DE3778754D1 - Akustische oberflaechenwellenanordnung. - Google Patents

Akustische oberflaechenwellenanordnung.

Info

Publication number
DE3778754D1
DE3778754D1 DE8787107300T DE3778754T DE3778754D1 DE 3778754 D1 DE3778754 D1 DE 3778754D1 DE 8787107300 T DE8787107300 T DE 8787107300T DE 3778754 T DE3778754 T DE 3778754T DE 3778754 D1 DE3778754 D1 DE 3778754D1
Authority
DE
Germany
Prior art keywords
surface wave
acoustic surface
wave arrangement
arrangement
acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787107300T
Other languages
English (en)
Inventor
Akitsuna Yuhara
Jun Sasaki
Tetsuya Hirashima
Jun Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3778754D1 publication Critical patent/DE3778754D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02929—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE8787107300T 1986-05-21 1987-05-19 Akustische oberflaechenwellenanordnung. Expired - Lifetime DE3778754D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61114540A JPS62272610A (ja) 1986-05-21 1986-05-21 弾性表面波素子

Publications (1)

Publication Number Publication Date
DE3778754D1 true DE3778754D1 (de) 1992-06-11

Family

ID=14640318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787107300T Expired - Lifetime DE3778754D1 (de) 1986-05-21 1987-05-19 Akustische oberflaechenwellenanordnung.

Country Status (4)

Country Link
US (1) US4775814A (de)
EP (1) EP0246626B1 (de)
JP (1) JPS62272610A (de)
DE (1) DE3778754D1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2186456B (en) * 1986-01-13 1989-11-08 Hitachi Ltd Surface acoustic wave device
JPS6480113A (en) * 1987-09-22 1989-03-27 Hitachi Ltd Surface acoustic wave device
JPH01303910A (ja) * 1988-06-01 1989-12-07 Hitachi Ltd 固体電子素子、その製造方法、及びそれを利用した装置
US5162690A (en) * 1989-04-14 1992-11-10 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JPH0314305A (ja) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd 弾性表面波装置の製造方法
JPH0340510A (ja) * 1989-07-06 1991-02-21 Murata Mfg Co Ltd 弾性表面波装置
US5039957A (en) * 1990-05-07 1991-08-13 Raytheon Company High power surface acoustic wave devices having copper and titanium doped aluminum transducers and long-term frequency stability
JP2733006B2 (ja) 1993-07-27 1998-03-30 株式会社神戸製鋼所 半導体用電極及びその製造方法並びに半導体用電極膜形成用スパッタリングターゲット
JP3379049B2 (ja) * 1993-10-27 2003-02-17 富士通株式会社 表面弾性波素子とその製造方法
JPH0969748A (ja) * 1995-09-01 1997-03-11 Matsushita Electric Ind Co Ltd Ｓａｗデバイスおよびその製造方法
US5929723A (en) * 1995-09-21 1999-07-27 Tdk Corporation Surface acoustic wave apparatus having an electrode that is a doped alloy film
JPH09223944A (ja) * 1995-12-13 1997-08-26 Fujitsu Ltd 弾性表面波素子及びその製造方法
KR100644470B1 (ko) * 1997-07-28 2006-11-13 가부시끼가이샤 도시바 탄성표면파 필터 및 그의 제조방법
JP3266109B2 (ja) * 1998-08-05 2002-03-18 株式会社村田製作所 電子デバイスの作製方法
US6259185B1 (en) * 1998-12-02 2001-07-10 Cts Corporation Metallization for high power handling in a surface acoustic wave device and method for providing same
JP3338010B2 (ja) * 1999-10-18 2002-10-28 富士通株式会社 弾性表面波素子及びその製造方法
US6452305B1 (en) * 2000-03-14 2002-09-17 Motorola, Inc. High power surface acoustic wave device
JP3402311B2 (ja) * 2000-05-19 2003-05-06 株式会社村田製作所 弾性表面波装置
JP4059080B2 (ja) * 2000-10-23 2008-03-12 松下電器産業株式会社 弾性表面波フィルタ
JP3445971B2 (ja) * 2000-12-14 2003-09-16 富士通株式会社 弾性表面波素子
DE10206480B4 (de) * 2001-02-16 2005-02-10 Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. Akustisches Oberflächenwellenbauelement
US6965190B2 (en) * 2001-09-12 2005-11-15 Sanyo Electric Co., Ltd. Surface acoustic wave device
US7148610B2 (en) * 2002-02-01 2006-12-12 Oc Oerlikon Balzers Ag Surface acoustic wave device having improved performance and method of making the device
DE10206369B4 (de) * 2002-02-15 2012-12-27 Epcos Ag Elektrodenstruktur mit verbesserter Leistungsverträglichkeit und Verfahren zur Herstellung
JP3774782B2 (ja) * 2003-05-14 2006-05-17 富士通メディアデバイス株式会社 弾性表面波素子の製造方法
US20090022982A1 (en) * 2006-03-06 2009-01-22 Tosoh Smd, Inc. Electronic Device, Method of Manufacture of Same and Sputtering Target
WO2007103014A2 (en) * 2006-03-06 2007-09-13 Tosoh Smd, Inc. Sputtering target
AT509633A1 (de) * 2010-03-29 2011-10-15 Ctr Carinthian Tech Res Ag Hochtemperaturbeständige, elektrisch leitfähige dünnschichten
US20230223918A1 (en) * 2022-01-13 2023-07-13 RF360 Europe GmbH Surface acoustic wave (saw) device with one or more intermediate layers for self-heating improvement

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1580600A (en) * 1978-05-09 1980-12-03 Philips Electronic Associated Kpiezoelectric devices
DE3117747A1 (de) * 1981-05-05 1982-11-25 Kollsman System-Technik GmbH, 8000 München Piezoelektrisches element
JPS594310A (ja) * 1982-06-30 1984-01-11 Toshiba Corp 弾性表面波装置
JPH0773177B2 (ja) * 1984-12-17 1995-08-02 株式会社東芝 弾性表面波共振子

Also Published As

Publication number Publication date
EP0246626B1 (de) 1992-05-06
EP0246626A3 (en) 1989-03-08
EP0246626A2 (de) 1987-11-25
JPS62272610A (ja) 1987-11-26
US4775814A (en) 1988-10-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee