DE69702641D1 - Belichtungssystem und belichtungsgerät für uv-lithographie - Google Patents

Belichtungssystem und belichtungsgerät für uv-lithographie

Info

Publication number
DE69702641D1
DE69702641D1 DE69702641T DE69702641T DE69702641D1 DE 69702641 D1 DE69702641 D1 DE 69702641D1 DE 69702641 T DE69702641 T DE 69702641T DE 69702641 T DE69702641 T DE 69702641T DE 69702641 D1 DE69702641 D1 DE 69702641D1
Authority
DE
Germany
Prior art keywords
exposure
lithography
exposure device
exposure system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69702641T
Other languages
English (en)
Other versions
DE69702641T2 (de
Inventor
Johannes Braat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Application granted granted Critical
Publication of DE69702641D1 publication Critical patent/DE69702641D1/de
Publication of DE69702641T2 publication Critical patent/DE69702641T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0891—Ultraviolet [UV] mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0657—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
DE69702641T 1996-03-07 1997-02-13 Belichtungssystem und belichtungsgerät für uv-lithographie Expired - Fee Related DE69702641T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP96200619 1996-03-07
PCT/IB1997/000121 WO1997033203A1 (en) 1996-03-07 1997-02-13 Imaging system and apparatus for ultraviolet lithography

Publications (2)

Publication Number Publication Date
DE69702641D1 true DE69702641D1 (de) 2000-08-31
DE69702641T2 DE69702641T2 (de) 2001-04-05

Family

ID=8223752

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69702641T Expired - Fee Related DE69702641T2 (de) 1996-03-07 1997-02-13 Belichtungssystem und belichtungsgerät für uv-lithographie

Country Status (6)

Country Link
US (1) US5757017A (de)
EP (1) EP0824721B1 (de)
JP (1) JPH11506876A (de)
DE (1) DE69702641T2 (de)
TW (1) TW335459B (de)
WO (1) WO1997033203A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020171922A1 (en) * 2000-10-20 2002-11-21 Nikon Corporation Multilayer reflective mirrors for EUV, wavefront-aberration-correction methods for same, and EUV optical systems comprising same
JP4524976B2 (ja) * 2001-09-13 2010-08-18 株式会社ニコン 多層膜反射鏡の製造方法
US20030081722A1 (en) * 2001-08-27 2003-05-01 Nikon Corporation Multilayer-film mirrors for use in extreme UV optical systems, and methods for manufacturing such mirrors exhibiting improved wave aberrations
WO2004057378A1 (de) * 2002-12-19 2004-07-08 Carl Zeiss Smt Ag Beschichtetes optisches element mit korrekturwirkung durch erzeugung einer schichtdickenvariation oder brechzahlvariation in der beschichtung
DE10309084A1 (de) 2003-03-03 2004-09-16 Carl Zeiss Smt Ag Reflektives optisches Element und EUV-Lithographiegerät
DE10319005A1 (de) 2003-04-25 2004-11-25 Carl Zeiss Smt Ag Reflektives optisches Element, optisches System und EUV-Lithographievorrichtung
JP2005012006A (ja) * 2003-06-19 2005-01-13 Canon Inc 表面形状補正方法
US7297960B2 (en) 2003-11-17 2007-11-20 Micromass Uk Limited Mass spectrometer
DE10360414A1 (de) * 2003-12-19 2005-07-21 Carl Zeiss Smt Ag EUV-Projektionsobjektiv sowie Verfahren zu dessen Herstellung
US7277231B2 (en) 2004-04-02 2007-10-02 Carl Zeiss Smt Ag Projection objective of a microlithographic exposure apparatus
US8064041B2 (en) 2004-06-10 2011-11-22 Carl Zeiss Smt Gmbh Projection objective for a microlithographic projection exposure apparatus
US7224430B2 (en) * 2004-10-29 2007-05-29 Asml Netherlands B.V. Optical component, optical system including such an optical component, lithographic apparatus, method of correcting apodization in an optical system, device manufacturing method, and device manufactured thereby
EP1746463A2 (de) 2005-07-01 2007-01-24 Carl Zeiss SMT AG Verfahren zum Korrigieren eines lithographischen Projektionsobjektivs und derartiges Projektionsobjektiv
US7948675B2 (en) * 2005-10-11 2011-05-24 Nikon Corporation Surface-corrected multilayer-film mirrors with protected reflective surfaces, exposure systems comprising same, and associated methods
US7599112B2 (en) * 2005-10-11 2009-10-06 Nikon Corporation Multilayer-film mirrors, lithography systems comprising same, and methods for manufacturing same
CN101479667B (zh) 2006-07-03 2011-12-07 卡尔蔡司Smt有限责任公司 修正/修复光刻投影物镜的方法
CN101548240B (zh) * 2006-12-01 2014-09-17 卡尔蔡司Smt有限责任公司 具有用于减小像差的可替换、可操纵的校正布置的光学系统
US8163632B2 (en) 2006-12-04 2012-04-24 Carl Zeiss Smt Gmbh Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements
DE102007009867A1 (de) * 2007-02-28 2008-09-11 Carl Zeiss Smt Ag Abbildungsvorrichtung mit auswechselbaren Blenden sowie Verfahren hierzu
US20090097004A1 (en) * 2007-10-16 2009-04-16 Qimonda Ag Lithography Apparatus, Masks for Non-Telecentric Exposure and Methods of Manufacturing Integrated Circuits
DE102013212462A1 (de) 2013-06-27 2015-01-15 Carl Zeiss Smt Gmbh Oberflächenkorrektur von Spiegeln mit Entkopplungsbeschichtung
DE102015213249A1 (de) 2015-07-15 2017-01-19 Carl Zeiss Smt Gmbh Verfahren zum Herstellen eines Spiegels, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage
DE102015224238A1 (de) 2015-12-03 2016-12-15 Carl Zeiss Smt Gmbh Optisches Element, Projektionssystem und EUV-Lithographiesystem damit und Verfahren zur Korrektur einer Oberflächenform
DE102021201193A1 (de) * 2021-02-09 2022-08-11 Carl Zeiss Smt Gmbh Verfahren zur Justage eines optischen Systems, insbesondere für die Mikrolithographie

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038681B2 (ja) * 1978-09-27 1985-09-02 キヤノン株式会社 紫外用多層膜
JPS60181704A (ja) * 1984-02-29 1985-09-17 Canon Inc 真空紫外用反射ミラー
US4846552A (en) * 1986-04-16 1989-07-11 The United States Of America As Represented By The Secretary Of The Air Force Method of fabricating high efficiency binary planar optical elements
DE3856054T2 (de) * 1987-02-18 1998-03-19 Canon Kk Reflexionsmaske
JP3036081B2 (ja) * 1990-12-01 2000-04-24 株式会社日立製作所 電子線描画装置及び方法、及びその試料面高さ測定装置
JP3259373B2 (ja) * 1992-11-27 2002-02-25 株式会社日立製作所 露光方法及び露光装置
US5510230A (en) * 1994-10-20 1996-04-23 At&T Corp. Device fabrication using DUV/EUV pattern delineation

Also Published As

Publication number Publication date
JPH11506876A (ja) 1999-06-15
US5757017A (en) 1998-05-26
DE69702641T2 (de) 2001-04-05
EP0824721B1 (de) 2000-07-26
EP0824721A1 (de) 1998-02-25
TW335459B (en) 1998-07-01
WO1997033203A1 (en) 1997-09-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee