DE68927065D1 - Fokussierungseinrichtung für Elektronenmikroskop - Google Patents

Fokussierungseinrichtung für Elektronenmikroskop

Info

Publication number
DE68927065D1
DE68927065D1 DE68927065T DE68927065T DE68927065D1 DE 68927065 D1 DE68927065 D1 DE 68927065D1 DE 68927065 T DE68927065 T DE 68927065T DE 68927065 T DE68927065 T DE 68927065T DE 68927065 D1 DE68927065 D1 DE 68927065D1
Authority
DE
Germany
Prior art keywords
electron microscope
focusing device
focusing
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68927065T
Other languages
English (en)
Other versions
DE68927065T2 (de
Inventor
Junichiro Tomizawa
Susumu Ozasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Naka Seiki Ltd
Original Assignee
Hitachi Ltd
Hitachi Naka Seiki Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Naka Seiki Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE68927065D1 publication Critical patent/DE68927065D1/de
Publication of DE68927065T2 publication Critical patent/DE68927065T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
DE68927065T 1988-03-09 1989-03-07 Fokussierungseinrichtung für Elektronenmikroskop Expired - Fee Related DE68927065T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63053823A JPH0756786B2 (ja) 1988-03-09 1988-03-09 電子顕微鏡の焦点合わせ装置

Publications (2)

Publication Number Publication Date
DE68927065D1 true DE68927065D1 (de) 1996-10-10
DE68927065T2 DE68927065T2 (de) 1997-04-03

Family

ID=12953513

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68927065T Expired - Fee Related DE68927065T2 (de) 1988-03-09 1989-03-07 Fokussierungseinrichtung für Elektronenmikroskop

Country Status (4)

Country Link
US (1) US4933553A (de)
EP (1) EP0332140B1 (de)
JP (1) JPH0756786B2 (de)
DE (1) DE68927065T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2835097B2 (ja) * 1989-09-21 1998-12-14 株式会社東芝 荷電ビームの非点収差補正方法
JPH03194839A (ja) * 1989-12-25 1991-08-26 Hitachi Ltd 電子顕微鏡における焦点調整方法及び非点収差補正方法
IT1273320B (it) * 1994-02-22 1997-07-08 Alusuisse Italia Spa Procedimento per la produzione di gamma-butirrolattone
US5637735A (en) * 1994-08-10 1997-06-10 China Petrochemical Corporation Process for the preparation of gamma-butyrolactone
IT1298535B1 (it) 1998-02-02 2000-01-12 Lonza Spa Procedimento per la produzione di gamma-butirrolattone
KR100457066B1 (ko) 2002-04-22 2004-11-12 애경유화 주식회사 수소화 반응촉매 및 그의 제조방법, 및 이 촉매를이용하여 무수말레인산으로부터 감마-부티로락톤을제조하는 방법
JP6289339B2 (ja) * 2014-10-28 2018-03-07 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び情報処理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492050A (en) * 1977-12-29 1979-07-20 Jeol Ltd Method and apparatus for astigmatic correction of scanning electronic microscope and others
JPS58214258A (ja) * 1982-06-07 1983-12-13 Shimadzu Corp 走査型電子顕微鏡等の焦点検出装置
JPS5946745A (ja) * 1982-09-09 1984-03-16 Nichidenshi Tekunikusu:Kk 荷電粒子線装置における自動焦点合わせ装置
JPS60241633A (ja) * 1984-05-16 1985-11-30 Hitachi Ltd 電子線装置の自動焦点検出法
US4675528A (en) * 1985-06-28 1987-06-23 Control Data Corporation Method for measurement of spotsize and edgewidth in electron beam lithography
JPS63146332A (ja) * 1986-12-09 1988-06-18 Biimu Tec:Kk 荷電ビ−ム集束装置

Also Published As

Publication number Publication date
EP0332140A3 (en) 1990-06-20
EP0332140B1 (de) 1996-09-04
EP0332140A2 (de) 1989-09-13
JPH0756786B2 (ja) 1995-06-14
DE68927065T2 (de) 1997-04-03
US4933553A (en) 1990-06-12
JPH01231251A (ja) 1989-09-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee