DE69028777T2 - Mikrohergestellte mikroskopeinheit - Google Patents
Mikrohergestellte mikroskopeinheitInfo
- Publication number
- DE69028777T2 DE69028777T2 DE69028777T DE69028777T DE69028777T2 DE 69028777 T2 DE69028777 T2 DE 69028777T2 DE 69028777 T DE69028777 T DE 69028777T DE 69028777 T DE69028777 T DE 69028777T DE 69028777 T2 DE69028777 T2 DE 69028777T2
- Authority
- DE
- Germany
- Prior art keywords
- micro
- microscope unit
- made microscope
- unit
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/06—Probe tip arrays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/368,664 US5015850A (en) | 1989-06-20 | 1989-06-20 | Microfabricated microscope assembly |
PCT/US1990/003273 WO1990015986A1 (en) | 1989-06-20 | 1990-06-14 | Microfabricated microscope assembly |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69028777D1 DE69028777D1 (de) | 1996-11-07 |
DE69028777T2 true DE69028777T2 (de) | 1997-04-10 |
Family
ID=23452214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69028777T Expired - Fee Related DE69028777T2 (de) | 1989-06-20 | 1990-06-14 | Mikrohergestellte mikroskopeinheit |
Country Status (5)
Country | Link |
---|---|
US (1) | US5015850A (de) |
EP (1) | EP0478666B1 (de) |
JP (1) | JP2561389B2 (de) |
DE (1) | DE69028777T2 (de) |
WO (1) | WO1990015986A1 (de) |
Families Citing this family (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5994698A (en) * | 1987-09-24 | 1999-11-30 | Canon Kabushiki Kaisha | Microprobe, preparation thereof and electronic device by use of said microprobe |
US5220555A (en) * | 1988-09-30 | 1993-06-15 | Canon Kabushiki Kaisha | Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof |
JPH02295050A (ja) * | 1989-05-09 | 1990-12-05 | Olympus Optical Co Ltd | μ―STMを用いた回路パターン作製装置および回路パターン作製方法 |
US5266801A (en) * | 1989-06-05 | 1993-11-30 | Digital Instruments, Inc. | Jumping probe microscope |
US5182452A (en) * | 1989-07-17 | 1993-01-26 | Matsushita Electric Industrial Co. Ltd. | Method for determining the presence of thin insulating films |
US5126574A (en) * | 1989-10-10 | 1992-06-30 | The United States Of America As Represented By The Secretary Of Commerce | Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication |
JPH041949A (ja) * | 1990-04-18 | 1992-01-07 | Canon Inc | 情報入力及び/または取出し装置 |
JPH041948A (ja) * | 1990-04-18 | 1992-01-07 | Canon Inc | 情報記録装置及び情報再生装置及び情報記録再生装置 |
US5253516A (en) * | 1990-05-23 | 1993-10-19 | Digital Instruments, Inc. | Atomic force microscope for small samples having dual-mode operating capability |
US5144833A (en) * | 1990-09-27 | 1992-09-08 | International Business Machines Corporation | Atomic force microscopy |
JP2744346B2 (ja) * | 1990-10-19 | 1998-04-28 | キヤノン株式会社 | 情報記録ユニットと情報記録及び/又は再生装置と情報記録及び/又は再生方法と情報記録媒体 |
JP2802828B2 (ja) * | 1990-10-19 | 1998-09-24 | キヤノン株式会社 | 情報記録担体及びこれを使用する情報処理装置 |
DE4035075A1 (de) * | 1990-11-05 | 1992-05-07 | Jenoptik Jena Gmbh | Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes |
JPH05196458A (ja) * | 1991-01-04 | 1993-08-06 | Univ Leland Stanford Jr | 原子力顕微鏡用ピエゾ抵抗性片持ばり構造体 |
US5375087A (en) * | 1991-02-04 | 1994-12-20 | The United States Of America As Represented By The Secretary Of Commerce | Tunneling-stabilized magnetic reading and recording |
JPH0575047A (ja) * | 1991-03-08 | 1993-03-26 | Hitachi Ltd | 記憶装置 |
JP3198355B2 (ja) * | 1991-05-28 | 2001-08-13 | キヤノン株式会社 | 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置 |
JP2923813B2 (ja) * | 1991-06-11 | 1999-07-26 | キヤノン株式会社 | カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置 |
CA2073919C (en) * | 1991-07-17 | 1999-10-19 | Kiyoshi Takimoto | Multiple probe electrode arrangement for scanning tunnelling microscope recording and reading |
WO1993011413A1 (en) * | 1991-11-26 | 1993-06-10 | The Australian National University | Piezoelectric bimorph cantilevers for surface analysis instruments |
DE59205351D1 (de) * | 1991-12-05 | 1996-03-28 | Hoffmann La Roche | Mikromechanisches Verfahren zur Strukturierung einer Polymer-Orientierungsschicht |
JP3029916B2 (ja) * | 1992-03-07 | 2000-04-10 | キヤノン株式会社 | 情報処理装置 |
JP2917674B2 (ja) * | 1992-06-03 | 1999-07-12 | 松下電器産業株式会社 | 走査トンネル顕微鏡用探針およびその製造方法 |
US5412980A (en) * | 1992-08-07 | 1995-05-09 | Digital Instruments, Inc. | Tapping atomic force microscope |
USRE36488E (en) * | 1992-08-07 | 2000-01-11 | Veeco Instruments Inc. | Tapping atomic force microscope with phase or frequency detection |
JP3025120B2 (ja) * | 1992-12-21 | 2000-03-27 | キヤノン株式会社 | 記録再生装置 |
DE4310349C2 (de) * | 1993-03-30 | 2000-11-16 | Inst Mikrotechnik Mainz Gmbh | Sensorkopf und Verfahren zu seiner Herstellung |
US5450746A (en) * | 1993-10-12 | 1995-09-19 | The University Of North Carolina | Constant force stylus profiling apparatus and method |
US6337479B1 (en) * | 1994-07-28 | 2002-01-08 | Victor B. Kley | Object inspection and/or modification system and method |
US6339217B1 (en) * | 1995-07-28 | 2002-01-15 | General Nanotechnology Llc | Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
US5751683A (en) * | 1995-07-24 | 1998-05-12 | General Nanotechnology, L.L.C. | Nanometer scale data storage device and associated positioning system |
US5565625A (en) * | 1994-12-01 | 1996-10-15 | Analog Devices, Inc. | Sensor with separate actuator and sense fingers |
US6507553B2 (en) | 1995-07-24 | 2003-01-14 | General Nanotechnology Llc | Nanometer scale data storage device and associated positioning system |
US5874668A (en) * | 1995-10-24 | 1999-02-23 | Arch Development Corporation | Atomic force microscope for biological specimens |
JPH09196933A (ja) * | 1996-01-19 | 1997-07-31 | Canon Inc | プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置 |
US5808435A (en) * | 1996-05-28 | 1998-09-15 | Kmy Instruments | Micropositioning device for disk head testing system |
DE19701701A1 (de) * | 1997-01-21 | 1998-07-23 | Zeiss Carl Fa | Sondenarray für ein Rastersondenmikroskop |
US6093330A (en) * | 1997-06-02 | 2000-07-25 | Cornell Research Foundation, Inc. | Microfabrication process for enclosed microstructures |
US5903085A (en) * | 1997-06-18 | 1999-05-11 | Phase Metrics, Inc. | Piezoelectric nanopositioner |
US6923044B1 (en) | 2001-03-08 | 2005-08-02 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
US6752008B1 (en) | 2001-03-08 | 2004-06-22 | General Nanotechnology Llc | Method and apparatus for scanning in scanning probe microscopy and presenting results |
US6802646B1 (en) * | 2001-04-30 | 2004-10-12 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
US7196328B1 (en) | 2001-03-08 | 2007-03-27 | General Nanotechnology Llc | Nanomachining method and apparatus |
US6787768B1 (en) | 2001-03-08 | 2004-09-07 | General Nanotechnology Llc | Method and apparatus for tool and tip design for nanomachining and measurement |
US6180536B1 (en) | 1998-06-04 | 2001-01-30 | Cornell Research Foundation, Inc. | Suspended moving channels and channel actuators for microfluidic applications and method for making |
US6369385B1 (en) * | 1999-05-05 | 2002-04-09 | Applied Materials, Inc. | Integrated microcolumn and scanning probe microscope arrays |
EP1196939A4 (de) * | 1999-07-01 | 2002-09-18 | Gen Nanotechnology Llc | Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt |
US6674141B1 (en) * | 2000-08-01 | 2004-01-06 | Hrl Laboratories, Llc | Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
US6563184B1 (en) * | 2000-08-01 | 2003-05-13 | Hrl Laboratories, Llc | Single crystal tunneling sensor or switch with silicon beam structure and a method of making same |
US6630367B1 (en) | 2000-08-01 | 2003-10-07 | Hrl Laboratories, Llc | Single crystal dual wafer, tunneling sensor and a method of making same |
US6555404B1 (en) * | 2000-08-01 | 2003-04-29 | Hrl Laboratories, Llc | Method of manufacturing a dual wafer tunneling gyroscope |
US6580138B1 (en) | 2000-08-01 | 2003-06-17 | Hrl Laboratories, Llc | Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same |
US6931710B2 (en) * | 2001-01-30 | 2005-08-23 | General Nanotechnology Llc | Manufacturing of micro-objects such as miniature diamond tool tips |
US6590850B2 (en) * | 2001-03-07 | 2003-07-08 | Hewlett-Packard Development Company, L.P. | Packaging for storage devices using electron emissions |
US7253407B1 (en) | 2001-03-08 | 2007-08-07 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
US7053369B1 (en) | 2001-10-19 | 2006-05-30 | Rave Llc | Scan data collection for better overall data accuracy |
US6813937B2 (en) | 2001-11-28 | 2004-11-09 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
JP2005538855A (ja) | 2002-09-09 | 2005-12-22 | ジェネラル ナノテクノロジー エルエルシー | 走査型プローブ顕微鏡の流体送達 |
US20050128927A1 (en) * | 2003-12-15 | 2005-06-16 | Hewlett-Packard Development Co., L.P. | Electrostatic actuator for contact probe storage device |
US7436753B2 (en) | 2003-12-17 | 2008-10-14 | Mejia Robert G | Contact probe storage FET sensor |
US7423954B2 (en) * | 2003-12-17 | 2008-09-09 | Hewlett-Packard Development Company, L.P. | Contact probe storage sensor pod |
US7212487B2 (en) * | 2004-01-07 | 2007-05-01 | Hewlett-Packard Development Company, L.P. | Data readout arrangement |
FR2869027B1 (fr) * | 2004-04-15 | 2006-07-14 | Commissariat Energie Atomique | Systeme d'enregistrement comportant une couche memoire et un reseau de micro-pointes |
FR2880980B1 (fr) * | 2005-01-17 | 2007-03-16 | Commissariat Energie Atomique | Dispositif d'enregistrement de donnees comportant des micro-pointes dont l'ensemble des extremites libres forme une surface convexe et procede de fabrication |
US7212488B2 (en) | 2005-03-21 | 2007-05-01 | Hewlett-Packard Development Company, L.P. | Method and device enabling capacitive probe-based data storage readout |
WO2006110908A1 (en) * | 2005-04-15 | 2006-10-19 | University Of Florida Research Foundation, Inc. | Microactuator having multiple degrees of freedom |
JP2009534200A (ja) * | 2006-04-19 | 2009-09-24 | ノースウエスタン ユニバーシティ | 2次元ペン配列を有する並列リソグラフィのための物品 |
WO2016107534A1 (zh) * | 2014-12-29 | 2016-07-07 | 史拓莱姆有限公司 | 具有贴附式探针的检测装置 |
US20180321276A1 (en) * | 2015-11-03 | 2018-11-08 | Board Of Regents, The University Of Texas System | Metrology devices and methods for independently controlling a plurality of sensing probes |
US10712364B2 (en) | 2015-11-03 | 2020-07-14 | Board Of Regents, The University Of Texas Systems | Metrology devices for rapid specimen setup |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4520570A (en) * | 1983-12-30 | 1985-06-04 | International Business Machines Corporation | Piezoelectric x-y-positioner |
EP0194323B1 (de) * | 1985-03-07 | 1989-08-02 | International Business Machines Corporation | Tunneleffektabtastungsmikroskop |
US4747698A (en) * | 1986-04-30 | 1988-05-31 | International Business Machines Corp. | Scanning thermal profiler |
EP0247219B1 (de) * | 1986-05-27 | 1991-05-15 | International Business Machines Corporation | Speichereinheit mit direktem Zugriff |
EP0262253A1 (de) * | 1986-10-03 | 1988-04-06 | International Business Machines Corporation | Mikromechanische Fühlervorrichtung für atomare Kräfte |
US4906840A (en) * | 1988-01-27 | 1990-03-06 | The Board Of Trustees Of Leland Stanford Jr., University | Integrated scanning tunneling microscope |
JPH0792462B2 (ja) * | 1988-05-16 | 1995-10-09 | 三菱電機株式会社 | 走査型トンネル顕微鏡の微動機構 |
JPH0298896A (ja) * | 1988-10-05 | 1990-04-11 | Olympus Optical Co Ltd | 記憶装置 |
US4947042A (en) * | 1988-12-13 | 1990-08-07 | Mitsubishi Denki Kabushiki Kaisha | Tunnel unit and scanning head for scanning tunneling microscope |
DE69002774T2 (de) * | 1989-02-09 | 1994-02-10 | Olympus Optical Co | Rastertunnelmikroskop-Speichergerät. |
-
1989
- 1989-06-20 US US07/368,664 patent/US5015850A/en not_active Expired - Lifetime
-
1990
- 1990-06-14 DE DE69028777T patent/DE69028777T2/de not_active Expired - Fee Related
- 1990-06-14 JP JP2509304A patent/JP2561389B2/ja not_active Expired - Lifetime
- 1990-06-14 WO PCT/US1990/003273 patent/WO1990015986A1/en active IP Right Grant
- 1990-06-14 EP EP90909991A patent/EP0478666B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2561389B2 (ja) | 1996-12-04 |
EP0478666A4 (en) | 1993-07-28 |
WO1990015986A1 (en) | 1990-12-27 |
JPH03504418A (ja) | 1991-09-26 |
EP0478666B1 (de) | 1996-10-02 |
US5015850A (en) | 1991-05-14 |
EP0478666A1 (de) | 1992-04-08 |
DE69028777D1 (de) | 1996-11-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |