DE69023707T2 - Akustische Oberflächenwellenanordnung. - Google Patents

Akustische Oberflächenwellenanordnung.

Info

Publication number
DE69023707T2
DE69023707T2 DE69023707T DE69023707T DE69023707T2 DE 69023707 T2 DE69023707 T2 DE 69023707T2 DE 69023707 T DE69023707 T DE 69023707T DE 69023707 T DE69023707 T DE 69023707T DE 69023707 T2 DE69023707 T2 DE 69023707T2
Authority
DE
Germany
Prior art keywords
acoustic wave
surface acoustic
wave arrangement
arrangement
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69023707T
Other languages
English (en)
Other versions
DE69023707D1 (de
Inventor
Hideharu Ieki
Atsushi Sakurai
Koji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69023707D1 publication Critical patent/DE69023707D1/de
Publication of DE69023707T2 publication Critical patent/DE69023707T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02582—Characteristics of substrate, e.g. cutting angles of diamond substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE69023707T 1989-07-06 1990-07-04 Akustische Oberflächenwellenanordnung. Expired - Lifetime DE69023707T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1174763A JPH0340510A (ja) 1989-07-06 1989-07-06 弾性表面波装置

Publications (2)

Publication Number Publication Date
DE69023707D1 DE69023707D1 (de) 1996-01-04
DE69023707T2 true DE69023707T2 (de) 1996-05-09

Family

ID=15984245

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69023707T Expired - Lifetime DE69023707T2 (de) 1989-07-06 1990-07-04 Akustische Oberflächenwellenanordnung.

Country Status (7)

Country Link
US (1) US5061870A (de)
EP (1) EP0407163B1 (de)
JP (1) JPH0340510A (de)
KR (1) KR930007797B1 (de)
CN (1) CN1015041B (de)
CA (1) CA2020411C (de)
DE (1) DE69023707T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5162690A (en) * 1989-04-14 1992-11-10 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JPH04358410A (ja) * 1991-06-05 1992-12-11 Sumitomo Electric Ind Ltd 表面弾性波素子及びその製造方法
EP0534354A1 (de) * 1991-09-25 1993-03-31 Sumitomo Electric Industries, Limited Akustische Oberflächenwellenanordnung und ihr Herstellungsverfahren
JPH0590871A (ja) * 1991-09-27 1993-04-09 Sumitomo Electric Ind Ltd 表面弾性波素子
US5440189A (en) * 1991-09-30 1995-08-08 Sumitomo Electric Industries, Ltd. Surface acoustic wave device
JP3252865B2 (ja) * 1992-09-11 2002-02-04 住友電気工業株式会社 表面弾性波素子および表面弾性波素子の製造方法
JP3198691B2 (ja) * 1993-01-14 2001-08-13 株式会社村田製作所 酸化亜鉛圧電結晶膜
ATE165197T1 (de) * 1993-07-20 1998-05-15 Avl List Gmbh Piezoelektrisches kristallelement
JP3085043B2 (ja) * 1993-08-05 2000-09-04 株式会社村田製作所 サファイア面上の酸化亜鉛圧電結晶膜
KR0171921B1 (ko) * 1993-09-13 1999-03-30 모리시타 요이찌 전자부품과 그 제조방법
JP3295921B2 (ja) * 1994-06-20 2002-06-24 住友電気工業株式会社 表面弾性波素子用ダイヤモンド基材及び素子
US5633616A (en) * 1994-10-07 1997-05-27 Mitsubishi Denki Kabushiki Kaisha Thin film saw filter including doped electrodes
US5576589A (en) * 1994-10-13 1996-11-19 Kobe Steel Usa, Inc. Diamond surface acoustic wave devices
US5815900A (en) * 1995-03-06 1998-10-06 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a surface acoustic wave module
US5666091A (en) * 1995-03-20 1997-09-09 Hitachi Media Electronics Co., Ltd. Structure of surface acoustic wave filter
US5834877A (en) * 1995-08-28 1998-11-10 Accuweb, Inc. Ultrasonic transducer units for web detection and the like
JPH09223943A (ja) * 1996-02-19 1997-08-26 Nec Corp 弾性表面波デバイス
MY117200A (en) * 1998-10-16 2004-05-31 Seiko Epson Corp Surface acoustic wave chip
JP4502553B2 (ja) * 2000-12-05 2010-07-14 日本碍子株式会社 弾性表面波デバイス用基板の製造方法
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置
TWI282660B (en) 2001-12-27 2007-06-11 Murata Manufacturing Co Surface acoustic wave device and manufacturing method therefor
JP3646116B2 (ja) * 2003-07-17 2005-05-11 Ｔｄｋ株式会社 表面弾性波素子、表面弾性波装置、表面弾性波デュプレクサ、及び表面弾性波素子の製造方法
KR101644165B1 (ko) * 2009-09-25 2016-07-29 삼성전자주식회사 표면탄성파 디바이스 및 바이오센서
JP2011139214A (ja) * 2009-12-28 2011-07-14 Seiko Epson Corp 弾性表面波デバイス、発振器、モジュール装置
JP6205937B2 (ja) * 2013-07-22 2017-10-04 セイコーエプソン株式会社 圧電膜製造方法、振動子製造方法、振動片、振動子、発振器、電子機器及び移動体
JP2020092321A (ja) 2018-12-05 2020-06-11 太陽誘電株式会社 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549014A (en) * 1978-10-04 1980-04-08 Seiko Instr & Electronics Ltd Electrode for vibrating element
JPS5748820A (en) * 1980-09-05 1982-03-20 Murata Mfg Co Ltd Surface acoustic wave element
JPS57145419A (en) * 1981-03-05 1982-09-08 Clarion Co Ltd Surface acoustic wave element
GB2181917B (en) * 1982-03-11 1987-11-18 Nobuo Mikoshiba Surface acoustic wave device
US4511816A (en) * 1982-03-11 1985-04-16 Nobuo Mikoshiba Surface acoustic wave device using an elastic substrate and an aluminum nitride piezoelectric film
JPS59231911A (ja) * 1983-06-14 1984-12-26 Clarion Co Ltd 表面弾性波素子
JPS6046108A (ja) * 1983-08-23 1985-03-12 Oki Electric Ind Co Ltd 表面弾性波デバイスの製造方法
JPS6192022A (ja) * 1984-10-11 1986-05-10 Matsushita Electric Ind Co Ltd 表面波フイルタ
JPS6298812A (ja) * 1985-10-25 1987-05-08 Hitachi Ltd 弾性表面波装置
JPS62272610A (ja) * 1986-05-21 1987-11-26 Hitachi Ltd 弾性表面波素子
JP2577363B2 (ja) * 1986-10-31 1997-01-29 株式会社東芝 半導体装置の製造方法
JPS63314906A (ja) * 1987-06-18 1988-12-22 Matsushita Electric Ind Co Ltd 表面弾性波装置の製造方法
US4935658A (en) * 1987-10-02 1990-06-19 Quartztronics, Inc. Crystal resonator with low acceleration sensitivity and method of manufacture thereof
JPH01303910A (ja) * 1988-06-01 1989-12-07 Hitachi Ltd 固体電子素子、その製造方法、及びそれを利用した装置
US4968954A (en) * 1988-09-30 1990-11-06 Shin-Etsu Chemical Co., Ltd. Epitaxial layer-bearing wafer of rare earth gallium garnet for MSW device

Also Published As

Publication number Publication date
EP0407163A3 (en) 1991-07-17
EP0407163A2 (de) 1991-01-09
JPH0340510A (ja) 1991-02-21
DE69023707D1 (de) 1996-01-04
EP0407163B1 (de) 1995-11-22
CN1015041B (zh) 1991-12-04
CA2020411C (en) 1994-05-03
KR910003921A (ko) 1991-02-28
CA2020411A1 (en) 1991-01-07
CN1048636A (zh) 1991-01-16
KR930007797B1 (ko) 1993-08-19
US5061870A (en) 1991-10-29

Similar Documents

Publication Publication Date Title
DE68921811T2 (de) Akustische Oberflächenwellenanordnungen.
DE69029080T2 (de) Akustische Oberflächenwellenanordnung
DE69023707D1 (de) Akustische Oberflächenwellenanordnung.
DE68914779T2 (de) Akustische Oberflächenwellenfilteranordnung.
DE3778754D1 (de) Akustische oberflaechenwellenanordnung.
DE69131223D1 (de) Akustische Oberflächenwellenanordnung
DE68916308T2 (de) Akustisches Oberflächenwellenfilter.
DE69112983D1 (de) Akustischer Oberflächenwellenresonator.
DE69217309T2 (de) Akustische Oberflächenwellenanordnung
DE69021918T2 (de) Akustische Oberflächenwellenanordnung.
DE69028003D1 (de) Akustische Oberflächenwellenanordnung
DE3575248D1 (de) Akustische oberflaechen-wellen-anordnung.
DE69100625T3 (de) Akustische oberflächenwellenfilter.
DE3853513T2 (de) Akustische Oberflächenwellenanordnung.
DE3887813D1 (de) Akustische Oberflächenwellenanordnung.
DE69211462T2 (de) Akustische Oberflächenwellenanordnung
DE69022476T2 (de) Akustische Oberflächenwellenanordnung.
DE58903754D1 (de) Oberflaechenwellenfilter.
DE69211463D1 (de) Akustische Oberflächenwellenanordnung
DE3482639D1 (de) Akustische oberflaechenwellenanordnung.
NO901387D0 (no) Akustisk-elektrisk overflateboelge-transduser.
DE3776829D1 (de) Akustische oberflaechenwellenfilter.
DE3580399D1 (de) Akustische oberflaechenwellenanordnung.
DE3889239D1 (de) Akustisches Oberflächenwellen-Filter.
ATE86804T1 (de) Oberflaechenwellenfilter.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition