DE60333416D1 - Ultraschallreinigungsmodul und Verfahren - Google Patents
Ultraschallreinigungsmodul und VerfahrenInfo
- Publication number
- DE60333416D1 DE60333416D1 DE60333416T DE60333416T DE60333416D1 DE 60333416 D1 DE60333416 D1 DE 60333416D1 DE 60333416 T DE60333416 T DE 60333416T DE 60333416 T DE60333416 T DE 60333416T DE 60333416 D1 DE60333416 D1 DE 60333416D1
- Authority
- DE
- Germany
- Prior art keywords
- chuck
- packages
- nozzle
- electronic packages
- ultrasonic cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000004506 ultrasonic cleaning Methods 0.000 title abstract 2
- 238000004140 cleaning Methods 0.000 abstract 2
- 239000012530 fluid Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0288—Ultra or megasonic jets
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Cleaning By Liquid Or Steam (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US37701802P | 2002-04-30 | 2002-04-30 | |
US10/413,602 US6949146B2 (en) | 2002-04-30 | 2003-04-14 | Ultrasonic cleaning module for singulated electronic packages |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60333416D1 true DE60333416D1 (de) | 2010-09-02 |
Family
ID=29219037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60333416T Expired - Lifetime DE60333416D1 (de) | 2002-04-30 | 2003-04-29 | Ultraschallreinigungsmodul und Verfahren |
Country Status (7)
Country | Link |
---|---|
US (1) | US6949146B2 (de) |
EP (1) | EP1358950B1 (de) |
JP (1) | JP2004006855A (de) |
KR (1) | KR100588252B1 (de) |
AT (1) | ATE474674T1 (de) |
DE (1) | DE60333416D1 (de) |
SG (1) | SG128506A1 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20050103916A (ko) * | 2003-02-04 | 2005-11-01 | 포워드 테크놀로지 에이 크레스트 그룹 컴퍼니 | 초음파 세척 탱크 |
US8978673B2 (en) * | 2007-08-09 | 2015-03-17 | Asm Assembly Automation Ltd | Megasonic cleaning system |
KR100873333B1 (ko) * | 2007-11-21 | 2008-12-10 | 세메스 주식회사 | 처리 유체 공급 장치 및 이를 포함하는 기판 처리 장치 |
JP2013169474A (ja) * | 2012-02-17 | 2013-09-02 | Mitsubishi Electric Corp | 異物除去方法、異物除去装置 |
JP6321912B2 (ja) * | 2013-03-29 | 2018-05-09 | 芝浦メカトロニクス株式会社 | 基板の洗浄処理装置及び洗浄処理方法 |
CN103456605B (zh) * | 2013-09-24 | 2016-02-10 | 深圳市凯尔迪光电科技有限公司 | 全自动半导体封装微尘清洗设备 |
CN106733906B (zh) * | 2016-11-30 | 2024-04-09 | 武汉大学深圳研究院 | 一种用于清洗太阳能电池板污垢的超声波清洗装置 |
US20190363018A1 (en) * | 2018-05-24 | 2019-11-28 | Semiconductor Components Industries, Llc | Die cleaning systems and related methods |
JP2020134289A (ja) * | 2019-02-19 | 2020-08-31 | キオクシア株式会社 | 半導体装置の検査方法及び検査装置 |
CN111889446A (zh) * | 2020-06-29 | 2020-11-06 | 中国电子科技集团公司第十三研究所 | 元器件水溶胶清洗机 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3369418B2 (ja) * | 1996-11-25 | 2003-01-20 | 大日本スクリーン製造株式会社 | 超音波振動子、超音波洗浄ノズル、超音波洗浄装置、基板洗浄装置、基板洗浄処理システムおよび超音波洗浄ノズル製造方法 |
US5803797A (en) * | 1996-11-26 | 1998-09-08 | Micron Technology, Inc. | Method and apparatus to hold intergrated circuit chips onto a chuck and to simultaneously remove multiple intergrated circuit chips from a cutting chuck |
JPH1154471A (ja) * | 1997-08-05 | 1999-02-26 | Tokyo Electron Ltd | 処理装置及び処理方法 |
JP2944598B2 (ja) * | 1997-11-21 | 1999-09-06 | 株式会社プレテック | 洗浄装置および精密基板を洗浄する方法 |
JP4388640B2 (ja) * | 1999-09-10 | 2009-12-24 | 株式会社ディスコ | Csp基板保持部材及び該csp基板保持部材が載置されるcsp基板用テーブル |
US6730176B2 (en) * | 2001-07-09 | 2004-05-04 | Birol Kuyel | Single wafer megasonic cleaner method, system, and apparatus |
US6746022B2 (en) * | 2001-12-26 | 2004-06-08 | Asm Assembly Automation Ltd. | Chuck for holding a workpiece |
-
2003
- 2003-04-14 US US10/413,602 patent/US6949146B2/en not_active Expired - Lifetime
- 2003-04-25 SG SG200504058A patent/SG128506A1/en unknown
- 2003-04-29 DE DE60333416T patent/DE60333416D1/de not_active Expired - Lifetime
- 2003-04-29 EP EP03252694A patent/EP1358950B1/de not_active Expired - Lifetime
- 2003-04-29 AT AT03252694T patent/ATE474674T1/de active
- 2003-04-30 JP JP2003125835A patent/JP2004006855A/ja active Pending
- 2003-04-30 KR KR1020030027392A patent/KR100588252B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP1358950B1 (de) | 2010-07-21 |
US20030200987A1 (en) | 2003-10-30 |
EP1358950A1 (de) | 2003-11-05 |
KR100588252B1 (ko) | 2006-06-12 |
KR20030086240A (ko) | 2003-11-07 |
ATE474674T1 (de) | 2010-08-15 |
US6949146B2 (en) | 2005-09-27 |
JP2004006855A (ja) | 2004-01-08 |
SG128506A1 (en) | 2007-01-30 |
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