DE69102294D1 - Verfahren zur Behandlung von Abgasen, die ClF3 enthalten. - Google Patents

Verfahren zur Behandlung von Abgasen, die ClF3 enthalten.

Info

Publication number
DE69102294D1
DE69102294D1 DE69102294T DE69102294T DE69102294D1 DE 69102294 D1 DE69102294 D1 DE 69102294D1 DE 69102294 T DE69102294 T DE 69102294T DE 69102294 T DE69102294 T DE 69102294T DE 69102294 D1 DE69102294 D1 DE 69102294D1
Authority
DE
Germany
Prior art keywords
treatment
exhaust gases
gases containing
clf3
containing clf3
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69102294T
Other languages
English (en)
Other versions
DE69102294T2 (de
Inventor
Yoichi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Research Co Ltd
Original Assignee
Ebara Corp
Ebara Research Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Ebara Research Co Ltd filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69102294D1 publication Critical patent/DE69102294D1/de
Publication of DE69102294T2 publication Critical patent/DE69102294T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
DE69102294T 1990-02-05 1991-01-30 Verfahren zur Behandlung von Abgasen, die ClF3 enthalten. Expired - Fee Related DE69102294T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2024470A JPH06177B2 (ja) 1990-02-05 1990-02-05 Ｃ１ｆ▲下３▼を含有する排ガスの処理方法

Publications (2)

Publication Number Publication Date
DE69102294D1 true DE69102294D1 (de) 1994-07-14
DE69102294T2 DE69102294T2 (de) 1995-01-19

Family

ID=12139055

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69102294T Expired - Fee Related DE69102294T2 (de) 1990-02-05 1991-01-30 Verfahren zur Behandlung von Abgasen, die ClF3 enthalten.

Country Status (5)

Country Link
US (1) US5094825A (de)
EP (1) EP0441236B1 (de)
JP (1) JPH06177B2 (de)
KR (1) KR0173468B1 (de)
DE (1) DE69102294T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW406028B (en) * 1994-05-26 2000-09-21 Toshiba Corp Process for treating acidic exhaust gas
DE69524326T2 (de) * 1994-09-14 2002-08-08 Toda Kogyo Corp Verfahren zur Verbrennung von brennbaren Abfällen und Chlorscavenger
JP3566995B2 (ja) * 1994-10-05 2004-09-15 日本パイオニクス株式会社 ハロゲンガスの精製方法
GB9626327D0 (en) * 1996-12-19 1997-02-05 British Nuclear Fuels Plc Improvements in and relating to the removal and re-use of chloride trifluoride
US6060034A (en) * 1998-06-02 2000-05-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for ClF3 containing exhaust gases
US6352676B1 (en) * 1999-02-16 2002-03-05 Air Products And Chemicals, Inc. Abatement of F2 using small particle fluidized bed
US6309618B1 (en) 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
JP4564242B2 (ja) * 2003-05-30 2010-10-20 株式会社荏原製作所 三フッ化塩素を含む無機ハロゲン化ガス含有排ガスの処理方法、処理剤及び処理装置
JP4459648B2 (ja) * 2004-02-17 2010-04-28 株式会社荏原製作所 フッ素含有化合物を含むガスの処理方法及び装置
TWI302476B (en) * 2005-07-06 2008-11-01 Ind Tech Res Inst Cleaning agent of treating acid gas and method for cleaning with the cleaning agent
JP2015112546A (ja) * 2013-12-12 2015-06-22 宇部興産株式会社 ガスの処理装置及びガスの処理カートリッジ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3469936A (en) * 1967-12-13 1969-09-30 Atomic Energy Commission Bromine pentafluoride disposal
DE2017531A1 (en) * 1970-04-13 1971-05-06 Steuler Industriewerke Gmbh Hydrogen fluoride absorption from effluent - gases with iron salt solutions
US4201751A (en) * 1975-05-06 1980-05-06 Heinz Gresch Gas purification
DD232030A1 (de) * 1983-03-22 1986-01-15 Radeberg Emailschmelze Verfahren zur endreinigung fluorhaltiger abgase
AT379323B (de) * 1983-10-07 1985-12-27 Voest Alpine Ag Verfahren zum abtrennen von schwefel oder schwefelverbindungen und anderen schadstoffen aus heissen gasen eines schmelzreduktionsreaktors
JPS6161619A (ja) * 1984-09-04 1986-03-29 Asahi Glass Co Ltd 排ガスの処理方法
CA1298959C (en) * 1985-09-28 1992-04-21 Kohzo Hakuta Method of refining rare gas halide excimer laser gas
JPS62152519A (ja) * 1985-12-26 1987-07-07 Iwatani & Co ハロゲン系廃ガスの乾式処理方法
JPH0741145B2 (ja) * 1986-11-28 1995-05-10 旭硝子株式会社 エッチング排ガス除害方法
JPS63151608A (ja) * 1986-12-16 1988-06-24 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
JPH01301534A (ja) * 1988-05-28 1989-12-05 Hoya Corp フッ化物ガラス中の酸化物および水酸基の除去方法
JPH01309074A (ja) * 1988-06-07 1989-12-13 Minolta Camera Co Ltd 現像剤組成物
JPH06212322A (ja) * 1993-01-13 1994-08-02 Mitsubishi Shindoh Co Ltd すぐれた熱間加工性を有する洋白

Also Published As

Publication number Publication date
JPH03229618A (ja) 1991-10-11
DE69102294T2 (de) 1995-01-19
EP0441236B1 (de) 1994-06-08
JPH06177B2 (ja) 1994-01-05
KR910015332A (ko) 1991-09-30
US5094825A (en) 1992-03-10
EP0441236A1 (de) 1991-08-14
KR0173468B1 (ko) 1999-02-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee