가부시키가이샤 무라타 세이사쿠쇼 탄성파 필터장치 및 그것을 포함하는 모듈
CN107457078A (zh) * 2017-09-19 2017-12-12 东北师范大学 基于物联网的温度分布可调参差芒刺电极板

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54844A (en) * 1977-06-03 1979-01-06 Matsushita Electric Ind Co Ltd Elastic surface wave filter
US4223284A (en) * 1977-11-07 1980-09-16 Murata Manufacturing Co., Ltd. Acoustic surface wave device
CA1132211A (en) * 1978-02-23 1982-09-21 Martin Redwood Acoustic wave devices
JPS5715518A (en) * 1980-07-01 1982-01-26 Matsushita Electric Ind Co Ltd Elastic surface wave device
SU1015488A1 (ru) * 1980-09-05 1983-04-30 Предприятие П/Я А-7956 Фильтр на поверхностных акустических волнах
JPS5813009A (ja) * 1981-07-17 1983-01-25 Toshiba Corp 弾性表面波素子の製造方法及びその装置
JPS5831608A (ja) * 1981-08-19 1983-02-24 Toshiba Corp 弾性表面波素子の製造方法
JPS58154917A (ja) * 1982-03-10 1983-09-14 Hitachi Ltd 弾性表面波バンドパスフイルタ
JPS598420A (ja) * 1982-07-06 1984-01-17 Citizen Watch Co Ltd 弾性表面波素子及びその製造方法
US4492990A (en) * 1983-02-28 1985-01-08 Vertimag Systems Corporation Noise reduction system
JPS60105310A (ja) * 1983-11-14 1985-06-10 Oki Electric Ind Co Ltd 表面弾性波フイルタ
JPS6120409A (ja) * 1984-07-09 1986-01-29 Oki Electric Ind Co Ltd 表面弾性波素子の製造方法
JPS62501042A (ja) * 1984-09-03 1987-04-23 エプレヒト、ゲオルク 表面音響波デバイス用変換器
JPS6174409A (ja) * 1984-09-20 1986-04-16 Matsushita Electric Ind Co Ltd 弾性表面波装置
JPS62115A (ja) * 1985-02-25 1987-01-06 Oki Electric Ind Co Ltd 弾性表面波フイルタ
JPS63253712A (ja) * 1987-04-10 1988-10-20 Hitachi Ltd 弾性表面波バンドパスフイルタ
US5115160A (en) * 1989-08-28 1992-05-19 Gte Products Easily encodable surface acoustic wave (SAW) security devices

Also Published As

Publication number Publication date
EP0452105A2 (de) 1991-10-16
JPH03293808A (ja) 1991-12-25
DE69117321T2 (de) 1996-07-18
EP0452105A3 (en) 1991-12-04
KR910019322A (ko) 1991-11-30
US5325573A (en) 1994-07-05
US5243249A (en) 1993-09-07
KR950005177B1 (ko) 1995-05-19
CA2040046C (en) 1996-07-09
CA2040046A1 (en) 1991-10-12
EP0452105B1 (de) 1996-02-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee