GB2598936B - Method and apparatus for plasma processing - Google Patents

Method and apparatus for plasma processing Download PDF

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Publication number
GB2598936B
GB2598936B GB2014779.9A GB202014779A GB2598936B GB 2598936 B GB2598936 B GB 2598936B GB 202014779 A GB202014779 A GB 202014779A GB 2598936 B GB2598936 B GB 2598936B
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GB
United Kingdom
Prior art keywords
plasma processing
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2014779.9A
Other versions
GB202014779D0 (en
GB2598936A (en
Inventor
Seymour John-Mark
Howe Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Haydale Graphene Industries PLC
Original Assignee
Haydale Graphene Industries PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Haydale Graphene Industries PLC filed Critical Haydale Graphene Industries PLC
Priority to GB2014779.9A priority Critical patent/GB2598936B/en
Publication of GB202014779D0 publication Critical patent/GB202014779D0/en
Priority to US18/027,082 priority patent/US20240024840A1/en
Priority to EP21773102.5A priority patent/EP4213982A1/en
Priority to CN202180062764.1A priority patent/CN116133743A/en
Priority to PCT/EP2021/074727 priority patent/WO2022058218A1/en
Priority to EP21782660.1A priority patent/EP4213984A1/en
Priority to JP2023517957A priority patent/JP2023542903A/en
Priority to PCT/EP2021/075697 priority patent/WO2022058546A1/en
Priority to CN202180062404.1A priority patent/CN116113491A/en
Priority to CN202180062428.7A priority patent/CN116133742A/en
Priority to KR1020237012224A priority patent/KR20230069960A/en
Priority to PCT/EP2021/075691 priority patent/WO2022058542A1/en
Priority to EP21777791.1A priority patent/EP4213983A1/en
Priority to US18/027,084 priority patent/US20240024841A1/en
Priority to US18/027,079 priority patent/US20230330619A1/en
Publication of GB2598936A publication Critical patent/GB2598936A/en
Application granted granted Critical
Publication of GB2598936B publication Critical patent/GB2598936B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32036—AC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32045—Circuits specially adapted for controlling the glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32403—Treating multiple sides of workpieces, e.g. 3D workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32944—Arc detection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/28—Moving reactors, e.g. rotary drums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
    • B01J2219/00076—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements inside the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0801—Controlling the process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0815—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes involving stationary electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0816—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes involving moving electrodes
    • B01J2219/0818—Rotating electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0845—Details relating to the type of discharge
    • B01J2219/0847—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0871—Heating or cooling of the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0879—Solid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
GB2014779.9A 2020-09-18 2020-09-18 Method and apparatus for plasma processing Active GB2598936B (en)

Priority Applications (15)

Application Number Priority Date Filing Date Title
GB2014779.9A GB2598936B (en) 2020-09-18 2020-09-18 Method and apparatus for plasma processing
US18/027,082 US20240024840A1 (en) 2020-09-18 2021-09-08 Methods and Apparatus for Delivering Feedstocks for Plasma Treatment
EP21773102.5A EP4213982A1 (en) 2020-09-18 2021-09-08 Methods and apparatus for delivering feedstocks for plasma treatment
CN202180062764.1A CN116133743A (en) 2020-09-18 2021-09-08 Method and apparatus for delivering plasma-treated feedstock
PCT/EP2021/074727 WO2022058218A1 (en) 2020-09-18 2021-09-08 Methods and apparatus for delivering feedstocks for plasma treatment
CN202180062404.1A CN116113491A (en) 2020-09-18 2021-09-17 Method and apparatus for plasma processing
EP21777791.1A EP4213983A1 (en) 2020-09-18 2021-09-17 Method and apparatus for plasma processing
PCT/EP2021/075697 WO2022058546A1 (en) 2020-09-18 2021-09-17 Method and apparatus for plasma processing
EP21782660.1A EP4213984A1 (en) 2020-09-18 2021-09-17 Method and apparatus for plasma processing
CN202180062428.7A CN116133742A (en) 2020-09-18 2021-09-17 Method and apparatus for plasma processing
KR1020237012224A KR20230069960A (en) 2020-09-18 2021-09-17 Plasma treatment method and apparatus
PCT/EP2021/075691 WO2022058542A1 (en) 2020-09-18 2021-09-17 Method and apparatus for plasma processing
JP2023517957A JP2023542903A (en) 2020-09-18 2021-09-17 Method and apparatus for plasma treatment
US18/027,084 US20240024841A1 (en) 2020-09-18 2021-09-17 Method and Apparatus for Plasma Processing
US18/027,079 US20230330619A1 (en) 2020-09-18 2021-09-17 Methods and Apparatus for Plasma Processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2014779.9A GB2598936B (en) 2020-09-18 2020-09-18 Method and apparatus for plasma processing

Publications (3)

Publication Number Publication Date
GB202014779D0 GB202014779D0 (en) 2020-11-04
GB2598936A GB2598936A (en) 2022-03-23
GB2598936B true GB2598936B (en) 2023-10-18

Family

ID=73196663

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2014779.9A Active GB2598936B (en) 2020-09-18 2020-09-18 Method and apparatus for plasma processing

Country Status (1)

Country Link
GB (1) GB2598936B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5006706A (en) * 1989-05-31 1991-04-09 Clemson University Analytical method and apparatus
ES2367914T3 (en) * 2000-10-02 2011-11-10 Ethicon, Inc. ENERGY SYSTEM FOR STERILIZATION SYSTEMS THAT USE LOW FREQUENCY PLASMA.
EP2905096A2 (en) * 2014-04-07 2015-08-12 Thierry Präzisionslackiertechnik GmbH Surface energy modified particles, method of making, and apparatus therefor
US20160312362A1 (en) * 2013-12-26 2016-10-27 Sumitomo Chemical Company, Limited Laminated film and flexible electronic device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2754948T3 (en) 2009-06-09 2020-04-21 Haydale Graphene Ind Plc Procedures and apparatus for plasma particle processing
CN103476878B (en) 2010-12-08 2015-09-16 黑达乐格瑞菲工业有限公司 Particulate material, the preparation comprising the matrix material of particulate material and application thereof
GB201405973D0 (en) 2014-04-02 2014-05-14 Haydale Graphene Ind Plc Method of characterising surface chemistry

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5006706A (en) * 1989-05-31 1991-04-09 Clemson University Analytical method and apparatus
ES2367914T3 (en) * 2000-10-02 2011-11-10 Ethicon, Inc. ENERGY SYSTEM FOR STERILIZATION SYSTEMS THAT USE LOW FREQUENCY PLASMA.
US20160312362A1 (en) * 2013-12-26 2016-10-27 Sumitomo Chemical Company, Limited Laminated film and flexible electronic device
EP2905096A2 (en) * 2014-04-07 2015-08-12 Thierry Präzisionslackiertechnik GmbH Surface energy modified particles, method of making, and apparatus therefor

Also Published As

Publication number Publication date
GB202014779D0 (en) 2020-11-04
GB2598936A (en) 2022-03-23

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