DE3887813T2 - Akustische Oberflächenwellenanordnung. - Google Patents

Akustische Oberflächenwellenanordnung.

Info

Publication number
DE3887813T2
DE3887813T2 DE3887813T DE3887813T DE3887813T2 DE 3887813 T2 DE3887813 T2 DE 3887813T2 DE 3887813 T DE3887813 T DE 3887813T DE 3887813 T DE3887813 T DE 3887813T DE 3887813 T2 DE3887813 T2 DE 3887813T2
Authority
DE
Germany
Prior art keywords
acoustic wave
surface acoustic
wave arrangement
arrangement
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3887813T
Other languages
English (en)
Other versions
DE3887813D1 (de
Inventor
Kenichi Shibata
Toshiaki Yokoo
Kousuke Takeuchi
Toshiharu Tanaka
Maruo Kamino
Seiji Nishikawa
Shoichi Nakano
Yukinori Kuwano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62264736A external-priority patent/JPH01106514A/ja
Priority claimed from JP62283969A external-priority patent/JPH01125012A/ja
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Publication of DE3887813D1 publication Critical patent/DE3887813D1/de
Application granted granted Critical
Publication of DE3887813T2 publication Critical patent/DE3887813T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE3887813T 1987-10-19 1988-10-19 Akustische Oberflächenwellenanordnung. Expired - Fee Related DE3887813T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62264736A JPH01106514A (ja) 1987-10-19 1987-10-19 弾性表面波素子
JP62283969A JPH01125012A (ja) 1987-11-09 1987-11-09 弾性表面波素子

Publications (2)

Publication Number Publication Date
DE3887813D1 DE3887813D1 (de) 1994-03-24
DE3887813T2 true DE3887813T2 (de) 1994-06-23

Family

ID=26546643

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3887813T Expired - Fee Related DE3887813T2 (de) 1987-10-19 1988-10-19 Akustische Oberflächenwellenanordnung.

Country Status (4)

Country Link
US (1) US4868444A (de)
EP (1) EP0313025B1 (de)
KR (1) KR970004619B1 (de)
DE (1) DE3887813T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0388406A (ja) * 1989-04-11 1991-04-12 Sanyo Electric Co Ltd 弾性表面波素子
JPH0314305A (ja) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd 弾性表面波装置の製造方法
JPH05259802A (ja) * 1992-03-16 1993-10-08 Japan Energy Corp 弾性表面波装置
AT401837B (de) * 1993-03-04 1996-12-27 Avl Verbrennungskraft Messtech Piezoelektrisches kristallelement
DE69413280T2 (de) * 1993-03-15 1999-04-22 Matsushita Electric Ind Co Ltd Akustische Oberflächenwellenanordnung mit laminierter Struktur
JPH06326548A (ja) * 1993-05-14 1994-11-25 Kobe Steel Ltd 高配向性ダイヤモンド薄膜を使用した表面弾性波素子
US5498920A (en) * 1993-05-18 1996-03-12 Sanyo Electric Co., Ltd. Acoustic wave device and process for producing same
EP0669412B1 (de) * 1994-02-25 2002-05-22 Sumitomo Electric Industries, Ltd. Substrat für aluminium-nitrid dünne Film und Verfahren zu seiner Herstellung
US5576589A (en) * 1994-10-13 1996-11-19 Kobe Steel Usa, Inc. Diamond surface acoustic wave devices
JP3321369B2 (ja) * 1996-09-27 2002-09-03 日本碍子株式会社 表面弾性波装置およびその基板およびその製造方法
US6127768A (en) * 1997-05-09 2000-10-03 Kobe Steel Usa, Inc. Surface acoustic wave and bulk acoustic wave devices using a Zn.sub.(1-X) Yx O piezoelectric layer device
US10291203B2 (en) * 2016-07-12 2019-05-14 Murata Manufacturing Co., Ltd. Piezoelectric MEMS resonator with a high quality factor
US10483943B2 (en) * 2017-06-27 2019-11-19 Globalfoundries Inc. Artificially oriented piezoelectric film for integrated filters

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2181917B (en) * 1982-03-11 1987-11-18 Nobuo Mikoshiba Surface acoustic wave device
US4511816A (en) * 1982-03-11 1985-04-16 Nobuo Mikoshiba Surface acoustic wave device using an elastic substrate and an aluminum nitride piezoelectric film
JPS59231911A (ja) * 1983-06-14 1984-12-26 Clarion Co Ltd 表面弾性波素子
JPS60119114A (ja) * 1983-11-30 1985-06-26 Murata Mfg Co Ltd 表面波装置

Also Published As

Publication number Publication date
EP0313025A3 (en) 1990-04-04
US4868444A (en) 1989-09-19
KR970004619B1 (ko) 1997-03-29
DE3887813D1 (de) 1994-03-24
EP0313025A2 (de) 1989-04-26
KR890007443A (ko) 1989-06-19
EP0313025B1 (de) 1994-02-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee