DE69031142T2 - Integrierte Hybridschaltungsanordnung - Google Patents

Integrierte Hybridschaltungsanordnung

Info

Publication number
DE69031142T2
DE69031142T2 DE69031142T DE69031142T DE69031142T2 DE 69031142 T2 DE69031142 T2 DE 69031142T2 DE 69031142 T DE69031142 T DE 69031142T DE 69031142 T DE69031142 T DE 69031142T DE 69031142 T2 DE69031142 T2 DE 69031142T2
Authority
DE
Germany
Prior art keywords
circuit arrangement
hybrid circuit
integrated hybrid
integrated
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69031142T
Other languages
English (en)
Other versions
DE69031142D1 (de
Inventor
Akira Kazami
Osamu Nakamoto
Hisashi Shimizu
Katsumi Ohkawa
Yasuhiro Koike
Koji Nagahama
Masao Kaneko
Masakazu Ueno
Yasuo Saitou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10078489A external-priority patent/JPH0680763B2/ja
Priority claimed from JP10078389A external-priority patent/JPH0758754B2/ja
Priority claimed from JP10078789A external-priority patent/JPH0680766B2/ja
Priority claimed from JP1119111A external-priority patent/JPH0680768B2/ja
Priority claimed from JP1119112A external-priority patent/JPH0680769B2/ja
Priority claimed from JP1120907A external-priority patent/JPH0680777B2/ja
Priority claimed from JP12090389A external-priority patent/JPH0680773B2/ja
Priority claimed from JP12090489A external-priority patent/JPH0680774B2/ja
Priority claimed from JP12090589A external-priority patent/JPH0680775B2/ja
Priority claimed from JP12090289A external-priority patent/JPH0680772B2/ja
Priority claimed from JP12390289A external-priority patent/JPH0680780B2/ja
Priority claimed from JP1127311A external-priority patent/JPH0680786B2/ja
Priority claimed from JP1127312A external-priority patent/JPH0680787B2/ja
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Application granted granted Critical
Publication of DE69031142D1 publication Critical patent/DE69031142D1/de
Publication of DE69031142T2 publication Critical patent/DE69031142T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H01L25/162—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits the devices being mounted on two or more different substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124—Aluminium (Al) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49171—Fan-out arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3025—Electromagnetic shielding
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/14—Structural association of two or more printed circuits
    • H05K1/141—One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
DE69031142T 1989-04-20 1990-04-19 Integrierte Hybridschaltungsanordnung Expired - Fee Related DE69031142T2 (de)

Applications Claiming Priority (13)

Application Number Priority Date Filing Date Title
JP10078489A JPH0680763B2 (ja) 1989-04-20 1989-04-20 混成集積回路装置
JP10078789A JPH0680766B2 (ja) 1989-04-20 1989-04-20 混成集積回路装置
JP10078389A JPH0758754B2 (ja) 1989-04-20 1989-04-20 混成集積回路装置
JP1119112A JPH0680769B2 (ja) 1989-05-12 1989-05-12 混成集積回路装置
JP1119111A JPH0680768B2 (ja) 1989-05-12 1989-05-12 混成集積回路装置
JP12090289A JPH0680772B2 (ja) 1989-05-15 1989-05-15 混成集積回路装置
JP1120907A JPH0680777B2 (ja) 1989-05-15 1989-05-15 混成集積回路装置
JP12090589A JPH0680775B2 (ja) 1989-05-15 1989-05-15 混成集積回路装置
JP12090389A JPH0680773B2 (ja) 1989-05-15 1989-05-15 混成集積回路装置
JP12090489A JPH0680774B2 (ja) 1989-05-15 1989-05-15 混成集積回路装置
JP12390289A JPH0680780B2 (ja) 1989-05-17 1989-05-17 混成集積回路装置
JP1127311A JPH0680786B2 (ja) 1989-05-19 1989-05-19 混成集積回路装置
JP1127312A JPH0680787B2 (ja) 1989-05-19 1989-05-19 混成集積回路装置

Publications (2)

Publication Number Publication Date
DE69031142D1 DE69031142D1 (de) 1997-09-04
DE69031142T2 true DE69031142T2 (de) 1997-12-18

Family

ID=27584284

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69031142T Expired - Fee Related DE69031142T2 (de) 1989-04-20 1990-04-19 Integrierte Hybridschaltungsanordnung

Country Status (3)

Country Link
US (1) US5159433A (de)
EP (1) EP0393671B1 (de)
DE (1) DE69031142T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5438216A (en) * 1992-08-31 1995-08-01 Motorola, Inc. Light erasable multichip module
EP0654866A3 (de) * 1993-11-23 1997-08-20 Motorola Inc Träger zur Verbindung eines Halbleiterwürfels und Herstellungsverfahren.
JPH07211856A (ja) * 1994-01-12 1995-08-11 Fujitsu Ltd 集積回路モジュール
US5644103A (en) * 1994-11-10 1997-07-01 Vlt Corporation Packaging electrical components having a scallop formed in an edge of a circuit board
WO1998019338A1 (fr) * 1996-10-30 1998-05-07 Hitachi Chemical Company, Ltd. Substrat porteur de microplaquette pour conditionnement de semi-conducteur, dispositif a semi-conducteur et leur procede de fabrication
KR100419428B1 (ko) * 1996-12-04 2004-06-12 삼성전자주식회사 고전력마이크로파하이브리드집적회로
US6392289B1 (en) 1999-04-15 2002-05-21 Micron Technology, Inc. Integrated circuit substrate having through hole markings to indicate defective/non-defective status of same
US6316737B1 (en) 1999-09-09 2001-11-13 Vlt Corporation Making a connection between a component and a circuit board
US7215022B2 (en) 2001-06-21 2007-05-08 Ati Technologies Inc. Multi-die module
US6763580B2 (en) * 2002-03-21 2004-07-20 Motorola, Inc. Method and apparatus for securing an electrically conductive interconnect through a metallic substrate
JP3632684B2 (ja) * 2002-08-26 2005-03-23 株式会社日立製作所 半導体素子及び半導体パッケージ
US7057928B2 (en) * 2003-07-08 2006-06-06 Hewlett-Packard Development Company, L.P. System and method for erasing high-density non-volatile fast memory
US20060107523A1 (en) * 2004-11-24 2006-05-25 Trw Inc. Method of making a printed circuit board
US8362368B2 (en) * 2009-04-27 2013-01-29 Ultrasource, Inc. Method and apparatus for an improved filled via
WO2015033700A1 (ja) * 2013-09-05 2015-03-12 シャープ株式会社 発光装置用基板、発光装置、および発光装置用基板の製造方法
US9793237B2 (en) 2015-10-19 2017-10-17 Qorvo Us, Inc. Hollow-cavity flip-chip package with reinforced interconnects and process for making the same
DE102015224422A1 (de) * 2015-12-07 2017-06-08 Robert Bosch Gmbh Elektronische Schaltungseinheit
US9799637B2 (en) * 2016-02-12 2017-10-24 Qorvo Us, Inc. Semiconductor package with lid having lid conductive structure

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58131756A (ja) * 1982-01-29 1983-08-05 Fujitsu Ltd Ｄｉｐ型ハイブリツドｉｃ
JPS59141258A (ja) * 1983-02-02 1984-08-13 Sanyo Electric Co Ltd 混成集積回路
JPS59228748A (ja) * 1983-06-09 1984-12-22 Toshiba Corp 混成集積回路装置
JPS6230367U (de) * 1985-08-07 1987-02-24
JPS6480032A (en) * 1987-09-21 1989-03-24 Hitachi Maxell Semiconductor device and manufacture thereof
JP2548602B2 (ja) * 1988-04-12 1996-10-30 株式会社日立製作所 半導体実装モジュール
JP2978511B2 (ja) * 1989-09-20 1999-11-15 株式会社日立製作所 集積回路素子実装構造体

Also Published As

Publication number Publication date
EP0393671A2 (de) 1990-10-24
US5159433A (en) 1992-10-27
DE69031142D1 (de) 1997-09-04
EP0393671A3 (de) 1991-02-06
EP0393671B1 (de) 1997-07-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee