DE69112983D1 - Akustischer Oberflächenwellenresonator. - Google Patents

Akustischer Oberflächenwellenresonator.

Info

Publication number
DE69112983D1
DE69112983D1 DE69112983T DE69112983T DE69112983D1 DE 69112983 D1 DE69112983 D1 DE 69112983D1 DE 69112983 T DE69112983 T DE 69112983T DE 69112983 T DE69112983 T DE 69112983T DE 69112983 D1 DE69112983 D1 DE 69112983D1
Authority
DE
Germany
Prior art keywords
surface wave
wave resonator
acoustic surface
acoustic
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69112983T
Other languages
English (en)
Other versions
DE69112983T2 (de
Inventor
Tadashi Kanda
Koji Asano
Hiroshi Shimizu
Yuji Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Kokusai Electric Inc
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Application granted granted Critical
Publication of DE69112983D1 publication Critical patent/DE69112983D1/de
Publication of DE69112983T2 publication Critical patent/DE69112983T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/1452—Means for weighting by finger overlap length, apodisation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE69112983T 1990-10-15 1991-10-15 Akustischer Oberflächenwellenresonator. Expired - Lifetime DE69112983T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2275888A JP2645674B2 (ja) 1990-10-15 1990-10-15 弾性表面波共振子

Publications (2)

Publication Number Publication Date
DE69112983D1 true DE69112983D1 (de) 1995-10-19
DE69112983T2 DE69112983T2 (de) 1996-04-18

Family

ID=17561839

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69112983T Expired - Lifetime DE69112983T2 (de) 1990-10-15 1991-10-15 Akustischer Oberflächenwellenresonator.

Country Status (4)

Country Link
US (1) US5204575A (de)
EP (1) EP0481733B1 (de)
JP (1) JP2645674B2 (de)
DE (1) DE69112983T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06338756A (ja) * 1993-05-27 1994-12-06 Fujitsu Ltd 共振子型弾性表面波フィルタ
JP3139225B2 (ja) * 1993-07-08 2001-02-26 株式会社村田製作所 弾性表面波フィルタ
JP3189508B2 (ja) * 1993-07-08 2001-07-16 株式会社村田製作所 弾性表面波フィルタ
DE4447740B4 (de) * 1993-09-06 2008-10-09 Sanyo Electric Co., Ltd., Moriguchi Akustisches Oberflächenwellenfilter
JP3185591B2 (ja) * 1995-03-03 2001-07-11 株式会社村田製作所 Ｓａｗ共振子
JP3075124B2 (ja) * 1995-03-08 2000-08-07 株式会社村田製作所 表面波共振子
US6172582B1 (en) * 1996-02-20 2001-01-09 Cts Corporation Saw resonator and ladder filter with specified number of reflector electrode fingers
DE19638451A1 (de) * 1996-09-19 1998-04-02 Siemens Matsushita Components Reaktanzfilter mit OFW-Resonatoren
JP3301399B2 (ja) * 1998-02-16 2002-07-15 株式会社村田製作所 弾性表面波装置
JP3568025B2 (ja) * 1999-05-14 2004-09-22 株式会社村田製作所 表面波装置及び通信機装置
JP2002330055A (ja) * 2001-04-27 2002-11-15 Tdk Corp 表面弾性波フィルタ、表面弾性波フィルタ用パッケージ及び表面弾性波フィルタモジュール
CN101405938B (zh) * 2006-03-17 2011-07-27 株式会社村田制作所 弹性波谐振器
CN101526501B (zh) * 2008-03-07 2011-12-28 中国科学院声学研究所 一种单向低损耗的乐甫波传感器
JP5105026B2 (ja) * 2010-03-12 2012-12-19 株式会社村田製作所 弾性波共振子及びラダー型フィルタ
US9048807B2 (en) * 2010-03-18 2015-06-02 University Of Maine System Board Of Trustees Surface acoustic wave resonator with an open circuit grating for high temperature environments
US9391589B2 (en) 2011-01-24 2016-07-12 Epcos Ag Surface acoustic wave filter on a lithium niobate substrate
FR3039708B1 (fr) 2015-07-31 2019-08-09 Senseor Resonateur a ondes elastiques de surface simple port sur substrat a forte permittivite
US20220116015A1 (en) 2018-06-15 2022-04-14 Resonant Inc. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US11509279B2 (en) 2020-07-18 2022-11-22 Resonant Inc. Acoustic resonators and filters with reduced temperature coefficient of frequency
US11929731B2 (en) 2018-02-18 2024-03-12 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch
US12040779B2 (en) * 2020-04-20 2024-07-16 Murata Manufacturing Co., Ltd. Small transversely-excited film bulk acoustic resonators with enhanced Q-factor
US11323089B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer
US11323090B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications
US11323096B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with periodic etched holes
US10917072B2 (en) 2019-06-24 2021-02-09 Resonant Inc. Split ladder acoustic wave filters
US11264966B2 (en) 2018-06-15 2022-03-01 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
US11349452B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Transversely-excited film bulk acoustic filters with symmetric layout
US11811391B2 (en) 2020-05-04 2023-11-07 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with etched conductor patterns
US11271539B1 (en) 2020-08-19 2022-03-08 Resonant Inc. Transversely-excited film bulk acoustic resonator with tether-supported diaphragm
US11405017B2 (en) 2020-10-05 2022-08-02 Resonant Inc. Acoustic matrix filters and radios using acoustic matrix filters
US11476834B2 (en) 2020-10-05 2022-10-18 Resonant Inc. Transversely-excited film bulk acoustic resonator matrix filters with switches in parallel with sub-filter shunt capacitors
US11728784B2 (en) 2020-10-05 2023-08-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
US11658639B2 (en) 2020-10-05 2023-05-23 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator matrix filters with noncontiguous passband
US11496113B2 (en) 2020-11-13 2022-11-08 Resonant Inc. XBAR devices with excess piezoelectric material removed
CN114726335A (zh) * 2022-06-09 2022-07-08 深圳新声半导体有限公司 一种叉指换能器、声表面波谐振器以及制备方法
CN115001438B (zh) * 2022-06-21 2024-07-02 中国科学院上海微系统与信息技术研究所 一种纵向泄漏声表面波谐振器的结构及滤波器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2133021A5 (de) * 1971-04-06 1972-11-24 Vannier Photelec Chevali
US4322651A (en) * 1977-05-09 1982-03-30 Murata Manufacturing Co., Ltd. Acoustic surface wave device
US4206380A (en) * 1978-12-22 1980-06-03 Hitachi, Ltd. Piezoelectric surface acoustic wave device with suppression of reflected signals
JPS56132806A (en) * 1980-03-22 1981-10-17 Murata Mfg Co Ltd Elastic surface wave equipment
US4634913B1 (en) * 1980-06-11 1997-05-13 Plessey Co Ltd Application of lithium tetraborate to electronic devices
JPS5761318A (en) * 1980-09-30 1982-04-13 Toshiba Corp Elastic surface wave element
JPS57119509A (en) * 1981-01-19 1982-07-26 Toshiba Corp Surface acoustic wave resonator
JP2547718B2 (ja) * 1984-06-06 1996-10-23 株式会社東芝 弾性表面波共振子
JPH0728195B2 (ja) * 1986-02-28 1995-03-29 株式会社東芝 弾性表面波共振子
JPS63161272A (ja) * 1986-12-23 1988-07-04 鹿島建設株式会社 可動屋根

Also Published As

Publication number Publication date
DE69112983T2 (de) 1996-04-18
EP0481733B1 (de) 1995-09-13
US5204575A (en) 1993-04-20
JPH04150606A (ja) 1992-05-25
EP0481733A1 (de) 1992-04-22
JP2645674B2 (ja) 1997-08-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HITACHI KOKUSAI ELECTRIC INC., TOKIO/TOKYO, JP SHI