DE68913190T2 - EPROM, der eine mehrfache Verwendung der Bitleitungskontakte ermöglicht. - Google Patents

EPROM, der eine mehrfache Verwendung der Bitleitungskontakte ermöglicht.

Info

Publication number
DE68913190T2
DE68913190T2 DE68913190T DE68913190T DE68913190T2 DE 68913190 T2 DE68913190 T2 DE 68913190T2 DE 68913190 T DE68913190 T DE 68913190T DE 68913190 T DE68913190 T DE 68913190T DE 68913190 T2 DE68913190 T2 DE 68913190T2
Authority
DE
Germany
Prior art keywords
row
bit line
region
transistors
injector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68913190T
Other languages
English (en)
Other versions
DE68913190D1 (de
Inventor
Jan C O Int Octrooi Middelhoek
Gerrit-Jan C O Int Octr Hemink
Rutger Cornelis Marinu Wijburg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE68913190D1 publication Critical patent/DE68913190D1/de
Application granted granted Critical
Publication of DE68913190T2 publication Critical patent/DE68913190T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0491Virtual ground arrays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/788Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881Programmable transistors with only two possible levels of programmation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/788Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881Programmable transistors with only two possible levels of programmation
    • H01L29/7883Programmable transistors with only two possible levels of programmation charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B69/00Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
  • Read Only Memory (AREA)
DE68913190T 1989-03-31 1989-03-31 EPROM, der eine mehrfache Verwendung der Bitleitungskontakte ermöglicht. Expired - Fee Related DE68913190T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89200830A EP0389693B1 (de) 1989-03-31 1989-03-31 EPROM, der eine mehrfache Verwendung der Bitleitungskontakte ermöglicht

Publications (2)

Publication Number Publication Date
DE68913190D1 DE68913190D1 (de) 1994-03-24
DE68913190T2 true DE68913190T2 (de) 1994-08-04

Family

ID=8202352

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68913190T Expired - Fee Related DE68913190T2 (de) 1989-03-31 1989-03-31 EPROM, der eine mehrfache Verwendung der Bitleitungskontakte ermöglicht.

Country Status (6)

Country Link
US (1) US5017978A (de)
EP (1) EP0389693B1 (de)
JP (1) JP2967108B2 (de)
KR (1) KR0155375B1 (de)
AT (1) ATE101752T1 (de)
DE (1) DE68913190T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2624864B2 (ja) * 1990-02-28 1997-06-25 株式会社東芝 不揮発性半導体メモリ
US5358887A (en) * 1993-11-26 1994-10-25 United Microelectronics Corporation Ulsi mask ROM structure and method of manufacture
US5949704A (en) * 1996-09-10 1999-09-07 Macronix International Co., Ltd. Stacked read-only memory

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4112509A (en) * 1976-12-27 1978-09-05 Texas Instruments Incorporated Electrically alterable floating gate semiconductor memory device
US4184207A (en) * 1978-01-27 1980-01-15 Texas Instruments Incorporated High density floating gate electrically programmable ROM
US4281397A (en) * 1979-10-29 1981-07-28 Texas Instruments Incorporated Virtual ground MOS EPROM or ROM matrix
US4334292A (en) * 1980-05-27 1982-06-08 International Business Machines Corp. Low voltage electrically erasable programmable read only memory
EP0133667A3 (en) * 1983-08-12 1987-08-26 American Microsystems, Incorporated High coupling ratio dense electrically erasable programmable read-only memory
JPS60140600A (ja) * 1983-12-28 1985-07-25 Oki Electric Ind Co Ltd 不揮発性メモリ装置
FR2604022B1 (fr) * 1986-09-16 1992-09-11 Eurotechnique Sa Memoire non volatile a grille flottante sans oxyde epais
US4769788A (en) * 1986-09-22 1988-09-06 Ncr Corporation Shared line direct write nonvolatile memory cell array
JPS63252481A (ja) * 1987-04-09 1988-10-19 Toshiba Corp 不揮発性半導体メモリ
JPH01208795A (ja) * 1988-02-16 1989-08-22 Toshiba Corp 半導体記憶装置
US4912676A (en) * 1988-08-09 1990-03-27 Texas Instruments, Incorporated Erasable programmable memory

Also Published As

Publication number Publication date
DE68913190D1 (de) 1994-03-24
ATE101752T1 (de) 1994-03-15
US5017978A (en) 1991-05-21
JPH02294068A (ja) 1990-12-05
KR900015153A (ko) 1990-10-26
EP0389693B1 (de) 1994-02-16
JP2967108B2 (ja) 1999-10-25
EP0389693A1 (de) 1990-10-03
KR0155375B1 (ko) 1998-12-01

Similar Documents

Publication Publication Date Title
KR100223130B1 (ko) 판독전용 메모리장치 및 그 제조방법
KR860003659A (ko) 반도체집적회로장치
WO1979000461A1 (en) Complementary mis-semiconductor integrated circuits
TW200507240A (en) Semiconductor device and semiconductor memory device
EP1227519A3 (de) Herstellungsverfahren von integriertem Halbleiterschaltkreisbauelement mit Halbleiterfestwertspeicherbauelementen
EP0880144B1 (de) Festwertspeicher
ES8202178A1 (es) Una formacion de memoria electronica de circuito integrado
KR920010652A (ko) 비 휘발성 반도체 기억장치
KR880003332A (ko) 집적 메모리 회로
KR900017187A (ko) 반도체 기억장치
KR890012322A (ko) 소오스 라인 선택 트랜지스터를 구비한 플로팅게이트 eerrom 메모리
JPH07226446A (ja) 半導体装置及びその製造方法
KR870010550A (ko) 바이폴라 및 mos 장치를 갖춘 트랜스리니어 스태틱 메모리 셀
KR930003235A (ko) 마스터 슬라이스형 반도체 집적회로 장치의 기본셀 형성을 위한 트랜지스터 배치와 마스터 슬라이스형 반도체 집적회로 장치
DE68913190T2 (de) EPROM, der eine mehrfache Verwendung der Bitleitungskontakte ermöglicht.
KR880011923A (ko) 게이트 어레이 장치의 기본셀
KR900004018A (ko) 대규모 이피롬(eprom) 메모리
KR950012773A (ko) 불휘발성 반도체 기억 장치 및 그의 제조 방법
KR890001102A (ko) 펄스로 지울 수 있는 eprom 및 지우는 방법
KR890007427A (ko) 집적회로 메모리
KR890013895A (ko) 배선영역에 매입된 트랜지스터를 갖는 게이트 어레이
EP0003413A3 (de) Massnahmen zur Verbesserung eines Halbleiterspeichers
US4464734A (en) Semiconductor dynamic memory cell array with word lines extending into windows of capacitor plate
US6509592B2 (en) Ferroelectric memory
KR910003675A (ko) 워드-소거가능 매립 비트 라인 eeprom회로

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8339 Ceased/non-payment of the annual fee