DE68929232D1 - Trockene abgasbehandlung - Google Patents

Trockene abgasbehandlung

Info

Publication number
DE68929232D1
DE68929232D1 DE68929232T DE68929232T DE68929232D1 DE 68929232 D1 DE68929232 D1 DE 68929232D1 DE 68929232 T DE68929232 T DE 68929232T DE 68929232 T DE68929232 T DE 68929232T DE 68929232 D1 DE68929232 D1 DE 68929232D1
Authority
DE
Germany
Prior art keywords
pct
gas treatment
exhaust gas
date dec
dry exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68929232T
Other languages
English (en)
Other versions
DE68929232T2 (de
Inventor
Robert Smith
Peter Leslie Timms
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Ltd Great Britain
Original Assignee
BOC Ltd Great Britain
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Ltd Great Britain filed Critical BOC Ltd Great Britain
Publication of DE68929232D1 publication Critical patent/DE68929232D1/de
Application granted granted Critical
Publication of DE68929232T2 publication Critical patent/DE68929232T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Silicon Compounds (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Catalysts (AREA)
DE68929232T 1988-06-04 1989-05-31 Trockene abgasbehandlung Expired - Fee Related DE68929232T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB888813270A GB8813270D0 (en) 1988-06-04 1988-06-04 Dry exhaust gas conditioning
PCT/GB1989/000600 WO1989011905A1 (en) 1988-06-04 1989-05-31 Dry exhaust gas conditioning

Publications (2)

Publication Number Publication Date
DE68929232D1 true DE68929232D1 (de) 2000-08-24
DE68929232T2 DE68929232T2 (de) 2001-01-25

Family

ID=10638097

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68929232T Expired - Fee Related DE68929232T2 (de) 1988-06-04 1989-05-31 Trockene abgasbehandlung

Country Status (8)

Country Link
US (1) US5213767A (de)
EP (1) EP0419507B1 (de)
JP (1) JP2795504B2 (de)
KR (1) KR0125920B1 (de)
AT (1) ATE194780T1 (de)
DE (1) DE68929232T2 (de)
GB (1) GB8813270D0 (de)
WO (1) WO1989011905A1 (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5417934A (en) * 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
US5582865A (en) * 1988-12-12 1996-12-10 Extraction Systems, Inc. Non-woven filter composite
US5626820A (en) * 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
US5486340A (en) * 1989-12-02 1996-01-23 The Boc Group Plc Exhaust gas conditioning
GB8927314D0 (en) * 1989-12-02 1990-01-31 Plasma Products Limited Exhaust gas conditioning
DE4233119C1 (de) * 1992-10-02 1993-12-09 Veitscher Magnesitwerke Ag Verfahren zur Reduzierung des Schadstoffgehaltes von Rauchgasen in einem Ofenaggregat
US5538702A (en) * 1993-02-11 1996-07-23 The Boc Group Plc Gas stream purification apparatus
US5853678A (en) * 1993-03-17 1998-12-29 Nipon Sanso Corporation Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide
JP3340510B2 (ja) * 1993-05-19 2002-11-05 日本パイオニクス株式会社 有害ガスの浄化方法
US5607647A (en) * 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
US5885845A (en) * 1993-12-22 1999-03-23 Nippon Sanso Corporation Method for detecting inorganic hydrides, inorganic halides and organometallic compounds in a gas using copper hydroxide
JP3280173B2 (ja) * 1994-11-29 2002-04-30 日本エア・リキード株式会社 排ガス処理装置
US5856198A (en) * 1994-12-28 1999-01-05 Extraction Systems, Inc. Performance monitoring of gas-phase air filters
US5468459A (en) * 1995-02-28 1995-11-21 The Boc Group, Inc. Gas stream treatment method for removing per-fluorocarbons
US6776970B1 (en) * 1995-08-07 2004-08-17 Giorgio Vergani Getter materials for deoxygenating ammonia/oxygen gas mixtures at low temperature
JP4037475B2 (ja) * 1996-09-04 2008-01-23 忠弘 大見 ハロゲン系化合物を含有する排ガスの処理方法
GB9608061D0 (en) 1996-04-16 1996-06-19 Boc Group Plc Removal of noxious substances from gas streams
US5928426A (en) * 1996-08-08 1999-07-27 Novellus Systems, Inc. Method and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactors
US5759498A (en) * 1996-12-12 1998-06-02 United Microelectronics Corp. Gas exhaust apparatus
US5955037A (en) * 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
MXPA00009799A (es) 1998-04-09 2002-05-08 Uhp Materials Inc Preparacion y purificacion de diborano.
KR100546282B1 (ko) * 1999-01-11 2006-01-26 삼성전자주식회사 칼슘화합물을 이용한 유해가스 정화방법
US20030049182A1 (en) * 2000-05-01 2003-03-13 Christopher Hertzler System and method for abatement of dangerous substances from a waste gas stream
US6821489B1 (en) * 2000-10-10 2004-11-23 International Business Machines Corporation System and method for abating the simultaneous flow of silane and arsine
ATE448860T1 (de) * 2001-06-28 2009-12-15 Sued Chemie Catalysts Jp Inc Behandlungsmittel für metallhydride enthaltendes abgas, verfahren zu dessen herstellung, sowie verfahren zur behandlung von metallhydride enthaltendem abgas mit dem besagten mittel
US6818566B2 (en) * 2002-10-18 2004-11-16 The Boc Group, Inc. Thermal activation of fluorine for use in a semiconductor chamber
US20040185661A1 (en) * 2003-03-17 2004-09-23 Sherer John Michael Scrubber system for pretreatment of an effluent waste stream containing arsenic
US20050053535A1 (en) * 2003-09-08 2005-03-10 Seh America, Inc. Gettering filter and associated method for removing oxygen from a gas
US20050123463A1 (en) * 2003-12-05 2005-06-09 Seeley Andrew J. Treatment of exhaust gases
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US7368000B2 (en) * 2004-12-22 2008-05-06 The Boc Group Plc Treatment of effluent gases
WO2007053626A2 (en) * 2005-10-31 2007-05-10 Applied Materials, Inc. Process abatement reactor
KR100654922B1 (ko) * 2006-01-26 2006-12-06 주식회사 코캣 반도체 제조공정으로부터 발생하는 배가스 처리장치 및방법
GB0602506D0 (en) * 2006-02-08 2006-03-22 Boc Group Plc Method of treating a gas stream
JP2008086913A (ja) * 2006-10-02 2008-04-17 Central Glass Co Ltd フッ素含有ガス中のフッ素の除去方法
WO2010020446A1 (en) * 2008-08-19 2010-02-25 Oerlikon Solar Ip Ag, Trübbach Trap
WO2010020445A1 (en) * 2008-08-19 2010-02-25 Oerlikon Solar Ip Ag, Trübbach Trap
US20110212010A1 (en) * 2009-09-02 2011-09-01 Despatch Industries Limited Partnership Apparatus and Method for Thermal Destruction of Volatile Organic Compounds
JP5485669B2 (ja) * 2009-12-03 2014-05-07 大旺新洋株式会社 酸性ガスの中和処理方法及びその装置
CA2869124C (en) * 2012-03-30 2018-06-05 Fuel Tech, Inc. Dry processes, apparatus, compositions and systems for reducing sulfur oxides and hci

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4036940A (en) * 1975-12-29 1977-07-19 Monsanto Company Recovery of iodine
SU990273A1 (ru) * 1980-12-01 1983-01-23 Ленинградский Институт Авиационного Приборостроения Способ очистки отход щих газов от паров тIсL @
JPS5949822A (ja) * 1982-09-14 1984-03-22 Nippon Sanso Kk 揮発性無機水素化物等を含有するガスの処理方法
US4442077A (en) * 1982-09-27 1984-04-10 Chemical Engineering Technology, Inc. Method of removing hydrides of phosphorus, arsenic, antimony and bismuth from hydrocarbon and non-hydrocarbon streams
DD221088A1 (de) * 1983-09-12 1985-04-17 Univ Schiller Jena Verfahren und anordnung zur entgiftung von f-kohlenstoffhaltigen abgasen
JPS61101231A (ja) * 1984-10-23 1986-05-20 Central Glass Co Ltd フツ素ガスの除去方法
GB8429709D0 (en) * 1984-11-23 1985-01-03 Alcan Int Ltd Halogen-containing organic compounds
JPS61204025A (ja) * 1985-03-06 1986-09-10 Central Glass Co Ltd Ｎｆ↓３の除害方法
US4743435A (en) * 1985-03-13 1988-05-10 Japan Pionics., Ltd. Method for cleaning exhaust gases
US4629611A (en) * 1985-04-29 1986-12-16 International Business Machines Corporation Gas purifier for rare-gas fluoride lasers
US4684510A (en) * 1985-12-20 1987-08-04 Hewlett-Packard Company Method and apparatus for prevention of atmospheric corrosion of electronic equipment
JPS62152519A (ja) * 1985-12-26 1987-07-07 Iwatani & Co ハロゲン系廃ガスの乾式処理方法
JPS6312322A (ja) * 1986-07-04 1988-01-19 Showa Denko Kk 排ガス処理方法
EP0294142B1 (de) * 1987-06-01 1992-03-25 Japan Pionics., Ltd. Verfahren zum Reinigen von Abgas
JPS6430626A (en) * 1987-07-28 1989-02-01 Ebara Res Co Ltd Treatment of exhaust gas

Also Published As

Publication number Publication date
EP0419507A1 (de) 1991-04-03
ATE194780T1 (de) 2000-08-15
WO1989011905A1 (en) 1989-12-14
GB8813270D0 (en) 1988-07-06
KR900701374A (ko) 1990-12-01
US5213767A (en) 1993-05-25
JP2795504B2 (ja) 1998-09-10
DE68929232T2 (de) 2001-01-25
KR0125920B1 (ko) 1997-12-19
JPH04502726A (ja) 1992-05-21
EP0419507B1 (de) 2000-07-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee