DE60310471D1 - Verwendung einer Vorrichtung zur Produktion von hochreinem Wasser - Google Patents

Verwendung einer Vorrichtung zur Produktion von hochreinem Wasser

Info

Publication number
DE60310471D1
DE60310471D1 DE60310471T DE60310471T DE60310471D1 DE 60310471 D1 DE60310471 D1 DE 60310471D1 DE 60310471 T DE60310471 T DE 60310471T DE 60310471 T DE60310471 T DE 60310471T DE 60310471 D1 DE60310471 D1 DE 60310471D1
Authority
DE
Germany
Prior art keywords
production
ultrapure water
ultrapure
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60310471T
Other languages
English (en)
Other versions
DE60310471T2 (de
Inventor
Koji Yamanaka
Hiroshi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Organo Corp filed Critical Organo Corp
Publication of DE60310471D1 publication Critical patent/DE60310471D1/de
Application granted granted Critical
Publication of DE60310471T2 publication Critical patent/DE60310471T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/90—Ultra pure water, e.g. conductivity water

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Physical Water Treatments (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
DE60310471T 2002-03-18 2003-03-18 Verwendung einer Vorrichtung zur Produktion von hochreinem Wasser Expired - Lifetime DE60310471T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002073696 2002-03-18
JP2002073696A JP3966501B2 (ja) 2002-03-18 2002-03-18 超純水製造装置

Publications (2)

Publication Number Publication Date
DE60310471D1 true DE60310471D1 (de) 2007-02-01
DE60310471T2 DE60310471T2 (de) 2007-09-27

Family

ID=27785143

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60310471T Expired - Lifetime DE60310471T2 (de) 2002-03-18 2003-03-18 Verwendung einer Vorrichtung zur Produktion von hochreinem Wasser

Country Status (6)

Country Link
US (1) US6951609B2 (de)
EP (1) EP1346953B1 (de)
JP (1) JP3966501B2 (de)
KR (1) KR100943097B1 (de)
DE (1) DE60310471T2 (de)
TW (1) TWI228495B (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040122117A1 (en) * 2001-04-13 2004-06-24 Koji Yamanaka Composite porous ion-exchanger, method for manufacturing the ion-exchanger, deionization module using the ion-exchaner and electric deionized water manufacturing device
US6841580B2 (en) * 2001-12-21 2005-01-11 Organo Corporation Organic porous material, process for manufacturing the same, and organic porous ion exchanger
JP3852926B2 (ja) 2002-08-08 2006-12-06 オルガノ株式会社 ホウ素選択吸着能を有する有機多孔質体、これを用いたホウ素除去モジュールおよび超純水製造装置
JP4011440B2 (ja) * 2002-08-28 2007-11-21 オルガノ株式会社 イオン吸着モジュール及び水処理方法
DE60326173D1 (de) * 2002-10-16 2009-03-26 Aquatech Int Corp Verfahren zur herstellung eines ionenaustauschmediums
CA2552768A1 (en) * 2004-01-22 2005-08-04 Idemitsu Kosan Co., Ltd. Method for treating raw water containing hardly decomposable substance
JP2006272186A (ja) * 2005-03-29 2006-10-12 Denso Corp 水封入方法および水封入装置
US20080115802A1 (en) * 2006-11-22 2008-05-22 Rey-Hsing Chiang Cleaning method for improving wafer surface polluted by metal ions
BRPI0807930A2 (pt) * 2007-02-14 2014-07-01 Dxv Water Technologies Llc Sistemas de filtração, de tratamento de água, de passagem dupla para a dessalinização da água e métodos de tratamento de água, de fabrico de módulo de tratamento de água e de transporte de água
JP5522618B2 (ja) * 2008-11-11 2014-06-18 オルガノ株式会社 モノリス状有機多孔質アニオン交換体およびその製造方法
JP5411737B2 (ja) * 2009-03-10 2014-02-12 オルガノ株式会社 イオン吸着モジュール及び水処理方法
WO2010104004A1 (ja) * 2009-03-10 2010-09-16 オルガノ株式会社 イオン吸着モジュール及び水処理方法
JP5411736B2 (ja) * 2009-03-10 2014-02-12 オルガノ株式会社 超純水製造装置
JP5431195B2 (ja) * 2009-03-12 2014-03-05 オルガノ株式会社 電気式脱イオン水製造装置
JP5431194B2 (ja) * 2009-03-12 2014-03-05 オルガノ株式会社 電気式脱イオン水製造装置
JP5431196B2 (ja) * 2009-03-12 2014-03-05 オルガノ株式会社 電気式脱イオン水製造装置及びその運転方法
JP5430983B2 (ja) * 2009-03-18 2014-03-05 オルガノ株式会社 白金族金属担持触媒、過酸化水素の分解処理水の製造方法、溶存酸素の除去処理水の製造方法及び電子部品の洗浄方法
JP5604143B2 (ja) * 2009-03-18 2014-10-08 オルガノ株式会社 溶存酸素除去水の製造方法、溶存酸素除去水の製造装置、溶存酸素処理槽、超純水の製造方法、水素溶解水の製造方法、水素溶解水の製造装置および電子部品の洗浄方法
JP5431197B2 (ja) * 2009-03-18 2014-03-05 オルガノ株式会社 電気式脱イオン液製造装置
JP5116724B2 (ja) * 2009-05-12 2013-01-09 オルガノ株式会社 超純水製造装置
CA2825674C (en) 2010-02-04 2017-05-16 Dxv Water Technologies, Llc Membrane treatment method using antifouling particles
JP2011173199A (ja) * 2010-02-24 2011-09-08 Makino Milling Mach Co Ltd 工作機械及び加工液供給装置、並びに加工液
JP6427378B2 (ja) * 2014-10-06 2018-11-21 オルガノ株式会社 アンモニア溶解水供給システム、アンモニア溶解水供給方法、およびイオン交換装置
JP6430772B2 (ja) * 2014-10-06 2018-11-28 オルガノ株式会社 炭酸ガス溶解水供給システム、炭酸ガス溶解水供給方法、およびイオン交換装置
JP6473311B2 (ja) * 2014-10-06 2019-02-20 オルガノ株式会社 導電性水溶液製造装置、導電性水溶液製造方法、およびイオン交換装置
US10513446B2 (en) 2014-10-10 2019-12-24 EcoDesal, LLC Depth exposed membrane for water extraction
JP6548942B2 (ja) * 2015-04-03 2019-07-24 オルガノ株式会社 フィルタの評価方法
JP2017119233A (ja) * 2015-12-28 2017-07-06 オルガノ株式会社 有機溶剤の精製方法
WO2018146308A1 (en) 2017-02-13 2018-08-16 Merck Patent Gmbh A method for producing ultrapure water
CN110300735A (zh) 2017-02-13 2019-10-01 默克专利股份公司 用于生产超纯水的方法
US11629071B2 (en) 2017-02-13 2023-04-18 Merck Patent Gmbh Method for producing ultrapure water
WO2018146309A1 (en) * 2017-02-13 2018-08-16 Merck Patent Gmbh A method for producing ultrapure water

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0248313B2 (ja) 1981-11-12 1990-10-24 Asahi Chemical Ind Chojunsuikyokyusetsubi
JPH0478483A (ja) * 1990-07-19 1992-03-12 Toray Ind Inc 超純水の製造システム
JP2652301B2 (ja) * 1992-05-28 1997-09-10 株式会社荏原製作所 洗浄水製造装置
JPH0757301B2 (ja) * 1992-08-07 1995-06-21 株式会社日立製作所 半導体集積回路の洗浄方法及びその洗浄装置
JPH07185544A (ja) * 1993-12-27 1995-07-25 Asahi Chem Ind Co Ltd シリカ除去機能を有する超純水製造システム
JPH0889954A (ja) * 1994-09-21 1996-04-09 Asahi Chem Ind Co Ltd ユースポイントモジュールシステム
JPH08252579A (ja) 1995-01-19 1996-10-01 Asahi Glass Co Ltd 多孔質イオン交換体および脱イオン水の製造方法
US5626750A (en) * 1995-07-26 1997-05-06 Drake Recovery Systems, Inc. Apparatus for treating a fluid in an ion exchange process
SE9504205D0 (sv) * 1995-11-24 1995-11-24 Pharmacia Biotech Ab A chromatographic separation method and device
JP3426072B2 (ja) * 1996-01-17 2003-07-14 オルガノ株式会社 超純水製造装置
JP4080565B2 (ja) * 1996-04-26 2008-04-23 大日本インキ化学工業株式会社 多孔質体の製造方法および多孔質体
JP2000515802A (ja) * 1996-07-19 2000-11-28 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフトング 模擬移動床分離プロセスのための非粒状収着剤の使用
JPH10192716A (ja) 1997-01-07 1998-07-28 Asahi Glass Co Ltd 多孔質イオン交換体および脱イオン水の製造方法
JPH10192717A (ja) 1997-01-09 1998-07-28 Asahi Glass Co Ltd 多孔質イオン交換体及び脱イオン水の製造方法
JPH10216717A (ja) 1997-01-30 1998-08-18 Asahi Glass Co Ltd 多孔質イオン交換体及び脱イオン水の製造方法
DE19726164A1 (de) * 1997-06-20 1998-12-24 Merck Patent Gmbh Halterung für monolithische Sorbentien
JPH11260787A (ja) * 1998-03-09 1999-09-24 Japan Organo Co Ltd シリコン物品表面の清浄化方法
JP2000228387A (ja) * 1998-12-01 2000-08-15 Tadahiro Omi ウエット洗浄装置
KR100314714B1 (ko) 1999-10-25 2001-11-23 지은상 초순수제조방법
JP3673452B2 (ja) * 2000-07-03 2005-07-20 株式会社荏原製作所 耐汚染性多孔質濾過膜
US20040122117A1 (en) 2001-04-13 2004-06-24 Koji Yamanaka Composite porous ion-exchanger, method for manufacturing the ion-exchanger, deionization module using the ion-exchaner and electric deionized water manufacturing device
KR20030016291A (ko) 2001-04-13 2003-02-26 오르가노 가부시키가이샤 이온교환체
JP3781361B2 (ja) * 2002-02-08 2006-05-31 オルガノ株式会社 電気式脱イオン水製造装置
JP2003267719A (ja) * 2002-03-15 2003-09-25 Nippon Steel Corp 多孔体、多孔体膜を有する基体およびこれらの製造方法

Also Published As

Publication number Publication date
JP2003266069A (ja) 2003-09-24
TW200306283A (en) 2003-11-16
KR20030076296A (ko) 2003-09-26
US20030173282A1 (en) 2003-09-18
DE60310471T2 (de) 2007-09-27
TWI228495B (en) 2005-03-01
JP3966501B2 (ja) 2007-08-29
KR100943097B1 (ko) 2010-02-18
EP1346953A1 (de) 2003-09-24
US6951609B2 (en) 2005-10-04
EP1346953B1 (de) 2006-12-20

Similar Documents

Publication Publication Date Title
DE60310471D1 (de) Verwendung einer Vorrichtung zur Produktion von hochreinem Wasser
DE60301590D1 (de) Vorrichtung zur Produktion von entionisiertem Wasser durch Elektrodenionisation
DE60301664D1 (de) Vorrichtung zur verabreichen einer verschlussvorrichtung
DE60323014D1 (de) Vorrichtung zur Ausführung einer Zeit-Limitierungs-Funktion
DE60214060D1 (de) Vorrichtung zur Bereitstellung von Wegbeschreibung
DE60237396D1 (de) Verfahren zur beurteilung des zustands einer zusammengebauten batterie
DE60301922D1 (de) Vorrichtung zur Entnahme von Objekten
DE60128159D1 (de) Vorrichtung zur reformierung von Brennstoff
DE60112371D1 (de) Vorrichtung zur Herstellung einer säurehaltigen Flüssigkeit
DE60328347D1 (de) Vorrichtung zur Entnahme einer Körperprobe
DE60324213D1 (de) Vorrichtung und Methode zur Produktion von elektrisch deionisiertem Wasser
DE60308281D1 (de) Verfahren zur Herstellung von elektrolysiertem Wasser
DE60321883D1 (de) Verfahren zur Herstellung einer Vorrichtung
DE60306830D1 (de) Vorrichtung zur Befestigung von blattförmigen Material
DE60212054D1 (de) Generator zur Verwendung in einer mikroelektromechanischen Vorrichtung
DE60232236D1 (de) Verfahren zur herstellung einer sekundärbatterie und derer herstellungseinrichtung
DE50109023D1 (de) Vorrichtung zur Herstellung von Wellrohren
DE60312949D1 (de) Vorrichtung zur Herstellung einer Reifenlage
DE60323051D1 (de) Verfahren zur Herstellung einer Vorrichtung
DE60009210D1 (de) Vorrichtung zur Herstellung von Wasserstoff
DE60329470D1 (de) Vorrichtung zur herstellung von broschüren
DE602005019685D1 (de) Verwendung von idebenon zur herstellung einer topi
DE69916725D1 (de) Vorrichtung zur herstellung von zement
ATE546566T1 (de) Vorrichtung zur umwandlung von energie
ATA8932003A (de) Vorrichtung zur abstützung des rumpfes einer person

Legal Events

Date Code Title Description
8364 No opposition during term of opposition