DE69024935T2 - Herstellungsverfahren für ein mikroventil - Google Patents

Herstellungsverfahren für ein mikroventil

Info

Publication number
DE69024935T2
DE69024935T2 DE69024935T DE69024935T DE69024935T2 DE 69024935 T2 DE69024935 T2 DE 69024935T2 DE 69024935 T DE69024935 T DE 69024935T DE 69024935 T DE69024935 T DE 69024935T DE 69024935 T2 DE69024935 T2 DE 69024935T2
Authority
DE
Germany
Prior art keywords
microvalve
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69024935T
Other languages
English (en)
Other versions
DE69024935D1 (de
Inventor
Michael Mettner
Martin A Schmidt
Theresa Lober
Michael A Huff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Massachusetts Institute of Technology
Original Assignee
Robert Bosch GmbH
Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH, Massachusetts Institute of Technology filed Critical Robert Bosch GmbH
Priority to DE69024935T priority Critical patent/DE69024935T2/de
Publication of DE69024935D1 publication Critical patent/DE69024935D1/de
Application granted granted Critical
Publication of DE69024935T2 publication Critical patent/DE69024935T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/009—Fluid power devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0096—Fuel injection devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49412—Valve or choke making with assembly, disassembly or composite article making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49412—Valve or choke making with assembly, disassembly or composite article making
    • Y10T29/49416—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting
    • Y10T29/49419—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting including machining or drilling

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Fluid-Driven Valves (AREA)
  • Check Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
DE69024935T 1989-08-11 1990-08-08 Herstellungsverfahren für ein mikroventil Expired - Fee Related DE69024935T2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE69024935T DE69024935T2 (de) 1989-08-11 1990-08-08 Herstellungsverfahren für ein mikroventil

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3926647A DE3926647A1 (de) 1989-08-11 1989-08-11 Verfahren zur herstellung eines mikroventils
PCT/EP1990/001297 WO1991002169A1 (en) 1989-08-11 1990-08-08 Method of making a microvalve
DE69024935T DE69024935T2 (de) 1989-08-11 1990-08-08 Herstellungsverfahren für ein mikroventil

Publications (2)

Publication Number Publication Date
DE69024935D1 DE69024935D1 (de) 1996-02-29
DE69024935T2 true DE69024935T2 (de) 1996-06-05

Family

ID=6386990

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3926647A Withdrawn DE3926647A1 (de) 1989-08-11 1989-08-11 Verfahren zur herstellung eines mikroventils
DE69024935T Expired - Fee Related DE69024935T2 (de) 1989-08-11 1990-08-08 Herstellungsverfahren für ein mikroventil

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3926647A Withdrawn DE3926647A1 (de) 1989-08-11 1989-08-11 Verfahren zur herstellung eines mikroventils

Country Status (6)

Country Link
US (1) US5142781A (de)
EP (1) EP0438570B1 (de)
JP (1) JPH04501303A (de)
KR (1) KR920701699A (de)
DE (2) DE3926647A1 (de)
WO (1) WO1991002169A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10260544A1 (de) * 2002-12-21 2004-07-15 Festo Ag & Co Mehrschichtiges Mikroventil und Verfahren zu seiner Herstellung

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4012071A1 (de) * 1990-04-14 1991-10-17 Bosch Gmbh Robert Verfahren zur herstellung mikromechanischer strukturen
DE4119955C2 (de) * 1991-06-18 2000-05-31 Danfoss As Miniatur-Betätigungselement
US5164558A (en) * 1991-07-05 1992-11-17 Massachusetts Institute Of Technology Micromachined threshold pressure switch and method of manufacture
DE4132232A1 (de) * 1991-09-27 1993-04-01 Bosch Gmbh Robert Verfahren zur herstellung kapazitiver sensoren und kapazitiver sensor
DE4134291A1 (de) * 1991-10-17 1993-04-22 Bosch Gmbh Robert Verfahren zur exakten ausrichtung von masken zum anisotropen aetzen von dreidimensionalen strukturen aus siliziumwafern
DE4221089A1 (de) * 1992-06-26 1994-01-05 Bosch Gmbh Robert Mikroventil
DE4235757A1 (de) * 1992-10-23 1994-04-28 Licentia Gmbh Strahlungsdetektor
ATE156895T1 (de) * 1993-05-27 1997-08-15 Fraunhofer Ges Forschung Mikroventil
WO1995009989A1 (en) * 1993-10-04 1995-04-13 Research International, Inc. Micromachined flow switches
US6230501B1 (en) 1994-04-14 2001-05-15 Promxd Technology, Inc. Ergonomic systems and methods providing intelligent adaptive surfaces and temperature control
US5611214A (en) * 1994-07-29 1997-03-18 Battelle Memorial Institute Microcomponent sheet architecture
US6084257A (en) * 1995-05-24 2000-07-04 Lucas Novasensor Single crystal silicon sensor with high aspect ratio and curvilinear structures
US6316796B1 (en) 1995-05-24 2001-11-13 Lucas Novasensor Single crystal silicon sensor with high aspect ratio and curvilinear structures
US5899218A (en) * 1995-06-28 1999-05-04 Basf Corporation Plate-type valve and method of use
DE19526897A1 (de) * 1995-07-22 1997-01-23 Bosch Gmbh Robert Mikroventil mit verbundenen Schichten und Verfahren zur Herstellung eines Mikroventils
DE19637928C2 (de) * 1996-02-10 1999-01-14 Fraunhofer Ges Forschung Bistabile Membran-Aktivierungseinrichtung und Membran
DE69733125T2 (de) 1996-02-10 2006-03-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bistabiler microantrieb mit gekoppelten membranen
US6533366B1 (en) 1996-05-29 2003-03-18 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
US6019437A (en) * 1996-05-29 2000-02-01 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
DE19816283A1 (de) * 1998-04-11 1999-10-14 Festo Ag & Co Mengenverstärkereinrichtung für Fluidströme
JPH11336644A (ja) * 1998-05-22 1999-12-07 Zexel:Kk 流体噴射弁
US6523560B1 (en) * 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
US7011378B2 (en) 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
JP4831446B2 (ja) 1998-09-03 2011-12-07 ゼネラル・エレクトリック・カンパニイ マイクロバルブ装置
DE19850041A1 (de) * 1998-10-30 2000-05-04 Festo Ag & Co Mikrotechnologisches Bondverfahren und zugehörige Vorrichtung
US6540203B1 (en) 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US6694998B1 (en) 2000-03-22 2004-02-24 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US6845962B1 (en) 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US6494804B1 (en) 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US6505811B1 (en) 2000-06-27 2003-01-14 Kelsey-Hayes Company High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate
US6581640B1 (en) 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
SG94753A1 (en) * 2001-02-06 2003-03-18 Inst Of High Performance Compu Microvalve devices
FR2856046B1 (fr) * 2003-06-16 2005-07-29 Biomerieux Sa Microvanne fluidique a ouverture par commande electrique
CA2546585A1 (en) * 2003-11-24 2005-06-09 Alumina Micro Llc Microvalve device suitable for controlling a variable displacement compressor
US8011388B2 (en) * 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
US20070251586A1 (en) * 2003-11-24 2007-11-01 Fuller Edward N Electro-pneumatic control valve with microvalve pilot
