DE69028777D1 - Mikrohergestellte mikroskopeinheit - Google Patents

Mikrohergestellte mikroskopeinheit

Info

Publication number
DE69028777D1
DE69028777D1 DE69028777T DE69028777T DE69028777D1 DE 69028777 D1 DE69028777 D1 DE 69028777D1 DE 69028777 T DE69028777 T DE 69028777T DE 69028777 T DE69028777 T DE 69028777T DE 69028777 D1 DE69028777 D1 DE 69028777D1
Authority
DE
Germany
Prior art keywords
micro
microscope unit
made microscope
unit
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69028777T
Other languages
English (en)
Other versions
DE69028777T2 (de
Inventor
Mark Zdeblick
Thomas Albrecht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leland Stanford Junior University
Original Assignee
Leland Stanford Junior University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leland Stanford Junior University filed Critical Leland Stanford Junior University
Application granted granted Critical
Publication of DE69028777D1 publication Critical patent/DE69028777D1/de
Publication of DE69028777T2 publication Critical patent/DE69028777T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner
DE69028777T 1989-06-20 1990-06-14 Mikrohergestellte mikroskopeinheit Expired - Fee Related DE69028777T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/368,664 US5015850A (en) 1989-06-20 1989-06-20 Microfabricated microscope assembly
PCT/US1990/003273 WO1990015986A1 (en) 1989-06-20 1990-06-14 Microfabricated microscope assembly

Publications (2)

Publication Number Publication Date
DE69028777D1 true DE69028777D1 (de) 1996-11-07
DE69028777T2 DE69028777T2 (de) 1997-04-10

Family

ID=23452214

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69028777T Expired - Fee Related DE69028777T2 (de) 1989-06-20 1990-06-14 Mikrohergestellte mikroskopeinheit

Country Status (5)

Country Link
US (1) US5015850A (de)
EP (1) EP0478666B1 (de)
JP (1) JP2561389B2 (de)
DE (1) DE69028777T2 (de)
WO (1) WO1990015986A1 (de)

Families Citing this family (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5994698A (en) * 1987-09-24 1999-11-30 Canon Kabushiki Kaisha Microprobe, preparation thereof and electronic device by use of said microprobe
US5220555A (en) * 1988-09-30 1993-06-15 Canon Kabushiki Kaisha Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof
JPH02295050A (ja) * 1989-05-09 1990-12-05 Olympus Optical Co Ltd μ―ＳＴＭを用いた回路パターン作製装置および回路パターン作製方法
US5266801A (en) * 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
US5182452A (en) * 1989-07-17 1993-01-26 Matsushita Electric Industrial Co. Ltd. Method for determining the presence of thin insulating films
US5126574A (en) * 1989-10-10 1992-06-30 The United States Of America As Represented By The Secretary Of Commerce Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication
JPH041949A (ja) * 1990-04-18 1992-01-07 Canon Inc 情報入力及び／または取出し装置
JPH041948A (ja) * 1990-04-18 1992-01-07 Canon Inc 情報記録装置及び情報再生装置及び情報記録再生装置
US5253516A (en) * 1990-05-23 1993-10-19 Digital Instruments, Inc. Atomic force microscope for small samples having dual-mode operating capability
US5144833A (en) * 1990-09-27 1992-09-08 International Business Machines Corporation Atomic force microscopy
JP2744346B2 (ja) * 1990-10-19 1998-04-28 キヤノン株式会社 情報記録ユニットと情報記録及び／又は再生装置と情報記録及び／又は再生方法と情報記録媒体
JP2802828B2 (ja) * 1990-10-19 1998-09-24 キヤノン株式会社 情報記録担体及びこれを使用する情報処理装置
DE4035075A1 (de) * 1990-11-05 1992-05-07 Jenoptik Jena Gmbh Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
JPH05196458A (ja) * 1991-01-04 1993-08-06 Univ Leland Stanford Jr 原子力顕微鏡用ピエゾ抵抗性片持ばり構造体
US5375087A (en) * 1991-02-04 1994-12-20 The United States Of America As Represented By The Secretary Of Commerce Tunneling-stabilized magnetic reading and recording
JPH0575047A (ja) * 1991-03-08 1993-03-26 Hitachi Ltd 記憶装置
JP3198355B2 (ja) * 1991-05-28 2001-08-13 キヤノン株式会社 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JP2923813B2 (ja) * 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
CA2073919C (en) * 1991-07-17 1999-10-19 Kiyoshi Takimoto Multiple probe electrode arrangement for scanning tunnelling microscope recording and reading
WO1993011413A1 (en) * 1991-11-26 1993-06-10 The Australian National University Piezoelectric bimorph cantilevers for surface analysis instruments
DE59205351D1 (de) * 1991-12-05 1996-03-28 Hoffmann La Roche Mikromechanisches Verfahren zur Strukturierung einer Polymer-Orientierungsschicht
JP3029916B2 (ja) * 1992-03-07 2000-04-10 キヤノン株式会社 情報処理装置
JP2917674B2 (ja) * 1992-06-03 1999-07-12 松下電器産業株式会社 走査トンネル顕微鏡用探針およびその製造方法
US5412980A (en) * 1992-08-07 1995-05-09 Digital Instruments, Inc. Tapping atomic force microscope
USRE36488E (en) * 1992-08-07 2000-01-11 Veeco Instruments Inc. Tapping atomic force microscope with phase or frequency detection
JP3025120B2 (ja) * 1992-12-21 2000-03-27 キヤノン株式会社 記録再生装置
DE4310349C2 (de) * 1993-03-30 2000-11-16 Inst Mikrotechnik Mainz Gmbh Sensorkopf und Verfahren zu seiner Herstellung
US5450746A (en) * 1993-10-12 1995-09-19 The University Of North Carolina Constant force stylus profiling apparatus and method
US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US6339217B1 (en) * 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US5565625A (en) * 1994-12-01 1996-10-15 Analog Devices, Inc. Sensor with separate actuator and sense fingers
US6507553B2 (en) 1995-07-24 2003-01-14 General Nanotechnology Llc Nanometer scale data storage device and associated positioning system
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
JPH09196933A (ja) * 1996-01-19 1997-07-31 Canon Inc プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置
US5808435A (en) * 1996-05-28 1998-09-15 Kmy Instruments Micropositioning device for disk head testing system
DE19701701A1 (de) * 1997-01-21 1998-07-23 Zeiss Carl Fa Sondenarray für ein Rastersondenmikroskop
US6093330A (en) * 1997-06-02 2000-07-25 Cornell Research Foundation, Inc. Microfabrication process for enclosed microstructures
US5903085A (en) * 1997-06-18 1999-05-11 Phase Metrics, Inc. Piezoelectric nanopositioner
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
US6802646B1 (en) * 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US6180536B1 (en) 1998-06-04 2001-01-30 Cornell Research Foundation, Inc. Suspended moving channels and channel actuators for microfluidic applications and method for making
US6369385B1 (en) * 1999-05-05 2002-04-09 Applied Materials, Inc. Integrated microcolumn and scanning probe microscope arrays
EP1196939A4 (de) * 1999-07-01 2002-09-18 Gen Nanotechnology Llc Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt
US6674141B1 (en) * 2000-08-01 2004-01-06 Hrl Laboratories, Llc Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same
US6563184B1 (en) * 2000-08-01 2003-05-13 Hrl Laboratories, Llc Single crystal tunneling sensor or switch with silicon beam structure and a method of making same
US6630367B1 (en) 2000-08-01 2003-10-07 Hrl Laboratories, Llc Single crystal dual wafer, tunneling sensor and a method of making same
US6555404B1 (en) * 2000-08-01 2003-04-29 Hrl Laboratories, Llc Method of manufacturing a dual wafer tunneling gyroscope
US6580138B1 (en) 2000-08-01 2003-06-17 Hrl Laboratories, Llc Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same
US6931710B2 (en) * 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
US6590850B2 (en) * 2001-03-07 2003-07-08 Hewlett-Packard Development Company, L.P. Packaging for storage devices using electron emissions
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US7053369B1 (en) 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6813937B2 (en) 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
JP2005538855A (ja) 2002-09-09 2005-12-22 ジェネラル ナノテクノロジー エルエルシー 走査型プローブ顕微鏡の流体送達
US20050128927A1 (en) * 2003-12-15 2005-06-16 Hewlett-Packard Development Co., L.P. Electrostatic actuator for contact probe storage device
US7436753B2 (en) 2003-12-17 2008-10-14 Mejia Robert G Contact probe storage FET sensor
US7423954B2 (en) * 2003-12-17 2008-09-09 Hewlett-Packard Development Company, L.P. Contact probe storage sensor pod
US7212487B2 (en) * 2004-01-07 2007-05-01 Hewlett-Packard Development Company, L.P. Data readout arrangement
FR2869027B1 (fr) * 2004-04-15 2006-07-14 Commissariat Energie Atomique Systeme d'enregistrement comportant une couche memoire et un reseau de micro-pointes
FR2880980B1 (fr) * 2005-01-17 2007-03-16 Commissariat Energie Atomique Dispositif d'enregistrement de donnees comportant des micro-pointes dont l'ensemble des extremites libres forme une surface convexe et procede de fabrication
US7212488B2 (en) 2005-03-21 2007-05-01 Hewlett-Packard Development Company, L.P. Method and device enabling capacitive probe-based data storage readout
WO2006110908A1 (en) * 2005-04-15 2006-10-19 University Of Florida Research Foundation, Inc. Microactuator having multiple degrees of freedom
JP2009534200A (ja) * 2006-04-19 2009-09-24 ノースウエスタン ユニバーシティ ２次元ペン配列を有する並列リソグラフィのための物品
WO2016107534A1 (zh) * 2014-12-29 2016-07-07 史拓莱姆有限公司 具有贴附式探针的检测装置
US20180321276A1 (en) * 2015-11-03 2018-11-08 Board Of Regents, The University Of Texas System Metrology devices and methods for independently controlling a plurality of sensing probes
US10712364B2 (en) 2015-11-03 2020-07-14 Board Of Regents, The University Of Texas Systems Metrology devices for rapid specimen setup

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4520570A (en) * 1983-12-30 1985-06-04 International Business Machines Corporation Piezoelectric x-y-positioner
EP0194323B1 (de) * 1985-03-07 1989-08-02 International Business Machines Corporation Tunneleffektabtastungsmikroskop
US4747698A (en) * 1986-04-30 1988-05-31 International Business Machines Corp. Scanning thermal profiler
EP0247219B1 (de) * 1986-05-27 1991-05-15 International Business Machines Corporation Speichereinheit mit direktem Zugriff
EP0262253A1 (de) * 1986-10-03 1988-04-06 International Business Machines Corporation Mikromechanische Fühlervorrichtung für atomare Kräfte
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JPH0792462B2 (ja) * 1988-05-16 1995-10-09 三菱電機株式会社 走査型トンネル顕微鏡の微動機構
JPH0298896A (ja) * 1988-10-05 1990-04-11 Olympus Optical Co Ltd 記憶装置
US4947042A (en) * 1988-12-13 1990-08-07 Mitsubishi Denki Kabushiki Kaisha Tunnel unit and scanning head for scanning tunneling microscope
DE69002774T2 (de) * 1989-02-09 1994-02-10 Olympus Optical Co Rastertunnelmikroskop-Speichergerät.

Also Published As

Publication number Publication date
JP2561389B2 (ja) 1996-12-04
EP0478666A4 (en) 1993-07-28
WO1990015986A1 (en) 1990-12-27
JPH03504418A (ja) 1991-09-26
EP0478666B1 (de) 1996-10-02
DE69028777T2 (de) 1997-04-10
US5015850A (en) 1991-05-14
EP0478666A1 (de) 1992-04-08

Similar Documents

Publication Publication Date Title
DE69028777T2 (de) Mikrohergestellte mikroskopeinheit
FI921975A (fi) Levyhaihdutin
NO177796C (no) Bestrykningsinnretning
NO176192C (no) Masseopplöser
FR2646509B1 (fr) Rigidimetre
ATA149789A (de) Schienenrad
BR6901354U (pt) Mosquetao
BR6901807U (pt) Fulao
NO171041C (no) Hudavtrekker
IT8908912V0 (it) Carletto
FI901936A0 (fi) Turvasulkemismekanismi
DK76589D0 (da) Dynetaeppe
BR6900735U (pt) Rotacesta
SE8901386D0 (sv) Ljusslaeckare
SE8901909D0 (sv) Huvudlaesare
ATA152989A (de) Skistock
ATA293489A (de) Schibob
BR6900207U (pt) Presilha-abracadeira
BR6900454U (pt) Espositor
BR6900607U (pt) Mini-cone
BR6900732U (pt) Reoviscosimetro
BR6900796U (pt) Eletro-lamina
BR6900847U (pt) Tele-alarme
SE8900911D0 (sv) Glasoegonspray
BR6901431U (pt) Bate-pula

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee