DE69028248T2 - Elektronenstrahl-Belichtungsgerät - Google Patents

Elektronenstrahl-Belichtungsgerät

Info

Publication number
DE69028248T2
DE69028248T2 DE69028248T DE69028248T DE69028248T2 DE 69028248 T2 DE69028248 T2 DE 69028248T2 DE 69028248 T DE69028248 T DE 69028248T DE 69028248 T DE69028248 T DE 69028248T DE 69028248 T2 DE69028248 T2 DE 69028248T2
Authority
DE
Germany
Prior art keywords
electron beam
exposure device
beam exposure
electron
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69028248T
Other languages
English (en)
Other versions
DE69028248D1 (de
Inventor
Nobuyuki Yasutake
Akio Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE69028248D1 publication Critical patent/DE69028248D1/de
Publication of DE69028248T2 publication Critical patent/DE69028248T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143—Electron beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69028248T 1989-06-07 1990-06-07 Elektronenstrahl-Belichtungsgerät Expired - Fee Related DE69028248T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1144415A JPH039510A (ja) 1989-06-07 1989-06-07 電子ビーム露光装置

Publications (2)

Publication Number Publication Date
DE69028248D1 DE69028248D1 (de) 1996-10-02
DE69028248T2 true DE69028248T2 (de) 1997-01-30

Family

ID=15361642

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69028248T Expired - Fee Related DE69028248T2 (de) 1989-06-07 1990-06-07 Elektronenstrahl-Belichtungsgerät

Country Status (4)

Country Link
US (1) US5368613A (de)
EP (1) EP0402125B1 (de)
JP (1) JPH039510A (de)
DE (1) DE69028248T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5546319A (en) * 1994-01-28 1996-08-13 Fujitsu Limited Method of and system for charged particle beam exposure
US5689117A (en) * 1994-11-22 1997-11-18 Nikon Corporation Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus
JPH09260243A (ja) * 1996-03-19 1997-10-03 Fujitsu Ltd 荷電粒子ビーム露光方法及び装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3911321A (en) * 1971-11-26 1975-10-07 Ibm Error compensating deflection coils in a conducting magnetic tube
US4117339A (en) * 1977-07-01 1978-09-26 Burroughs Corporation Double deflection electron beam generator for employment in the fabrication of semiconductor and other devices
JPS5463681A (en) * 1977-10-29 1979-05-22 Nippon Aviotronics Kk Electron beam exposure device
US4376249A (en) * 1980-11-06 1983-03-08 International Business Machines Corporation Variable axis electron beam projection system
JPS57112017A (en) * 1980-12-29 1982-07-12 Fujitsu Ltd Exposing device for electron beam
US4395691A (en) * 1982-03-04 1983-07-26 Hughes Aircraft Company Beam deflection system
JPS60231324A (ja) * 1984-04-28 1985-11-16 Fujitsu Ltd 電子ビ−ム露光装置
US4692579A (en) * 1984-05-18 1987-09-08 Hitachi, Ltd. Electron beam lithography apparatus
US4945246A (en) * 1989-03-24 1990-07-31 International Business Machines Corporation Tri-deflection electron beam system

Also Published As

Publication number Publication date
EP0402125A3 (de) 1991-08-07
US5368613A (en) 1994-11-29
EP0402125A2 (de) 1990-12-12
DE69028248D1 (de) 1996-10-02
JPH039510A (ja) 1991-01-17
EP0402125B1 (de) 1996-08-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee