DE69011361D1 - Verfahren und Einrichtung zur Untersuchung von gedruckten Schaltungen. - Google Patents

Verfahren und Einrichtung zur Untersuchung von gedruckten Schaltungen.

Info

Publication number
DE69011361D1
DE69011361D1 DE69011361T DE69011361T DE69011361D1 DE 69011361 D1 DE69011361 D1 DE 69011361D1 DE 69011361 T DE69011361 T DE 69011361T DE 69011361 T DE69011361 T DE 69011361T DE 69011361 D1 DE69011361 D1 DE 69011361D1
Authority
DE
Germany
Prior art keywords
pcb
printed circuits
examining
examining printed
hue
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69011361T
Other languages
English (en)
Other versions
DE69011361T2 (de
Inventor
Shigeki Kobayashi
Norihito Yamamoto
Koichi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Application granted granted Critical
Publication of DE69011361D1 publication Critical patent/DE69011361D1/de
Publication of DE69011361T2 publication Critical patent/DE69011361T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Emergency Protection Circuit Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
DE69011361T 1989-03-02 1990-03-01 Verfahren und Einrichtung zur Untersuchung von gedruckten Schaltungen. Expired - Fee Related DE69011361T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1051317A JPH02231510A (ja) 1989-03-02 1989-03-02 基板検査装置

Publications (2)

Publication Number Publication Date
DE69011361D1 true DE69011361D1 (de) 1994-09-15
DE69011361T2 DE69011361T2 (de) 1995-04-27

Family

ID=12883540

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69011361T Expired - Fee Related DE69011361T2 (de) 1989-03-02 1990-03-01 Verfahren und Einrichtung zur Untersuchung von gedruckten Schaltungen.

Country Status (5)

Country Link
US (1) US5032735A (de)
EP (1) EP0385474B1 (de)
JP (1) JPH02231510A (de)
AT (1) ATE109895T1 (de)
DE (1) DE69011361T2 (de)

Families Citing this family (51)

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DE68929062T2 (de) * 1988-05-09 2000-03-16 Omron Tateisi Electronics Co Vorrichtung zum Prüfen von Leiterplatten
JP2953736B2 (ja) * 1990-03-20 1999-09-27 松下電器産業株式会社 半田の形状検査方法
DE4139189C2 (de) * 1990-11-29 2003-08-28 Matsushita Electric Ind Co Ltd Vorrichtung zur optischen Lötstellenprüfung
JP3113731B2 (ja) * 1991-05-17 2000-12-04 キヤノン株式会社 部品実装検査方法及びその検査装置並びに該検査装置により検査された基板
JP3015185B2 (ja) * 1992-01-28 2000-03-06 日本鋼管株式会社 亜鉛メッキ鋼板の合金化度測定装置
US5424838A (en) * 1993-03-01 1995-06-13 Siu; Bernard Microelectronics inspection system
US5302836A (en) * 1992-07-16 1994-04-12 Bernard Siu High speed image acquisition for microelectronics inspection
WO1994024518A1 (en) 1993-04-21 1994-10-27 Omron Corporation Visual inspection support apparatus, substrate inspection apparatus, and soldering inspection and correction methods using the same apparatuses
US5923430A (en) * 1993-06-17 1999-07-13 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers
US5844249A (en) * 1993-12-24 1998-12-01 Hoechst Aktiengesellschaft Apparatus for detecting defects of wires on a wiring board wherein optical sensor includes a film of polymer non-linear optical material
DE9401711U1 (de) * 1994-02-02 1995-06-01 Kratzer Automatisierung GmbH, 85716 Unterschleißheim Abbildungsvorrichtung
AU6341396A (en) * 1995-06-30 1997-02-05 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers
JP3322801B2 (ja) * 1996-08-01 2002-09-09 三井金属鉱業株式会社 レジスト飛散検査装置および方法
KR19980039100A (ko) * 1996-11-27 1998-08-17 배순훈 부품의 클린칭 방향을 이용한 미삽 검사장치 및 방법
US6148114A (en) * 1996-11-27 2000-11-14 Ultrapointe Corporation Ring dilation and erosion techniques for digital image processing
DE19709939A1 (de) * 1997-03-11 1998-09-17 Atg Test Systems Gmbh Verfahren und Vorrichtung zum Prüfen von Leiterplatten
US6118540A (en) * 1997-07-11 2000-09-12 Semiconductor Technologies & Instruments, Inc. Method and apparatus for inspecting a workpiece
US6072898A (en) 1998-01-16 2000-06-06 Beaty; Elwin M. Method and apparatus for three dimensional inspection of electronic components
JP4332656B2 (ja) * 1998-01-26 2009-09-16 ラトックシステムエンジニアリング株式会社 欠陥検査方法および欠陥検査装置
JPH11237210A (ja) * 1998-02-19 1999-08-31 Komatsu Ltd 半導体パッケージの検査装置
KR100281881B1 (ko) 1998-07-01 2001-02-15 윤종용 인쇄회로기판의크림솔더검사장치및검사방법
TW495060U (en) * 1998-07-24 2002-07-11 Inventec Corp Brightness test device of liquid crystal display panel
KR100345001B1 (ko) * 1998-08-27 2002-07-19 삼성전자 주식회사 기판 납땜 검사용 조명 및 광학 장치
SE514859C2 (sv) * 1999-01-18 2001-05-07 Mydata Automation Ab Förfarande och anordning för undersökning av objekt på ett substrat genom att ta bilder av substratet och analysera dessa
US6552783B1 (en) * 2000-06-28 2003-04-22 Teradyne, Inc. Optical system
KR100465785B1 (ko) * 2000-07-14 2005-01-13 삼성전자주식회사 Ｐｃｂ용 납땜검사장치
EP1220596A1 (de) * 2000-12-29 2002-07-03 Icos Vision Systems N.V. Verfahren und Einrichtung zur Lageerfassung der Anschlusskontakte elektronischer Bauelemente
DE10128476C2 (de) * 2001-06-12 2003-06-12 Siemens Dematic Ag Optische Sensorvorrichtung zur visuellen Erfassung von Substraten
JP3551188B2 (ja) * 2002-01-10 2004-08-04 オムロン株式会社 表面状態検査方法および基板検査装置
US20040184653A1 (en) * 2003-03-20 2004-09-23 Baer Richard L. Optical inspection system, illumination apparatus and method for use in imaging specular objects based on illumination gradients
US7352892B2 (en) * 2003-03-20 2008-04-01 Micron Technology, Inc. System and method for shape reconstruction from optical images
US7019826B2 (en) * 2003-03-20 2006-03-28 Agilent Technologies, Inc. Optical inspection system, apparatus and method for reconstructing three-dimensional images for printed circuit board and electronics manufacturing inspection
US7171037B2 (en) * 2003-03-20 2007-01-30 Agilent Technologies, Inc. Optical inspection system and method for displaying imaged objects in greater than two dimensions
KR100557526B1 (ko) * 2003-05-19 2006-03-03 삼성전기주식회사 Ｒｇｂ 컬러를 이용한 인쇄회로기판의 표면 상태 분석시스템 및 방법
JP3867724B2 (ja) * 2004-02-27 2007-01-10 オムロン株式会社 表面状態検査方法およびその方法を用いた表面状態検査装置ならびに基板検査装置
US20060086773A1 (en) * 2004-10-27 2006-04-27 Sanftleben Henry M Technique for optical inspection system verification
JP4123271B2 (ja) * 2005-11-28 2008-07-23 船井電機株式会社 液晶モジュール輝度測定装置
JP4978424B2 (ja) * 2007-10-25 2012-07-18 オムロン株式会社 部品実装検査の検査結果確認方法および検査結果確認システム
JP4510066B2 (ja) 2007-11-06 2010-07-21 日東電工株式会社 配線回路基板の製造方法および検査方法
US8077307B2 (en) * 2008-04-09 2011-12-13 Orbotech Ltd. Illumination system for optical inspection
JP2010177628A (ja) * 2009-02-02 2010-08-12 Omron Corp 実装部品の検査結果確定方法および検査結果確定システム
JP6115012B2 (ja) * 2011-08-30 2017-04-19 富士通株式会社 検査装置、検査方法及び検査プログラム
JP6116710B2 (ja) * 2014-01-08 2017-04-19 ヤマハ発動機株式会社 外観検査装置および外観検査方法
CN106226326B (zh) * 2016-08-24 2019-09-24 环旭电子股份有限公司 检测sip模组表面缺陷、露铜表面缺陷的方法及系统
WO2019147730A1 (en) * 2018-01-24 2019-08-01 Corning Incorporated Apparatus and methods for inspecting damage intensity
CN108490332B (zh) * 2018-02-02 2021-01-08 深圳麦逊电子有限公司 自动微针测试治具
JP7087533B2 (ja) * 2018-03-26 2022-06-21 住友電気工業株式会社 表面状態検査装置及び表面状態検査方法
KR102112053B1 (ko) * 2018-08-01 2020-05-18 주식회사 뷰온 이미지 센서를 이용한 표면결함 검사장치 및 검사방법
US20220252524A1 (en) * 2019-07-26 2022-08-11 Fuji Corporation Inspection device
US11282187B2 (en) * 2019-08-19 2022-03-22 Ricoh Company, Ltd. Inspection system, inspection apparatus, and method using multiple angle illumination
CN114295627B (zh) * 2021-12-31 2022-10-18 广东炬森智能装备有限公司 一种柔性线路板的全自动检测装置及检测方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792989A (en) * 1980-12-01 1982-06-09 Kiyoshi Nagata Transmission and receiving system for stereoscopic color television
US4500203A (en) * 1982-09-30 1985-02-19 Owens-Illinois, Inc. Method and apparatus for inspecting articles
JPS61293657A (ja) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd 半田付け外観検査方法
JPH0619243B2 (ja) * 1985-09-19 1994-03-16 株式会社トプコン 座標測定方法及びその装置
JPS62127617A (ja) * 1985-11-29 1987-06-09 Fujitsu Ltd 線状物体検査装置
US4894790A (en) * 1986-02-05 1990-01-16 Omron Tateisi Electronics Co. Input method for reference printed circuit board assembly data to an image processing printed circuit board assembly automatic inspection apparatus
JPS62194444A (ja) * 1986-02-17 1987-08-26 Omron Tateisi Electronics Co 部品実装基板検査装置
US4876455A (en) * 1988-02-25 1989-10-24 Westinghouse Electric Corp. Fiber optic solder joint inspection system
DE68929062T2 (de) * 1988-05-09 2000-03-16 Omron Tateisi Electronics Co Vorrichtung zum Prüfen von Leiterplatten
JP2688361B2 (ja) * 1988-08-02 1997-12-10 正己 山川 光電センサ
EP0370527B1 (de) * 1988-11-24 1994-02-02 Omron Tateisi Electronics Co. Verfahren und Gerät zur Inspektion von Schichten
JPH0745971B2 (ja) * 1992-10-15 1995-05-17 リンナイ株式会社 自動風呂装置

Also Published As

Publication number Publication date
EP0385474A2 (de) 1990-09-05
ATE109895T1 (de) 1994-08-15
DE69011361T2 (de) 1995-04-27
EP0385474A3 (de) 1991-09-04
JPH02231510A (ja) 1990-09-13
US5032735A (en) 1991-07-16
EP0385474B1 (de) 1994-08-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee