FR2639085B1 - Microvanne electrostatique integree et procede de fabrication d'une telle microvanne - Google Patents

Microvanne electrostatique integree et procede de fabrication d'une telle microvanne

Info

Publication number
FR2639085B1
FR2639085B1 FR8814832A FR8814832A FR2639085B1 FR 2639085 B1 FR2639085 B1 FR 2639085B1 FR 8814832 A FR8814832 A FR 8814832A FR 8814832 A FR8814832 A FR 8814832A FR 2639085 B1 FR2639085 B1 FR 2639085B1
Authority
FR
France
Prior art keywords
micro valve
manufacturing
integrated electrostatic
valve
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8814832A
Other languages
English (en)
Other versions
FR2639085A1 (fr
Inventor
Georges-Andre Racine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Neuchatel
Original Assignee
Universite de Neuchatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite de Neuchatel filed Critical Universite de Neuchatel
Priority to FR8814832A priority Critical patent/FR2639085B1/fr
Publication of FR2639085A1 publication Critical patent/FR2639085A1/fr
Application granted granted Critical
Publication of FR2639085B1 publication Critical patent/FR2639085B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0009—Lift valves the valve element held by multiple arms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0086—Medical applications
FR8814832A 1988-11-15 1988-11-15 Microvanne electrostatique integree et procede de fabrication d'une telle microvanne Expired - Fee Related FR2639085B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8814832A FR2639085B1 (fr) 1988-11-15 1988-11-15 Microvanne electrostatique integree et procede de fabrication d'une telle microvanne

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8814832A FR2639085B1 (fr) 1988-11-15 1988-11-15 Microvanne electrostatique integree et procede de fabrication d'une telle microvanne

Publications (2)

Publication Number Publication Date
FR2639085A1 FR2639085A1 (fr) 1990-05-18
FR2639085B1 true FR2639085B1 (fr) 1991-04-19

Family

ID=9371862

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8814832A Expired - Fee Related FR2639085B1 (fr) 1988-11-15 1988-11-15 Microvanne electrostatique integree et procede de fabrication d'une telle microvanne

Country Status (1)

Country Link
FR (1) FR2639085B1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3917396A1 (de) * 1989-05-29 1990-12-06 Buerkert Gmbh Mikroventil
DE3926647A1 (de) * 1989-08-11 1991-02-14 Bosch Gmbh Robert Verfahren zur herstellung eines mikroventils
US5082242A (en) * 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
ES2075459T3 (es) * 1990-08-31 1995-10-01 Westonbridge Int Ltd Valvula equipada con detector de posicion y microbomba que incorpora dicha valvula.
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
DE4445686C2 (de) * 1994-12-21 1999-06-24 Fraunhofer Ges Forschung Mikroventilanordnung, insbesondere für pneumatische Steuerungen
FR2834324B1 (fr) * 2001-12-31 2007-04-13 Bosch Gmbh Robert Valve a commande electrique, membrane comportant de telles valves et servomoteur d'assistance de freinage comportant une telle membrane
IT1403038B1 (it) * 2010-12-06 2013-09-27 Cps Color Equipment Spa Valvola di dosaggio e procedimento connesso

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
JPH0729414B2 (ja) * 1987-01-22 1995-04-05 株式会社テック 弁素子及びその製造方法

Also Published As

Publication number Publication date
FR2639085A1 (fr) 1990-05-18

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Legal Events

Date Code Title Description
ST Notification of lapse