JP4572534B2 (ja) * 2003-12-18 2010-11-04 パナソニック電工株式会社 静電駆動型半導体マイクロバルブ
US20050172717A1 (en) * 2004-02-06 2005-08-11 General Electric Company Micromechanical device with thinned cantilever structure and related methods
KR20070012375A (ko) * 2004-02-27 2007-01-25 알루미나 마이크로 엘엘씨 하이브리드 마이크로/매크로 평판 밸브
KR20060128042A (ko) * 2004-03-05 2006-12-13 알루미나 마이크로 엘엘씨 선택식 마이크로밸브 형성 접합방법
DE102004018250A1 (de) * 2004-04-15 2005-11-03 Infineon Technologies Ag Wafer-Stabilisierungsvorrichtung und Verfahren zu dessen Herstellung
US7156365B2 (en) * 2004-07-27 2007-01-02 Kelsey-Hayes Company Method of controlling microvalve actuator
KR20070092328A (ko) * 2005-01-14 2007-09-12 알루미나 마이크로 엘엘씨 가변용량형 압축기를 제어하기 위한 시스템 및 방법
US20070056165A1 (en) * 2005-01-26 2007-03-15 Honeywell International, Inc. Solid-free-form fabrication of hot gas valves
JP4529814B2 (ja) * 2005-06-23 2010-08-25 パナソニック電工株式会社 マイクロバルブ
DE102006040343A1 (de) * 2006-08-29 2008-03-06 Robert Bosch Gmbh Verfahren zur Herstellung von Bauteilen zur Steuerung eines Fluidflusses sowie Bauteile, hergestellt nach diesem Verfahren
DE112007003035T5 (de) * 2006-12-15 2009-11-05 Microstaq, Inc., Austin Mikroventilvorrichtung
CN101675280B (zh) 2007-03-30 2013-05-15 盾安美斯泰克公司(美国) 先导式微型滑阀
CN101668973B (zh) 2007-03-31 2013-03-13 盾安美斯泰克公司(美国) 先导式滑阀
WO2010019329A2 (en) 2008-08-09 2010-02-18 Microstaq, Inc. Improved microvalve device
US8113482B2 (en) 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
US8540207B2 (en) 2008-12-06 2013-09-24 Dunan Microstaq, Inc. Fluid flow control assembly
WO2010117874A2 (en) 2009-04-05 2010-10-14 Microstaq, Inc. Method and structure for optimizing heat exchanger performance
US20100276920A1 (en) * 2009-04-29 2010-11-04 Clark Woodman Identification card having one or more gripping elements
WO2011022267A2 (en) 2009-08-17 2011-02-24 Microstaq, Inc. Micromachined device and control method
TWI435196B (zh) * 2009-10-15 2014-04-21 Pivotal Systems Corp 氣體流量控制方法及裝置
US9006844B2 (en) 2010-01-28 2015-04-14 Dunan Microstaq, Inc. Process and structure for high temperature selective fusion bonding
US8956884B2 (en) 2010-01-28 2015-02-17 Dunan Microstaq, Inc. Process for reconditioning semiconductor surface to facilitate bonding
DE102010032799B4 (de) * 2010-04-09 2013-11-21 Albert-Ludwigs-Universität Freiburg Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe
US8996141B1 (en) 2010-08-26 2015-03-31 Dunan Microstaq, Inc. Adaptive predictive functional controller
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
DE102011109944B4 (de) * 2011-08-10 2018-10-25 Bürkert Werke GmbH Fertigungsverfahren für Mikroventile
US8925793B2 (en) 2012-01-05 2015-01-06 Dunan Microstaq, Inc. Method for making a solder joint
US9140613B2 (en) 2012-03-16 2015-09-22 Zhejiang Dunan Hetian Metal Co., Ltd. Superheat sensor
CN104487748B (zh) * 2012-08-09 2017-04-05 浙江盾安人工环境股份有限公司 微阀装置及控制流体流动的方法
NL2011669C2 (en) * 2013-10-24 2015-04-29 Berkin Bv Fluid flow device, comprising a valve member and a valve seat defining a fluid flow surface area, as well as method of manufacturing the same.
US9188375B2 (en) 2013-12-04 2015-11-17 Zhejiang Dunan Hetian Metal Co., Ltd. Control element and check valve assembly
CA2975182A1 (en) 2015-02-04 2016-08-11 The Charles Stark Draper Laboratory, Inc. Actuated valve or pump for microfluidic devices
EP3320408A1 (de) 2015-07-10 2018-05-16 Pivotal Systems Corporation Verfahren und vorrichtung für gasflusssteuerung
EP3523036A1 (de) * 2016-10-07 2019-08-14 Boehringer Ingelheim Vetmedica GmbH Analysevorrichtung und verfahren zum testen einer probe
CN109185554B (zh) * 2018-09-30 2019-10-18 浙江大学 一种音圈驱动的微型柔性阀
US11084031B1 (en) 2019-02-19 2021-08-10 Facebook Technologies, Llc Methods of fabricating microfluidic valves and systems

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE79266C (de) * fabrik technischer Apparate heinrich Stockheim, Mannheim Apparat zum Kochen bezw. Kühlen von Würze oder dergl. und zum Extrahiren von Hopfen oder dergl
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
JPS59110967A (ja) * 1982-12-16 1984-06-27 Nec Corp 弁素子の製造方法
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
JPS60222672A (ja) * 1984-04-18 1985-11-07 Nec Corp 弁素子
US4824073A (en) * 1986-09-24 1989-04-25 Stanford University Integrated, microminiature electric to fluidic valve
JPH0729414B2 (ja) * 1987-01-22 1995-04-05 株式会社テック 弁素子及びその製造方法
US4984361A (en) * 1987-08-17 1991-01-15 Dresser Industries Method of making a flat spring compressor valve
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
FR2639085B1 (fr) * 1988-11-15 1991-04-19 Neuchatel Universite Microvanne electrostatique integree et procede de fabrication d'une telle microvanne

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10260544A1 (de) * 2002-12-21 2004-07-15 Festo Ag & Co Mehrschichtiges Mikroventil und Verfahren zu seiner Herstellung
DE10260544B4 (de) * 2002-12-21 2005-03-31 Festo Ag & Co.Kg Mehrschichtiges Mikroventil

Also Published As

Publication number Publication date
EP0438570A1 (de) 1991-07-31
US5142781A (en) 1992-09-01
DE69024935D1 (de) 1996-02-29
KR920701699A (ko) 1992-08-12
EP0438570B1 (de) 1996-01-17
DE3926647A1 (de) 1991-02-14
WO1991002169A1 (en) 1991-02-21
JPH04501303A (ja) 1992-03-05

Similar Documents

Publication Publication Date Title
DE69024935T2 (de) Herstellungsverfahren für ein mikroventil
DE3856452D1 (de) Herstellungsmethode für ein supraleitendes Bauelement
DE69512282D1 (de) Herstellungsverfahren für ein mikromechanisches Element
DE69026460D1 (de) Ein Bi-CMOS-Verfahren
DK0401607T3 (da) Fremgangsmåde til fremstilling af en mikroventil samt mikroventil
DE68916840D1 (de) Druckluftsteuerung für ein Mehrbereichsverbundgetriebe.
DE68928538T2 (de) Elektronisches Filter für ein Hörgerät
ATA139089A (de) Befestigungseinrichtung für ein zielfernrohr
DE69010791T2 (de) Ventilverschlussstück für ein nichtgleitendes schieberventil.
DE69031547T2 (de) Befehlsausgabe für ein Rechnersystem
DE69003921D1 (de) Verschlusselement für ein Kugelventil.
DE59102388D1 (de) Herstellungsverfahren für eine flachdichtung.
DE3888265T2 (de) Geflochtenes Lager und Herstellungsverfahren für ein geflochtenes Lager.
DE69013643T2 (de) Ein dreidimensionales Gehäuse für die Mikroelektronik.
DE69327145T2 (de) Herstellungsverfahren für ein CMOS-Bauteil
DE69604018T2 (de) Herstellungsverfahren für Mikromaschine
DE69021985D1 (de) Antriebssteuerverfahren für ein Fahrzeug.
DE69008376D1 (de) Steuerventil für ein Dornsammelsystem.
DE3689352D1 (de) Umdrehungssteuerung für ein Differentialstellglied.
DE59007622D1 (de) Paneele für ein Sektionaltor.
DE69011262T2 (de) Heizgerät für ein Beschichtungsverfahren.
ATA154085A (de) Riemenscheibe für ein synchronantriebssystem
DE59607311D1 (de) Herstellverfahren für ein mikromechanisches Bauteil mit einer beweglichen Struktur
DE69301450D1 (de) Herstellungsverfahren für mikromechanisches Element
DE59003776D1 (de) Ausgangsschaltung für ein Potentiometer.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee