DE69229432D1 - Probenhalter für Elektronenmikroskop - Google Patents

Probenhalter für Elektronenmikroskop

Info

Publication number
DE69229432D1
DE69229432D1 DE69229432T DE69229432T DE69229432D1 DE 69229432 D1 DE69229432 D1 DE 69229432D1 DE 69229432 T DE69229432 T DE 69229432T DE 69229432 T DE69229432 T DE 69229432T DE 69229432 D1 DE69229432 D1 DE 69229432D1
Authority
DE
Germany
Prior art keywords
electron microscope
sample holder
holder
sample
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69229432T
Other languages
English (en)
Other versions
DE69229432T2 (de
Inventor
Takashi Aoyama
Kishu Hosoi
Yutaka Misawa
Koji Kimoto
Shigeto Isakozawa
Kazuhiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE69229432D1 publication Critical patent/DE69229432D1/de
Application granted granted Critical
Publication of DE69229432T2 publication Critical patent/DE69229432T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
DE69229432T 1991-10-24 1992-10-22 Probenhalter für Elektronenmikroskop Expired - Lifetime DE69229432T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27745091 1991-10-24
JP15913392 1992-06-18

Publications (2)

Publication Number Publication Date
DE69229432D1 true DE69229432D1 (de) 1999-07-22
DE69229432T2 DE69229432T2 (de) 2000-02-17

Family

ID=26486021

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69229432T Expired - Lifetime DE69229432T2 (de) 1991-10-24 1992-10-22 Probenhalter für Elektronenmikroskop

Country Status (3)

Country Link
US (1) US5367171A (de)
EP (1) EP0538861B1 (de)
DE (1) DE69229432T2 (de)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
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US5698856A (en) * 1996-08-05 1997-12-16 Frasca; Peter Specimen holder for electron microscope
US5898177A (en) * 1996-08-08 1999-04-27 Hitachi, Ltd. Electron microscope
US5753924A (en) * 1997-03-12 1998-05-19 Gatan, Inc. Ultra-high tilt specimen cryotransfer holder for electron microscope
JP3663056B2 (ja) * 1998-07-23 2005-06-22 株式会社日立製作所 電子顕微鏡用試料加熱ホルダ及び試料観察方法
WO2000010191A1 (en) 1998-08-12 2000-02-24 Gatan, Inc. Double tilt and rotate specimen holder for a transmission electron microscope
US6198299B1 (en) 1998-08-27 2001-03-06 The Micromanipulator Company, Inc. High Resolution analytical probe station
US6744268B2 (en) 1998-08-27 2004-06-01 The Micromanipulator Company, Inc. High resolution analytical probe station
US6140652A (en) * 1998-09-09 2000-10-31 Intersil Corporation Device containing sample preparation sites for transmission electron microscopic analysis and processes of formation and use
JP2001015056A (ja) * 1999-04-28 2001-01-19 Canon Inc 試料ホルダーおよび該試料ホルダーに用いるスペーサー
JP3383842B2 (ja) * 2000-04-28 2003-03-10 北海道大学長 散乱ターゲット保持機構及び電子スピン分析器
DE10212807A1 (de) * 2002-03-22 2003-10-02 Leo Elektronenmikroskopie Gmbh Manipulator für ein optisches oder teilchenoptisches Gerät
NL1020936C2 (nl) 2002-06-25 2003-12-30 Univ Delft Tech Preparaathouder voor een elektronenmicroscoop, samenstel van een preparaathouder en een elektronenmicroscoop en werkwijze voor het reduceren van thermische drift in een elektronenmicroscoop.
GB0318134D0 (en) * 2003-08-01 2003-09-03 Gatan Uk Specimen tip and tip holder assembly
WO2005093485A1 (ja) * 2004-03-29 2005-10-06 Research Organization Of Information And Systems 試料温度調節装置
US20060025002A1 (en) * 2004-07-28 2006-02-02 The Board Of Trustees Of The University Of Illinois TEM MEMS device holder and method of fabrication
US7759656B1 (en) 2006-03-01 2010-07-20 South Bay Technology, Inc. Dual air particle sample cassette and methods for using same
US8288737B1 (en) 2007-04-23 2012-10-16 South Bay Technology, Inc. Ion sputter removal from thin microscopy samples with ions extracted from an RF generated plasma
US9312097B2 (en) * 2007-05-09 2016-04-12 Protochips, Inc. Specimen holder used for mounting samples in electron microscopes
DK2153461T3 (en) 2007-05-09 2015-07-13 Protochips Inc Microscopy Support structures
JP4991390B2 (ja) * 2007-05-21 2012-08-01 株式会社日立ハイテクノロジーズ マイクロサンプル加熱用試料台
US8513621B2 (en) * 2008-03-17 2013-08-20 Protochips, Inc. Specimen holder used for mounting
WO2009116696A1 (en) * 2008-03-21 2009-09-24 Korea Basic Science Institute An apparatus for measuring the temperature of cyro em-holder specimen cradle and a method using it
US8058627B2 (en) * 2008-08-13 2011-11-15 Wisys Technology Foundation Addressable transmission electron microscope grid
WO2010116809A1 (ja) * 2009-04-07 2010-10-14 Anbe Yoshinobu Ｘ線検査用加熱装置
WO2011038062A2 (en) * 2009-09-24 2011-03-31 Protochips, Inc. Methods of using temperature control devices in electron microscopy
EP2504671B1 (de) 2009-11-27 2020-04-08 Bruker Nano, Inc. Mikro-elektromechanischer erhitzer
US8631687B2 (en) 2010-04-19 2014-01-21 Hysitron, Inc. Indenter assembly
JP6014036B2 (ja) 2010-08-02 2016-10-25 プロトチップス，インコーポレイテッド ２つの半導体デバイスでガスまたは液体セルを形成するための電子顕微鏡サンプルホルダ
JP5532425B2 (ja) * 2010-08-27 2014-06-25 株式会社日立ハイテクノロジーズ 荷電粒子装置用試料ホルダ
US9476816B2 (en) 2011-11-14 2016-10-25 Hysitron, Inc. Probe tip heating assembly
WO2013082145A1 (en) 2011-11-28 2013-06-06 Yunje Oh High temperature heating system
JP6108674B2 (ja) * 2012-03-16 2017-04-05 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置及び試料搬送装置
JP5963955B2 (ja) 2012-06-13 2016-08-03 ハイジトロン, インク.Hysitron, Inc. ミクロンまたはナノスケールでの機械的試験用環境コンディショニングアセンブリ
NL2009469C2 (en) * 2012-09-14 2014-03-18 Denssolutions B V Double tilt holder and multicontact device.
JP2016501428A (ja) 2012-11-16 2016-01-18 プロトチップス，インコーポレイテッド 電子顕微鏡ホルダにおいて試料支持体への電気的接続を形成する方法
USD794816S1 (en) * 2013-10-24 2017-08-15 Hitachi High-Technologies Corporation Sample holder for an electron microscope
WO2015145706A1 (ja) * 2014-03-28 2015-10-01 株式会社 日立ハイテクノロジーズ 荷電粒子線装置用試料ホルダおよび荷電粒子線装置
US9466459B2 (en) 2014-06-03 2016-10-11 Protochips, Inc. Method for optimizing fluid flow across a sample within an electron microscope sample holder
USD806892S1 (en) * 2014-06-18 2018-01-02 Protochips, Inc. Tip of a sample holder
CN107835943B (zh) 2015-03-23 2021-02-12 纳米力学有限公司 实现温度变化期间的尺寸稳定性的结构
EP4276879A3 (de) 2015-08-31 2024-02-14 Protochips, Inc. Mems-rahmenheizplattform für elektronenverschädigbare flüssigkeitsreservoirs oder grössere leitfähige proben
WO2019010390A1 (en) * 2017-07-06 2019-01-10 Protochips, Inc. ELECTRONIC MICROSCOPE SAMPLE HOLDER FLUID MANAGEMENT WITH INDEPENDENT PRESSURE AND FLOW CONTROL
JP6471254B1 (ja) * 2018-04-10 2019-02-13 株式会社メルビル 試料ホルダー

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2126625A1 (de) * 1971-05-25 1972-12-07 Siemens Ag Korpuskularstrahlgerät, insbesondere Elektronenmikroskop
US3896314A (en) * 1972-12-14 1975-07-22 Jeol Ltd Specimen heating and positioning device for an electron microscope
DE3374490D1 (en) * 1982-04-20 1987-12-17 Univ Glasgow Low temperature stage for microanalysis
US4703181A (en) * 1986-04-07 1987-10-27 Gatan Inc. Anti-drift device for side entry electron microscope specimen holders
JPS63193447A (ja) * 1987-02-03 1988-08-10 Nissin Electric Co Ltd 試料保持装置
US4797261A (en) * 1987-11-03 1989-01-10 Gatan Inc. Multiple specimen cryotransfer holder for electron microscopes
KR0152969B1 (ko) * 1989-05-18 1998-10-15 브루스 이. 버딕 개선된 차아염소산칼슘 생성물
US4950901A (en) * 1989-11-06 1990-08-21 Gatan, Incorporated Specimen cooling holder for side entry transmission electron microscopes
US4996433A (en) * 1989-11-06 1991-02-26 Gatan, Inc. Specimen heating holder for electron microscopes
NL8902727A (nl) * 1989-11-06 1991-06-03 Philips Nv Objecthouder voor ondersteuning van een object in een geladen deeltjesbundelsysteem.

Also Published As

Publication number Publication date
US5367171A (en) 1994-11-22
DE69229432T2 (de) 2000-02-17
EP0538861A1 (de) 1993-04-28
EP0538861B1 (de) 1999-06-16

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