DE68921237D1 - Maskenstruktur für Lithographie und Einpassvorrichtung dafür. - Google Patents
Maskenstruktur für Lithographie und Einpassvorrichtung dafür.Info
- Publication number
- DE68921237D1 DE68921237D1 DE68921237T DE68921237T DE68921237D1 DE 68921237 D1 DE68921237 D1 DE 68921237D1 DE 68921237 T DE68921237 T DE 68921237T DE 68921237 T DE68921237 T DE 68921237T DE 68921237 D1 DE68921237 D1 DE 68921237D1
- Authority
- DE
- Germany
- Prior art keywords
- lithography
- fitting device
- mask structure
- device therefor
- therefor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001459 lithography Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7007—Alignment other than original with workpiece
- G03F9/7011—Pre-exposure scan; original with original holder alignment; Prealignment, i.e. workpiece with workpiece holder
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63107061A JPH01278019A (ja) | 1988-04-28 | 1988-04-28 | リソグラフィ用マスクの構造体 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68921237D1 true DE68921237D1 (de) | 1995-03-30 |
DE68921237T2 DE68921237T2 (de) | 1995-07-20 |
Family
ID=14449504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68921237T Expired - Fee Related DE68921237T2 (de) | 1988-04-28 | 1989-04-26 | Maskenstruktur für Lithographie und Einpassvorrichtung dafür. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5042945A (de) |
EP (1) | EP0339953B1 (de) |
JP (1) | JPH01278019A (de) |
DE (1) | DE68921237T2 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04332115A (ja) * | 1991-05-02 | 1992-11-19 | Shin Etsu Chem Co Ltd | X線リソグラフィ−マスク用x線透過膜 |
JP3012069B2 (ja) * | 1991-12-04 | 2000-02-21 | キヤノン株式会社 | X線露光用マスク構造体及びこれを用いたx線露光装置 |
JP2746511B2 (ja) * | 1993-03-04 | 1998-05-06 | 信越半導体株式会社 | 単結晶インゴットのオリエンテーションフラット幅測定方法 |
US5436721A (en) * | 1993-06-04 | 1995-07-25 | Advanced Micro Devices, Inc. | Wafer tilt gauge |
US5383016A (en) * | 1993-07-15 | 1995-01-17 | At&T Corp. | Method for aligning two reflective surfaces |
JPH098103A (ja) * | 1995-06-19 | 1997-01-10 | Nikon Corp | 投影露光装置及び投影露光方法 |
US5982481A (en) * | 1996-10-01 | 1999-11-09 | Mcdonnell Douglas Corporation | Alignment system and method for dish concentrators |
US5874770A (en) * | 1996-10-10 | 1999-02-23 | General Electric Company | Flexible interconnect film including resistor and capacitor layers |
US5760483A (en) * | 1996-12-23 | 1998-06-02 | International, Business Machines Corporation | Method for improving visibility of alignment targets in semiconductor processing |
US6162564A (en) * | 1997-11-25 | 2000-12-19 | Kabushiki Kaisha Toshiba | Mask blank and method of producing mask |
US6083806A (en) * | 1998-07-06 | 2000-07-04 | Motorola, Inc. | Method of forming an alignment mark |
US6630746B1 (en) | 2000-05-09 | 2003-10-07 | Motorola, Inc. | Semiconductor device and method of making the same |
JP4635610B2 (ja) * | 2005-01-07 | 2011-02-23 | 凸版印刷株式会社 | 反射型フォトマスクブランク、反射型フォトマスク、及び反射型フォトマスクの製造方法 |
JP4855060B2 (ja) * | 2005-12-14 | 2012-01-18 | 独立行政法人科学技術振興機構 | 光学素子製造方法 |
JP5801796B2 (ja) * | 2010-03-31 | 2015-10-28 | Hoya株式会社 | レンズ形状測定装置 |
TR201811449T4 (tr) * | 2012-11-07 | 2018-09-21 | Artec Europe S A R L | Üç boyutlu nesnelerin doğrusal boyutlarını gözetlemek için yöntem. |
CN105452802B (zh) * | 2013-07-19 | 2019-02-01 | 株式会社尼康 | 形状测定装置、构造物制造系统、形状测定方法、构造物制造方法、形状测定程序、以及记录介质 |
US20170052024A1 (en) * | 2015-08-21 | 2017-02-23 | Adcole Corporation | Optical profiler and methods of use thereof |
JP6516665B2 (ja) * | 2015-10-29 | 2019-05-22 | 信越化学工業株式会社 | Euvリソグラフィー用ペリクルに適した接着剤とこれを用いたペリクル |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3449961A (en) * | 1964-12-28 | 1969-06-17 | Gen Electric | Optical readout systems |
US3583815A (en) * | 1969-05-01 | 1971-06-08 | Nasa | Angular displacement indicating gas bearing support system |
US3657792A (en) * | 1970-11-13 | 1972-04-25 | Identicon Corp | Scanning mirror alignment techniques |
US3695767A (en) * | 1970-11-18 | 1972-10-03 | Burroughs Corp | Apparatus for measuring magnetic head angle of a magnetic disc file |
US3954339A (en) * | 1974-08-22 | 1976-05-04 | The Perkin-Elmer Corporation | Angular sensor |
US4573791A (en) * | 1979-04-03 | 1986-03-04 | Optimetrix Corporation | Step-and-repeat projection alignment and exposure system |
JPS5610928A (en) * | 1979-07-07 | 1981-02-03 | Shinetsu Sekiei Kk | Preparation of electronic device |
US4298281A (en) * | 1979-07-16 | 1981-11-03 | Libbey-Owens-Ford Company | Laser system for aligning conveyor rolls |
US4801208A (en) * | 1984-11-19 | 1989-01-31 | Nikon Corporation | Projection type exposing apparatus |
-
1988
- 1988-04-28 JP JP63107061A patent/JPH01278019A/ja active Pending
-
1989
- 1989-04-26 DE DE68921237T patent/DE68921237T2/de not_active Expired - Fee Related
- 1989-04-26 EP EP89304136A patent/EP0339953B1/de not_active Expired - Lifetime
- 1989-04-26 US US07/343,386 patent/US5042945A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0339953A2 (de) | 1989-11-02 |
JPH01278019A (ja) | 1989-11-08 |
US5042945A (en) | 1991-08-27 |
EP0339953A3 (en) | 1990-10-24 |
DE68921237T2 (de) | 1995-07-20 |
EP0339953B1 (de) | 1995-02-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |