DE69026541D1 - Verfahren und Vorrichtung zur Analyse fester Proben - Google Patents
Verfahren und Vorrichtung zur Analyse fester ProbenInfo
- Publication number
- DE69026541D1 DE69026541D1 DE69026541T DE69026541T DE69026541D1 DE 69026541 D1 DE69026541 D1 DE 69026541D1 DE 69026541 T DE69026541 T DE 69026541T DE 69026541 T DE69026541 T DE 69026541T DE 69026541 D1 DE69026541 D1 DE 69026541D1
- Authority
- DE
- Germany
- Prior art keywords
- solid samples
- analyzing solid
- analyzing
- samples
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
Landscapes
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/359,157 US5006706A (en) | 1989-05-31 | 1989-05-31 | Analytical method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69026541D1 true DE69026541D1 (de) | 1996-05-23 |
DE69026541T2 DE69026541T2 (de) | 1996-09-12 |
Family
ID=23412568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69026541T Expired - Fee Related DE69026541T2 (de) | 1989-05-31 | 1990-05-30 | Verfahren und Vorrichtung zur Analyse fester Proben |
Country Status (4)
Country | Link |
---|---|
US (1) | US5006706A (de) |
EP (1) | EP0407030B1 (de) |
JP (1) | JPH07113608B2 (de) |
DE (1) | DE69026541T2 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5086226A (en) * | 1989-05-31 | 1992-02-04 | Clemson University | Device for radio frequency powered glow discharge spectrometry with external sample mount geometry |
US5081352A (en) * | 1991-02-14 | 1992-01-14 | Gte Laboratories Incorporated | Technique for the analysis of insulating materials by glow discharge mass spectrometry |
US5325021A (en) * | 1992-04-09 | 1994-06-28 | Clemson University | Radio-frequency powered glow discharge device and method with high voltage interface |
US5408315A (en) * | 1993-07-28 | 1995-04-18 | Leco Corporation | Glow discharge analytical instrument for performing excitation and analyzation on the same side of a sample |
WO2000055600A2 (en) * | 1999-02-25 | 2000-09-21 | Clemson University | Sampling and analysis of airborne particulate matter by glow discharge atomic emission and mass spectrometries |
US7449682B2 (en) * | 2001-10-26 | 2008-11-11 | Revera Incorporated | System and method for depth profiling and characterization of thin films |
DE102005003806B3 (de) * | 2005-01-26 | 2006-07-20 | Thermo Electron (Bremen) Gmbh | Glimmentladungsquelle |
US7482580B2 (en) * | 2005-10-20 | 2009-01-27 | Agilent Technologies, Inc. | Dynamic adjustment of ion monitoring periods |
JP5410780B2 (ja) * | 2009-02-18 | 2014-02-05 | 富士フイルム株式会社 | 成膜方法、成膜装置、圧電体膜、圧電素子、及び液体吐出装置 |
US9536725B2 (en) | 2013-02-05 | 2017-01-03 | Clemson University | Means of introducing an analyte into liquid sampling atmospheric pressure glow discharge |
WO2017038476A1 (ja) * | 2015-08-28 | 2017-03-09 | 日本碍子株式会社 | 原子線源 |
US10049864B2 (en) * | 2017-01-12 | 2018-08-14 | Upendra D Desai | Metallic glow discharge diode and triode devices with large cold cathode as efficient charger generator—a power cell |
JP6765328B2 (ja) | 2017-03-15 | 2020-10-07 | 株式会社堀場製作所 | 作成方法、グロー放電発光分析方法、器具、及びグロー放電発光分析装置 |
US20240024840A1 (en) * | 2020-09-18 | 2024-01-25 | Haydale Graphene Industries Plc | Methods and Apparatus for Delivering Feedstocks for Plasma Treatment |
GB2598936B (en) * | 2020-09-18 | 2023-10-18 | Haydale Graphene Ind Plc | Method and apparatus for plasma processing |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2341204A1 (de) * | 1972-08-18 | 1974-02-28 | Commw Scient Ind Res Org | Vorrichtung zur durchfuehrung von spektralanalysen |
US3860507A (en) * | 1972-11-29 | 1975-01-14 | Rca Corp | Rf sputtering apparatus and method |
US3915764A (en) * | 1973-05-18 | 1975-10-28 | Westinghouse Electric Corp | Sputtering method for growth of thin uniform layers of epitaxial semiconductive materials doped with impurities |
US3944826A (en) * | 1973-07-19 | 1976-03-16 | Applied Research Laboratories Limited | Methods and apparatus for analyzing mixtures |
WO1979000413A1 (en) * | 1977-12-20 | 1979-07-12 | A Chan | Electric arc apparatus and method for treating a flow of material by an electric arc |
US4166952A (en) * | 1978-02-24 | 1979-09-04 | E. I. Du Pont De Nemours And Company | Method and apparatus for the elemental analysis of solids |
US4262631A (en) * | 1979-10-01 | 1981-04-21 | Kubacki Ronald M | Thin film deposition apparatus using an RF glow discharge |
JPS6011417B2 (ja) * | 1979-10-23 | 1985-03-26 | 株式会社東芝 | ホロ−カソ−ド放電装置 |
US4363828A (en) * | 1979-12-12 | 1982-12-14 | International Business Machines Corp. | Method for depositing silicon films and related materials by a glow discharge in a disiland or higher order silane gas |
US4760820A (en) * | 1983-07-20 | 1988-08-02 | Luigi Tozzi | Plasma jet ignition apparatus |
JPS60202649A (ja) * | 1984-03-26 | 1985-10-14 | Seiko Instr & Electronics Ltd | 二重格子陽極電子衝撃型イオン源 |
JPS61114448A (ja) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | プラズマx線発生装置 |
US4812040A (en) * | 1985-04-19 | 1989-03-14 | The University Of Virginia Alumni Patents Foundation | Hollow cathode plasma plume |
DE3538407A1 (de) * | 1985-10-29 | 1987-04-30 | Spectrospin Ag | Ionen-zyklotron-resonanz-spektrometer |
GB8602463D0 (en) * | 1986-01-31 | 1986-03-05 | Vg Instr Group | Mass spectrometer |
US4693805A (en) * | 1986-02-14 | 1987-09-15 | Boe Limited | Method and apparatus for sputtering a dielectric target or for reactive sputtering |
WO1987006341A1 (en) * | 1986-04-16 | 1987-10-22 | Chamber Ridge Pty. Ltd. | Systems for the direct analysis of solid samples by atomic emission spectroscopy |
US4692630A (en) * | 1986-05-27 | 1987-09-08 | Inficon Leybold-Heraeus | Wavelength specific detection system for measuring the partial pressure of a gas excited by an electron beam |
GB8614177D0 (en) * | 1986-06-11 | 1986-07-16 | Vg Instr Group | Glow discharge mass spectrometer |
FR2602911B1 (fr) * | 1986-08-05 | 1991-06-28 | Letyrant Claude | Dispositif de deplacement d'echantillons dans une enceinte a atmosphere controlee |
US4849628A (en) * | 1987-05-29 | 1989-07-18 | Martin Marietta Energy Systems, Inc. | Atmospheric sampling glow discharge ionization source |
FR2616545B1 (fr) * | 1987-06-09 | 1990-05-11 | Renault | Procede et dispositif d'analyse de surfaces non conductrices |
-
1989
- 1989-05-31 US US07/359,157 patent/US5006706A/en not_active Expired - Lifetime
-
1990
- 1990-05-30 EP EP90305853A patent/EP0407030B1/de not_active Expired - Lifetime
- 1990-05-30 DE DE69026541T patent/DE69026541T2/de not_active Expired - Fee Related
- 1990-05-31 JP JP2140133A patent/JPH07113608B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69026541T2 (de) | 1996-09-12 |
JPH07113608B2 (ja) | 1995-12-06 |
EP0407030B1 (de) | 1996-04-17 |
EP0407030A1 (de) | 1991-01-09 |
JPH03214044A (ja) | 1991-09-19 |
US5006706A (en) | 1991-04-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |