DE69016230T2 - Halbleiterlaser und Verfahren zur Herstellung desselben. - Google Patents

Halbleiterlaser und Verfahren zur Herstellung desselben.

Info

Publication number
DE69016230T2
DE69016230T2 DE69016230T DE69016230T DE69016230T2 DE 69016230 T2 DE69016230 T2 DE 69016230T2 DE 69016230 T DE69016230 T DE 69016230T DE 69016230 T DE69016230 T DE 69016230T DE 69016230 T2 DE69016230 T2 DE 69016230T2
Authority
DE
Germany
Prior art keywords
manufacturing
same
semiconductor laser
laser
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69016230T
Other languages
English (en)
Other versions
DE69016230D1 (de
Inventor
Hidenori Kawanishi
Hiroshi Hayashi
Taiji Morimoto
Shinji Kaneiwa
Nobuyuki Miyauchi
Seiki Yano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE69016230D1 publication Critical patent/DE69016230D1/de
Application granted granted Critical
Publication of DE69016230T2 publication Critical patent/DE69016230T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
    • H01S5/0281—Coatings made of semiconductor materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0201—Separation of the wafer into individual elements, e.g. by dicing, cleaving, etching or directly during growth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/16—Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface
    • H01S5/164—Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface with window regions comprising semiconductor material with a wider bandgap than the active layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/16—Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface
    • H01S5/166—Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface with window regions comprising non-semiconducting materials
DE69016230T 1989-03-13 1990-03-13 Halbleiterlaser und Verfahren zur Herstellung desselben. Expired - Fee Related DE69016230T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1060422A JPH07109924B2 (ja) 1989-03-13 1989-03-13 半導体レーザ装置及びその製造方法

Publications (2)

Publication Number Publication Date
DE69016230D1 DE69016230D1 (de) 1995-03-09
DE69016230T2 true DE69016230T2 (de) 1995-07-27

Family

ID=13141760

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69016230T Expired - Fee Related DE69016230T2 (de) 1989-03-13 1990-03-13 Halbleiterlaser und Verfahren zur Herstellung desselben.

Country Status (4)

Country Link
US (1) US5022037A (de)
EP (1) EP0388149B1 (de)
JP (1) JPH07109924B2 (de)
DE (1) DE69016230T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0834337B2 (ja) * 1990-04-02 1996-03-29 シャープ株式会社 半導体レーザ素子の製造方法
JP2981315B2 (ja) * 1990-10-19 1999-11-22 シャープ株式会社 半導体レーザ素子
US5228047A (en) * 1990-09-21 1993-07-13 Sharp Kabushiki Kaisha Semiconductor laser device and a method for producing the same
US5491711A (en) * 1993-11-04 1996-02-13 The Furukawa Electric Co., Ltd. Semiconductor laser device
US6590920B1 (en) 1998-10-08 2003-07-08 Adc Telecommunications, Inc. Semiconductor lasers having single crystal mirror layers grown directly on facet

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559480A (en) * 1978-07-07 1980-01-23 Nec Corp Large light output, lateral mode of semiconductor laser element
JPS5527474A (en) * 1978-08-19 1980-02-27 Arata Kogyosho:Kk Manufacture of spherical head for use of oiler or the like of diesel engine
JPS57170585A (en) * 1981-04-14 1982-10-20 Nec Corp Semiconductor laser device
JPS58110087A (ja) * 1981-12-24 1983-06-30 Fujitsu Ltd 半導体レ−ザ装置
JPS60113983A (ja) * 1983-11-26 1985-06-20 Mitsubishi Electric Corp 半導体発光装置およびその製造方法
JPH01138784A (ja) * 1987-11-25 1989-05-31 Nec Corp 半導体レーザの端面保護膜形成方法

Also Published As

Publication number Publication date
DE69016230D1 (de) 1995-03-09
EP0388149A3 (de) 1991-08-07
EP0388149A2 (de) 1990-09-19
US5022037A (en) 1991-06-04
JPH02239680A (ja) 1990-09-21
JPH07109924B2 (ja) 1995-11-22
EP0388149B1 (de) 1995-01-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: PATENTANWAELTE MUELLER & HOFFMANN, 81667 MUENCHEN

8339 Ceased/non-payment of the annual fee