DE69211463D1 - Akustische Oberflächenwellenanordnung - Google Patents

Akustische Oberflächenwellenanordnung

Info

Publication number
DE69211463D1
DE69211463D1 DE69211463T DE69211463T DE69211463D1 DE 69211463 D1 DE69211463 D1 DE 69211463D1 DE 69211463 T DE69211463 T DE 69211463T DE 69211463 T DE69211463 T DE 69211463T DE 69211463 D1 DE69211463 D1 DE 69211463D1
Authority
DE
Germany
Prior art keywords
acoustic wave
surface acoustic
wave arrangement
arrangement
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69211463T
Other languages
English (en)
Other versions
DE69211463T2 (de
Inventor
Akihiro Hachigo
Hideaki Nakahata
Shinichi Shikata
Naoji Fujimori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69211463D1 publication Critical patent/DE69211463D1/de
Application granted granted Critical
Publication of DE69211463T2 publication Critical patent/DE69211463T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE69211463T 1991-09-27 1992-09-11 Akustische Oberflächenwellenanordnung Expired - Lifetime DE69211463T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3249744A JPH0590871A (ja) 1991-09-27 1991-09-27 表面弾性波素子

Publications (2)

Publication Number Publication Date
DE69211463D1 true DE69211463D1 (de) 1996-07-18
DE69211463T2 DE69211463T2 (de) 1997-01-23

Family

ID=17197571

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69211463T Expired - Lifetime DE69211463T2 (de) 1991-09-27 1992-09-11 Akustische Oberflächenwellenanordnung

Country Status (4)

Country Link
US (1) US5463901A (de)
EP (1) EP0534252B1 (de)
JP (1) JPH0590871A (de)
DE (1) DE69211463T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5521454A (en) * 1993-09-16 1996-05-28 Matsushita Electric Industrial Co., Ltd. Surface wave filter element
US5815900A (en) * 1995-03-06 1998-10-06 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a surface acoustic wave module
DE69611771T2 (de) * 1995-09-01 2001-06-28 Murata Manufacturing Co Akustische Oberflächenwellenanordnung
DE19758198A1 (de) * 1997-12-30 1999-08-19 Siemens Ag Oberflächenwellen-(SAW-)Bauelement auf auch pyroelektrischem Einkristall-Substrat
JP2000295071A (ja) * 1999-04-07 2000-10-20 Murata Mfg Co Ltd 端面反射型表面波装置
JP4331032B2 (ja) * 2004-03-29 2009-09-16 日本電信電話株式会社 弾性表面波デバイスおよびその作製方法
WO2012011480A1 (ja) * 2010-07-21 2012-01-26 東京エレクトロン株式会社 層間絶縁層形成方法及び半導体装置
US9088265B2 (en) 2013-05-17 2015-07-21 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising a boron nitride piezoelectric layer
KR102617108B1 (ko) 2020-11-23 2023-12-21 포항공과대학교 산학협력단 표면탄성파 장치용 기판 및 이를 포함하는 표면탄성파 장치

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941602B2 (ja) * 1978-04-18 1984-10-08 松下電器産業株式会社 表面弾性波素子
JPS56149811A (en) * 1980-04-23 1981-11-19 Hitachi Ltd Elastic surface wave device and its preparation
US4535632A (en) * 1982-09-29 1985-08-20 Schlumberger Technology Corporation Surface acoustic wave sensors
US4558184A (en) * 1983-02-24 1985-12-10 At&T Bell Laboratories Integrated capacitive transducer
US4524247A (en) * 1983-07-07 1985-06-18 At&T Bell Laboratories Integrated electroacoustic transducer with built-in bias
JPS63128179A (ja) * 1986-11-18 1988-05-31 Sumitomo Electric Ind Ltd 硬質窒化硼素の合成方法および合成装置
JPS63134661A (ja) * 1986-11-22 1988-06-07 Sumitomo Electric Ind Ltd 高硬度窒化硼素の合成法
JPH0819523B2 (ja) * 1986-11-22 1996-02-28 住友電気工業株式会社 高硬度窒化硼素の合成法
JPS63199871A (ja) * 1987-02-12 1988-08-18 Sumitomo Electric Ind Ltd 高硬度窒化ホウ素の合成法
JPH01119673A (ja) * 1987-10-30 1989-05-11 Sumitomo Electric Ind Ltd 高硬度窒化ホウ素の合成法
US5127983A (en) * 1989-05-22 1992-07-07 Sumitomo Electric Industries, Ltd. Method of producing single crystal of high-pressure phase material
JPH0340510A (ja) * 1989-07-06 1991-02-21 Murata Mfg Co Ltd 弾性表面波装置
US4952832A (en) * 1989-10-24 1990-08-28 Sumitomo Electric Industries, Ltd. Surface acoustic wave device

Also Published As

Publication number Publication date
EP0534252B1 (de) 1996-06-12
EP0534252A1 (de) 1993-03-31
US5463901A (en) 1995-11-07
DE69211463T2 (de) 1997-01-23
JPH0590871A (ja) 1993-04-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: SEIKO EPSON CORP., TOKIO/TOKYO, JP

8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, SCHUMACHER, KNAUER, VON HIRSCHHAUSEN, 8033

R071 Expiry of right

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