DE69028270D1 - Belichtungssteuerung durch mehrere Strahlen - Google Patents

Belichtungssteuerung durch mehrere Strahlen

Info

Publication number
DE69028270D1
DE69028270D1 DE69028270T DE69028270T DE69028270D1 DE 69028270 D1 DE69028270 D1 DE 69028270D1 DE 69028270 T DE69028270 T DE 69028270T DE 69028270 T DE69028270 T DE 69028270T DE 69028270 D1 DE69028270 D1 DE 69028270D1
Authority
DE
Germany
Prior art keywords
exposure control
beam exposure
multiple beam
control
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69028270T
Other languages
English (en)
Other versions
DE69028270T2 (de
Inventor
Thomas D Macarthur
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE69028270D1 publication Critical patent/DE69028270D1/de
Publication of DE69028270T2 publication Critical patent/DE69028270T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/024Details of scanning heads ; Means for illuminating the original
    • H04N1/032Details of scanning heads ; Means for illuminating the original for picture information reproduction
    • H04N1/036Details of scanning heads ; Means for illuminating the original for picture information reproduction for optical reproduction

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Printer (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
DE69028270T 1989-10-13 1990-10-12 Belichtungssteuerung durch mehrere Strahlen Expired - Fee Related DE69028270T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/421,227 US5251058A (en) 1989-10-13 1989-10-13 Multiple beam exposure control

Publications (2)

Publication Number Publication Date
DE69028270D1 true DE69028270D1 (de) 1996-10-02
DE69028270T2 DE69028270T2 (de) 1997-02-20

Family

ID=23669694

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69028270T Expired - Fee Related DE69028270T2 (de) 1989-10-13 1990-10-12 Belichtungssteuerung durch mehrere Strahlen

Country Status (4)

Country Link
US (1) US5251058A (de)
EP (1) EP0422956B1 (de)
JP (1) JP2582182B2 (de)
DE (1) DE69028270T2 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5631771A (en) * 1991-09-19 1997-05-20 Lucent Technologies Inc. Optical isolator with polarization dispersion and differential transverse deflection correction
JPH05196890A (ja) * 1992-01-22 1993-08-06 Nec Corp 光アイソレータ
US5309178A (en) * 1992-05-12 1994-05-03 Optrotech Ltd. Laser marking apparatus including an acoustic modulator
GB2278927A (en) * 1993-06-12 1994-12-14 Central Research Lab Ltd Liquid crystal optical projector arrangement
US5694385A (en) * 1993-09-24 1997-12-02 Ricoh Comany, Ltd. Optical pickup apparatus
US5543825A (en) * 1993-11-17 1996-08-06 Xerox Corporation High efficiency multispot facet tracked raster output scanning system
BE1007876A4 (nl) * 1993-12-17 1995-11-07 Philips Electronics Nv Stralingsbron-eenheid voor het opwekken van een bundel met twee polarisatierichtingen en twee frequenties.
US5532859A (en) * 1994-01-10 1996-07-02 Xerox Corporation Electro-optical device for variable scan width
US5436755A (en) * 1994-01-10 1995-07-25 Xerox Corporation Dual-beam scanning electro-optical device from single-beam light source
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US6208774B1 (en) * 1999-06-16 2001-03-27 Agilent Technologies, Inc. Polarization independent light switching device based on liquid crystals
US6606197B2 (en) * 2000-03-28 2003-08-12 Corning Incorporated Dual grating filtering system
US6693743B2 (en) * 2000-06-07 2004-02-17 Cirvine Corporation Birefringent devices
US7173762B2 (en) * 2000-10-13 2007-02-06 Finisar Corporation Optical isolator with reduced insertion loss and minimized polarization mode dispersion
DE10058999A1 (de) 2000-11-28 2002-05-29 Heidelberger Druckmasch Ag Verfahren und Vorrichtung zur Modulation von unpolarisiertem Licht
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
DE10137155B4 (de) 2001-07-30 2006-11-30 Leica Microsystems Cms Gmbh Optische Anordnung und Scanmikroskop
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6922498B2 (en) * 2003-02-05 2005-07-26 Mvm Electronics, Inc. Fiber-optic matrix switch using phased array acousto-optic device
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
US7072113B2 (en) * 2003-10-07 2006-07-04 Rene Helbing Wavelength selective switching device and method for selectively transmitting optical signals based on wavelength
US7518779B2 (en) * 2007-04-06 2009-04-14 Harris Corporation Acousto-optic devices having extended temperature reliability
US8213816B2 (en) * 2009-08-27 2012-07-03 Xerox Corporation Method and system for banding compensation using electrostatic voltmeter based sensing
US8351079B2 (en) * 2009-09-08 2013-01-08 Xerox Corporation Banding profile estimation using spline interpolation
US8351080B2 (en) * 2009-09-08 2013-01-08 Xerox Corporation Least squares based coherent multipage analysis of printer banding for diagnostics and compensation
US8542410B2 (en) * 2009-09-08 2013-09-24 Xerox Corporation Least squares based exposure modulation for banding compensation
US10061068B1 (en) * 2016-03-03 2018-08-28 J.A. Woollam Co., Inc. Deviation angle self-compensating substantially achromatic retarder
US9921352B1 (en) * 2016-06-01 2018-03-20 J.A. Woollam Co., Inc. Biased fast axis retarder system

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3383460A (en) * 1965-08-25 1968-05-14 Rca Corp Light beam modulation and combination apparatus
US3495892A (en) * 1966-01-21 1970-02-17 Rca Corp Split beam light modulator
US3503670A (en) * 1967-01-16 1970-03-31 Ibm Multifrequency light processor and digital deflector
GB1192491A (en) * 1968-03-15 1970-05-20 Mullard Ltd Apparatus for Treating a Light Beam
US3684350A (en) * 1970-08-17 1972-08-15 Westinghouse Electric Corp Light beam polarization modulator
DE2102027C2 (de) * 1971-01-16 1982-12-30 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur optischen Erkennung der Lage von Grenzlinien und Einrichtungen zur Durchfühung des Verfahrens
GB1409711A (en) * 1971-06-08 1975-10-15 Redifon Ltd Optical systems
JPS5933884B2 (ja) * 1977-03-04 1984-08-18 日本電気株式会社 光等化回路
JPS60646B2 (ja) * 1977-03-04 1985-01-09 日本電気株式会社 光位相変調器
JPS55142307A (en) * 1979-04-24 1980-11-06 Matsushita Electric Ind Co Ltd Optical axis position correcting device
SU972461A1 (ru) * 1980-07-25 1982-11-07 Предприятие П/Я Г-4126 Способ управлени пол ризацией оптического излучени
JPS5766416A (en) * 1980-10-09 1982-04-22 Ricoh Co Ltd Photoscanning system using linear polarizing laser
US4439014A (en) * 1981-11-13 1984-03-27 Mcdonnell Douglas Corporation Low voltage electro-optic modulator
US4474435A (en) * 1981-12-07 1984-10-02 Gte Laboratories Incorporated Polarization-insensitive optical switch and multiplexing apparatus
JPS5974755A (ja) * 1982-10-20 1984-04-27 Fujitsu Ltd デ−タ回線試験方式
JPS6115119A (ja) * 1984-07-02 1986-01-23 Yokogawa Hokushin Electric Corp レ−ザプリンタ
JPS61169821A (ja) * 1985-01-22 1986-07-31 Hoya Corp 直交偏波型光周波数シフタ
EP0211596A3 (de) * 1985-08-07 1988-08-31 STREET, Graham Stewart Brandon Vorrichtung zur Wiedergabe von hochauflösenden Bildern
JPH0682172B2 (ja) * 1985-11-20 1994-10-19 株式会社リコー 2ビ−ム走査方式における光源装置
US4686542A (en) * 1986-04-03 1987-08-11 Xerox Corporation High speed, high resolution raster output scanner
US4733252A (en) * 1987-03-30 1988-03-22 Xerox Corporation Beam splitter for multibeam A/O modulators and printer systems
JPS63311325A (ja) * 1987-06-15 1988-12-20 Nikon Corp 偏光分離合成装置
EP0299455A3 (de) * 1987-07-17 1991-03-27 Dainippon Screen Mfg. Co., Ltd. Laserbelichtungsverfahren und -Gerät für ein Bildabtast-/Bildaufzeichnungsgerät
JPH01237615A (ja) * 1988-03-18 1989-09-22 Dainippon Screen Mfg Co Ltd 画像走査記録装置のレーザ露光方法
JPS6470723A (en) * 1987-09-10 1989-03-16 Fujitsu Ltd Optical switch

Also Published As

Publication number Publication date
US5251058A (en) 1993-10-05
JPH03139672A (ja) 1991-06-13
EP0422956A3 (en) 1992-05-27
EP0422956B1 (de) 1996-08-28
DE69028270T2 (de) 1997-02-20
EP0422956A2 (de) 1991-04-17
JP2582182B2 (ja) 1997-02-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee