DE68918771T2 - Elektrisch löschbare und elektrisch programmierbare Nurlesespeicherzelle mit einem selbstjustierten Tunneleffekt-Fenster. - Google Patents

Elektrisch löschbare und elektrisch programmierbare Nurlesespeicherzelle mit einem selbstjustierten Tunneleffekt-Fenster.

Info

Publication number
DE68918771T2
DE68918771T2 DE68918771T DE68918771T DE68918771T2 DE 68918771 T2 DE68918771 T2 DE 68918771T2 DE 68918771 T DE68918771 T DE 68918771T DE 68918771 T DE68918771 T DE 68918771T DE 68918771 T2 DE68918771 T2 DE 68918771T2
Authority
DE
Germany
Prior art keywords
self
memory cell
programmable read
electrically
tunnel effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68918771T
Other languages
English (en)
Other versions
DE68918771D1 (de
Inventor
Manzur Gill
Sung Wei Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE68918771D1 publication Critical patent/DE68918771D1/de
Publication of DE68918771T2 publication Critical patent/DE68918771T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881—Programmable transistors with only two possible levels of programmation
    • H01L29/7883—Programmable transistors with only two possible levels of programmation charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C8/00—Arrangements for selecting an address in a digital store
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
DE68918771T 1988-07-15 1989-07-04 Elektrisch löschbare und elektrisch programmierbare Nurlesespeicherzelle mit einem selbstjustierten Tunneleffekt-Fenster. Expired - Fee Related DE68918771T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US21952988A 1988-07-15 1988-07-15

Publications (2)

Publication Number Publication Date
DE68918771D1 DE68918771D1 (de) 1994-11-17
DE68918771T2 true DE68918771T2 (de) 1995-02-16

Family

ID=22819640

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68918771T Expired - Fee Related DE68918771T2 (de) 1988-07-15 1989-07-04 Elektrisch löschbare und elektrisch programmierbare Nurlesespeicherzelle mit einem selbstjustierten Tunneleffekt-Fenster.

Country Status (4)

Country Link
EP (1) EP0350771B1 (de)
JP (1) JP2810708B2 (de)
KR (1) KR0139806B1 (de)
DE (1) DE68918771T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1252214B (it) * 1991-12-13 1995-06-05 Sgs Thomson Microelectronics Procedimento per la definizione di porzioni di ossido sottile particolarmente per celle di memoria a sola lettura programmabili e cancellabile elettricamente.
JP5415135B2 (ja) * 2009-04-16 2014-02-12 株式会社東芝 不揮発性半導体記憶装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4466174A (en) * 1981-12-28 1984-08-21 Texas Instruments Incorporated Method for fabricating MESFET device using a double LOCOS process
JPS59112657A (ja) * 1982-09-30 1984-06-29 フエアチアイルド・カメラ・アンド・インストルメント・コ−ポレ−シヨン 書込可能なリ−ドオンリ−メモリ
DE3481667D1 (de) * 1983-08-29 1990-04-19 Seeq Technology Inc Mos-speicherzelle mit schwimmendem gate und verfahren zu ihrer verfertigung.
FR2620847A1 (fr) * 1987-09-18 1989-03-24 Thomson Semiconducteurs Procede d'auto-alignement des grilles flottantes de transistors a grille flottante d'une memoire non volatile et memoire obtenue selon ce procede

Also Published As

Publication number Publication date
EP0350771A2 (de) 1990-01-17
EP0350771B1 (de) 1994-10-12
KR0139806B1 (ko) 1998-07-15
EP0350771A3 (de) 1992-09-02
DE68918771D1 (de) 1994-11-17
KR900002313A (ko) 1990-02-28
JPH02161778A (ja) 1990-06-21
JP2810708B2 (ja) 1998-10-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee