DE68917381T2 - Massenspektrometer. - Google Patents

Massenspektrometer.

Info

Publication number
DE68917381T2
DE68917381T2 DE68917381T DE68917381T DE68917381T2 DE 68917381 T2 DE68917381 T2 DE 68917381T2 DE 68917381 T DE68917381 T DE 68917381T DE 68917381 T DE68917381 T DE 68917381T DE 68917381 T2 DE68917381 T2 DE 68917381T2
Authority
DE
Germany
Prior art keywords
mass spectrometry
spectrometry
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68917381T
Other languages
English (en)
Other versions
DE68917381D1 (de
Inventor
Yasuhiro Mitsui
Keiji Hasumi
Shinichiro Watase
Katsumi Kuriyama
Kazuo Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Tokyo Electronics Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tokyo Electronics Co Ltd, Hitachi Ltd filed Critical Hitachi Tokyo Electronics Co Ltd
Application granted granted Critical
Publication of DE68917381D1 publication Critical patent/DE68917381D1/de
Publication of DE68917381T2 publication Critical patent/DE68917381T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
DE68917381T 1988-06-01 1989-05-30 Massenspektrometer. Expired - Lifetime DE68917381T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63132765A JP2735222B2 (ja) 1988-06-01 1988-06-01 質量分析計

Publications (2)

Publication Number Publication Date
DE68917381D1 DE68917381D1 (de) 1994-09-15
DE68917381T2 true DE68917381T2 (de) 1994-12-01

Family

ID=15089032

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68917381T Expired - Lifetime DE68917381T2 (de) 1988-06-01 1989-05-30 Massenspektrometer.

Country Status (4)

Country Link
US (1) US4996422A (de)
EP (1) EP0345605B1 (de)
JP (1) JP2735222B2 (de)
DE (1) DE68917381T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007013693B4 (de) * 2006-03-22 2017-09-21 Exelis Inc. Ionennachweissystem mit Unterdrückung neutralen Rauschens

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2648616B1 (fr) * 1989-06-16 1991-12-13 Cit Alcatel Dispositif de traitement du signal recu par un multiplicateur d'electrons
JP2769205B2 (ja) * 1989-09-16 1998-06-25 株式会社日立製作所 粒子状物質の分析方法、その装置及びこれを利用した超純水製造管理システム
DE4019005C2 (de) * 1990-06-13 2000-03-09 Finnigan Mat Gmbh Vorrichtungen zur Analyse von Ionen hoher Masse
US5386115A (en) * 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5401963A (en) * 1993-11-01 1995-03-28 Rosemount Analytical Inc. Micromachined mass spectrometer
GB9604655D0 (en) * 1996-03-05 1996-05-01 Fisons Plc Mass spectrometer and detector apparatus therefor
US6828729B1 (en) 2000-03-16 2004-12-07 Burle Technologies, Inc. Bipolar time-of-flight detector, cartridge and detection method
US6958474B2 (en) * 2000-03-16 2005-10-25 Burle Technologies, Inc. Detector for a bipolar time-of-flight mass spectrometer
US6707034B1 (en) * 2002-08-29 2004-03-16 Hamamatsu Photonics K.K. Mass spectrometer and ion detector used therein
WO2005024882A2 (en) * 2003-09-05 2005-03-17 Griffin Analytical Technologies Ion detection methods, mass spectrometry analysis methods, and mass spectrometry instrument circuitry
US7624403B2 (en) * 2004-03-25 2009-11-24 Microsoft Corporation API for building semantically rich diagramming tools
DE112005001385T5 (de) 2004-06-15 2007-05-10 Griffin analytical Technologies Inc., West Lafayette Analyseinstrumente, -baugruppen und -verfahren
US8680461B2 (en) 2005-04-25 2014-03-25 Griffin Analytical Technologies, L.L.C. Analytical instrumentation, apparatuses, and methods
US7992424B1 (en) 2006-09-14 2011-08-09 Griffin Analytical Technologies, L.L.C. Analytical instrumentation and sample analysis methods
US8735810B1 (en) * 2013-03-15 2014-05-27 Virgin Instruments Corporation Time-of-flight mass spectrometer with ion source and ion detector electrically connected
JP7217189B2 (ja) * 2019-03-28 2023-02-02 株式会社日立ハイテク イオン検出装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2445711A1 (de) * 1973-10-03 1975-04-10 Hewlett Packard Co Ionen/elektronen-umwandler
US3898456A (en) * 1974-07-25 1975-08-05 Us Energy Electron multiplier-ion detector system
CA1076714A (en) * 1976-01-20 1980-04-29 Donald F. Hunt Positive and negative ion recording system for mass spectrometer
US4423324A (en) * 1977-04-22 1983-12-27 Finnigan Corporation Apparatus for detecting negative ions
US4507555A (en) * 1983-03-04 1985-03-26 Cherng Chang Parallel mass spectrometer
JPS6244946A (ja) * 1985-08-22 1987-02-26 Shimadzu Corp 荷電粒子等の検出器
JPS6297249A (ja) * 1985-10-24 1987-05-06 Nippon Telegr & Teleph Corp <Ntt> 二次イオン質量分析計
GB8603999D0 (en) * 1986-02-18 1986-03-26 Vg Instr Group Vacuum monitoring apparatus
GB8705289D0 (en) * 1987-03-06 1987-04-08 Vg Instr Group Mass spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007013693B4 (de) * 2006-03-22 2017-09-21 Exelis Inc. Ionennachweissystem mit Unterdrückung neutralen Rauschens

Also Published As

Publication number Publication date
EP0345605B1 (de) 1994-08-10
JP2735222B2 (ja) 1998-04-02
US4996422A (en) 1991-02-26
EP0345605A1 (de) 1989-12-13
DE68917381D1 (de) 1994-09-15
JPH01304649A (ja) 1989-12-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition